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AME Parts, R&D Semiconductor Equipment

Engineering, Design, & Manufacturing Services

Measurement and Turbo Balancing System, Semiconductor Equipment and Related Major Components

Fluid Dispensing & Metering Pumps

Ion Implanter Parts, R&D Semiconductor Equipment

LAM Systems Parts & More Semiconductor Equipment

Mass Flow Controller List #1

Mass Flow Controller List #2

Mass Flow Controller List #3

MFC’s, Turbo Balancing System, Semi Equipment, Etc.

Mass Flow Controller Related Products

Microscopes, R&D Semiconductor Equipment

Photos of Some Equipment and Parts

Semiconductor Equipment with Related Major Components

Test Systems & Semiconductor Equipment

R & D Semiconductor Equipment, Tegal Parts

Vacuum Pumps

Varian Parts List, Semiconductor Equipment

Equipment for Sale Hot List

Equipment Wanted, List #1

Equipment Wanted, List #2

Equipment Wanted, List #3

Used Semiconductor Equipment, Vacuum Systems, Pumps, Etc: fl01

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02a

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02b

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02c

Vacuum Pumps: Turbo, Dry, Cryo, Etc: fl03

Semiconductor Back End Equipment, Etc: fl04

Helium Leak Detectors, Rebuilt: fl05

Wafer Fab or Semiconductor Equipment: fl06

Plasma Systems, Vacuum Pumps, Etc: fl07A

Vacuum Systems Systems, Vacuum Pumps, Power Supplies, Etc: fl07B

Vacuum Packaging Systems: fl08

Used or Pre-owned Semiconductor Equipment: fl09

Semiconductor Equipment: fl10

Semiconductor Equipment: fl11

Semiconductor Equipment: fl12

Semiconductor Equipment: fl13

Semiconductor Equipment: fl14

Semiconductor Equipment: fl15

Semiconductor Equipment: fl16

8 Inch Semiconductor Equipment: fl17

Helium Leak Detectors & Vacuum Pumps: fl18

Vacuum Pumps: Oil, Turbo, Dry, Cryo, & More: fl18a

Helium Leak Detectors, RF Generators, Vacuum Pumps, Etc: fl19

Parts for Novellus, Concept One & Two, Wafer Fab Equipment, fl20

Leybold Helium Leak Detectors, Converters, Turbo Pumps, Etc.fl21

Various Helium Leak Detectors, Converters and Vacuum Pumps, Etc.fl22

6 Inch Wafer Fab Equipment, Back End Semiconductor Equipment, Etc, fl23

Back End Semiconductor Equipment, 6 Inch Wafer Fab Equipment, Etc, fl24

Used or Surplus Semiconductor & Back End Equipment Etc, fl25

Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26

Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26a

Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26b

Six Inch (6 Inch) Semiconductor or Wafer Fab Equipment Package, Etc. fl27

Semiconductor Equipment: Ion Implanters, Furnaces, Resistivity Meter, Etc. fl28

Semiconductor Equipment: Kokusai & TEL Furnaces, Ion Implanters, 4 Point Probe, Etc. fl29

Semiconductor Equipment: Sputterers, Etchers, Steppers, Kokusai & TEL Furnaces, Ion Implanters, Etc. fl30

Surplus Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. fl31

Surplus Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. fl32

KLA Equipment, Back End & 6 Inch Semiconductor Equipment, Dicing Saws, fl33

Scanning Electron Microscopes, SEMS, Measurement Systems, Accessories, & Semiconductor Equipment, fl34

Semiconductor Equipment Parts, fl35

Rebuilt or Refurbished Semiconductor Equipment, fl36

Vacuum Systems, Wafer Fab Line, Etc, fl37

Semiconductor Equipment, Vacuum Plasma Systems, Vacuum Pumps, Power Supplies, Parts, Etc, fl38

Business Opportunities Online & Internet Resources

Our site is
http://gonow.to/olmenterprises
gonow.to easy to remember web address service
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Semiconductor Equipment, Turbo Balancing & Measurement System, Polishing Wheels, and Parts List

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To see photos or pictures of other equipment and parts, please click here.


Digital Scan NV6200 Spares

Interface computer and data links

Item # Description Axcellis Part No. Page Qty
1 Assembly, Interface Computer 0342-0707-4001 13-5 1
2 F1,2 digital I/O card 0342-0689-4001 13-09 1
3 F5 analog input interface card 0342-0681-4001 13-11 1
4 F7 A/D PCB mod 0342-0770-2001 13-13 1
5 F9 programmable counter PCB 0342-0720-4001 13-15 1
6 F10 programmable counter PCB 0342-0721-4001 13-17 1
7 F14 MPU PCB 0342-0772-3001 13-15 1
8 F16 Interface PCB 0342-0771-3001 13-21 1
9 Assy, Terminal controller processor PCB 0342-0918-0001R 8-67 3
10 Source terminal data link 0342-0906-0001 8-31 1
11 Assembly, magnet terminal data link 0342-0907-0001 8-11 1

A rack and PCB's

Item # Description Axcellis Part No. Page Qty
1 Assembly, "A Rack", Complete Unkown Section 3 1
2 A2 I/O relay driver PCB 0342-0160-4001 3-05 1
3 A3 I/O switch interface PCB 0342-0158-4001 3-07 1
4 A4 status display PCB 0342-0156-4001 3-09 1
5 A5-8 printer interface PCB 0342-0668-4001 3-15 1
6 A9 condition monitor PCB 0342-0050-4001 3-17 1
7 A10 hvps control PCB 0342-0576-4001 3-19 1
8 A12 system alarm PCB 0342-0175-4001 3-21 1
9 A13 accelerator alarm PCB 0342-0161-4001 3-23 1
10 A14 chamber vacuum control PCB 0342-0049-4001 3-25 1
11 A15 process control PCB 0342-0977-4001 3-27 1
12 A16 beam current amplifier PCB 5990-0097-4001 3-29 1
13 A17 beam current display driver PCB 0342-0138-4001 3-31 1
14 A18 beam current integrator PCB 0342-0408-4002 3-33 1
15 A19 scan generator PCB 0342-0607-4001 3-35 1
16 A20 system monitor interface PCB 0342-0679-3001 3-37 1
17 A24 end station vac control interface PCB 0342-1077-4001 3-37 1

H rack and PCB's

Item # Description Axcellis Part No. Page Qty
1 H1 isolation buffer PCB 0342-1033-4001 10-13 1
2 H3 input/output PCB 0342-0977-9001 10-17 1
3 H4 power input/output PCB 0342-1000-9001 10-20 1
4 H5, 7, 8, 10 stepper motor controller PCB 0342-0922-4001 10-25 5
5 H6, 9 buffer PCB 0342-0987-4001 10-29 2
6 High current motor driver PCB 0342-1027-0002 10-35 2

K rack and PCB's

Item # Description Axcellis Part No. Page Qty
1 K2 scan clock card 0342-1051-0001 4-25 1
2 K3 vertical scan generator card 0342-1049-0001 4-30 1
3 K4 horizontal scan generator card 0342-1050-0001 4-34 1
4 K5 scan system card 0342-1052-0001 4-39 5
5 K6 multi-function card 0342-1053-0001 4-43 1
6 K7 front panel I/O card 0342-1054-0001 4-47 1

Terminal PCB's

Item # Description Axcellis Part No. Page Qty
1 Vapourizer source control PCB 0342-0552-4001 8-47 1
2 Filament power supply PCB 0342-0601-4001 8-35 1
3 Magnet power supply regulator PCB 0342-0254-3001 8-09 1
4 Discharge power regulator DTC PCB 0342-1435-0001 8-39 1
5 Source gas servo amplifier PCB 0342-0910-4002 8-43 1

Item # Description Axcellis Part No. Page Qty
1 PSU, filament 0342-0854-4001 1
2 PSU AMAG 0342-1429-0002C 1
3 PSU AMAG 0342-1429-0001 1

8200 Spares

Item # Description Axcellis Part No. Page Qty
1 Scan Tilt DI (repaired) 1027-0102-0001 1
2 Amplifier, Servo, Brush 0261-0102-0001 1

If interested in one or more, or all of the items above,   please click here.


New Parts for Novellus Systems

Item # OEM P/N Description Quantity
1 02-0093-00 One Arm Robot 4
2 15-00701-00 Bottom Fork Plate, 150 MM 10
3 15-00703-00 Top Fork Plate, 150 MM 10
4 16-033932-00 Pinned Showerhead Weldment, 150 MM 16
5 16-033931-00 Pinned Showerhead Weldment, 200 MM 16
6 02-029514-01 Left Indexer Assembly 1
7 02-029514-02 Right Indexer Assembly 1

If interested in one or more items,   please click here.


Excess Semiconductor Equipment Parts Inventory

Item Description Qty
1 Advanced Energy PE 1000 RF Generator 24
2 Aera MFC FC-980 10 SCCM WF6 2
3 Aera MFC FC-980 500 SCCM Argon 1
4 MKS Throttle Valve #653B-13064 41

If interested in one or more items,   please click here.


Unused or New Mass Flow Controllers

Item Description Model Qty Comments
1 Aera MFC, 10 SLM, N2 TC FC-D981SBC 1  
2 Aera MFC, 1 SLM, N2 TC FC-D980C 1 Range: Multi, Gas: Multi
3 Aera MFC, 100 SCCM, N2 TC FC-D980C 1 Range: Multi, Gas: Multi
4 Brooks, 1000 Sccm, SiH4 5850E 3  

If interested in one or more items,   please click here.


Unused (New) Parts List

Item Manufacturer Part No. Qty Description
1 Veriflo IR400SZ0064 96 Pressure Regulators
2 Parker 4VH4VI-P4K-11AC-SS-1575 54 CPI Valves, 1/4" VCR Inlet/Outlet
3 Swagelock 4ZV4AR-SS 3 1/4" Right Angle Manual Valve
4 Nupro S-4BY-V35-1C 12 Three Way Valve
5 VAT F03-83826/0016
03009-NA24-1001
1 Gate Valve
6 VAT Code: 12040-FE44-X 1 Gate Valve, DN100 (4")
Double Acting w/ Solenoid Valve
and with Positive Indicator, 24 VDC
7 MORE COMING MORE COMING


Excess Semiconductor Equipment Parts Inventory

Item Description Qty
1 Advanced Energy PE 1000 RF Generator 24
2 Aera MFC FC-980 10 SCCM WF6 2
3 Aera MFC FC-980 500 SCCM Argon 1
4 MKS Throttle Valve #653B-13064 41

If interested in one or more items,   please click here.


Unused or New Mass Flow Controllers

Item Description Model Qty Comments
1 Aera MFC, 10 SLM, N2 TC FC-D981SBC 1  
2 Aera MFC, 1 SLM, N2 TC FC-D980C 1 Range: Multi, Gas: Multi
3 Aera MFC, 100 SCCM, N2 TC FC-D980C 1 Range: Multi, Gas: Multi
4 Brooks, 1000 Sccm, SiH4 5850E 3  

If interested in one or more items,   please click here.


Rotary Polishing Wheel

Please click on the image below for enlarged photo

Mounted Felt Polishing Wheel

  • 3M Satin Finishing Material
  • Stainless steel material for 3/32" shank and related parts
    • Specifications:
      • 7/8 X 3/8 X 3/32
      • 7/8 X X 3/32

Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.

If interested,   please click here.


If interested in one or more items,   please click here.

If you need Mass Flow Controllers, please click here.

If you need Vacuum Pumps, please click here.


Please contact us at:

OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293

E-mail: info@semiconweb.net


AME Parts, R&D Semiconductor Equipment | Engineering, Design, and Manufacturing Services | Measurement and Turbo Balancing System, Semiconductor Equipment and Related Major Components | Fluid Dispensing & Metering Pumps | Ion Implanter Parts, R & D Semiconductor Equipment | LAM Systems Parts & More Semiconductor Equipment | Mass Flow Controller List #1 | Mass Flow Controller List #2 | Mass Flow Controller List #3 | MFC’s, Turbo Balancing System, Semi Equipment, Etc. | Mass Flow Controller Related Products | Microscopes, R&D Semiconductor Equipment | Photos of Some Equipment and Parts | Semiconductor Equipment with Related Major Components | Test Systems & Semiconductor Equipment | R & D Semiconductor Equipment, Tegal Parts | Vacuum Pumps | Varian Parts List, Semiconductor Equipment | Equipment For Sale Hot List | Equipment Wanted, List #1 | Equipment Wanted, List #2 | Equipment Wanted, List #3 | Used Semiconductor Equipment, Vacuum Systems, Pumps, Etc: fl01 | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02 | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02a | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02b | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02c | Vacuum Pumps: Turbo, Dry, Cryo, Etc.: fl03 | Semiconductor Back End Equipment, Etc.: fl04 | Helium Leak Detectors, Rebuilt: fl05 | Wafer Fab or Semiconductor Equipment: fl06 | Plasma Systems, Vacuum Pumps, Etc: fl07A | Vacuum Systems, Vacuum Pumps, Etc: fl07B | Vacuum Packaging Systems, Pumps, Power Supplies, Etc: fl08 | Used or Pre-Owned Semiconductor Equipment: fl09 | Semiconductor Equipment: fl10 | Semiconductor Equipment: fl11 | Semiconductor Equipment: fl12 | Semiconductor Equipment: fl13 | Semiconductor Equipment: fl14 | Semiconductor Equipment: fl15 | Semiconductor Equipment: fl16 | Eight Inch (8 Inch) Semiconductor Equipment: fl17 | Helium Leak Detector & Vacuum Pumps: fl18 | Vacuum Pumps: Oil, Turbo, Dry, Cryo, & More - fl18a | Helium Leak Detectors, RF Generators, Vacuum Pumps, Etc: fl19 | Novellus Parts, Concept One & Two, Wafer Fab Equipment, fl20 | Leybold Helium Leak Detectors, Converters, Turbo Pumps, Etc: fl21 | Various Helium Leak Detectors, Vacuum Pumps, Etc: fl22 | 6 Inch Wafer Fab Equipment, Back End Semiconductor Equipment, Etc: fl23 | Back End Semiconductor Equipment, 6 Inch Wafer Fab Equipment, Back End Equipment, Etc: fl24 | Used or Surplus Semiconductor & Back End Equipment, Etc: fl25 | Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26 | 4 Inch Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26a | 4 Inch Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26b | Six Inch (6 Inch) Semiconductor or Wafer Fab Equipment Package, Etc. fl27 | Semiconductor Equipment: Ion Implanters, Furnaces, Resistivity Meter, Etc. fl28 | Semiconductor Equipment: Kokusai & TEL Furnaces, Ion Implanters, 4 Point Probe, Etc. fl29 | Semiconductor Equipment: Sputterers, Etchers, Steppers, Kokusai & TEL Furnaces, Ion Implanters, Etc. fl30 | Surplus Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. fl31 | Surplus Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. fl32 | KLA Equipment, Back End & 6 Inch Semiconductor Equipment, Dicing Saws, fl33 | Scanning Electron Microscopes, SEMS, Measurement Systems, & Semiconductor Equipment, fl34 | Semiconductor Equipment Parts, fl35 | Rebuilt or Refurbished Semiconductor Equipment, fl36 | Vacuum Systems, Wafer Fab Line, Etc, fl37 | Semiconductor Equipment, Vacuum Plasma Systems, Power Supplies, Vacuum Pumps, Parts, Etc, fl38 | Business Opportunities Online & Internet Resources | Advertise Worldwide Online


If you don't find the product you came for, we set up another communications vehicle so you can place the product you want to buy or want to sell thru our "Classified Ads Section".  We believe this worldwide advertising for FREE or Extended can help our valued visitors get what they want. Please click on the following link.

However, if you are interested to advertise with a whole page like this, or part of it in plain text, table or list formats, button or banner ads, please click here  for more information.


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OLM Enterprises
Semiconductor Equipment Resource Center


Copyright 1999 OLM Enterprises