Please
contact:
OLM Enterprises
Tel:
408-259-1900 Fax:
408-259-1990
Email: info@semiconweb.net
______________________________
Five
Inch Semiconductor Equipment for Sale
On Per
Equipment Basis
Reference
Code: MS625/SYS
Note 1:
All systems in “blue” are no longer available.
Note 2:
All systems are subject to availability at time and date of inquiry.
|
|
Item
# |
EQUIPID |
SYSTEM_TYPE |
MANUFACTURE |
MODEL_NUM |
SERIAL
# |
ASSET_NUM |
|
Aligner |
1 |
P32PE |
PE
ALIGNER |
SVGL |
552HT |
I4712 |
1244 |
|
|
2 |
P41PE |
PE
ALIGNER |
SVGL |
552HT |
B4661 |
1367 |
|
|
3 |
P43PE |
PE
ALIGNER |
SVGL |
554HT |
C5552 |
1368 |
|
|
4 |
P44PE |
PE
ALIGNER |
SVGL |
550 |
B3701 |
1365 |
|
|
5 |
P45PE |
PE
ALIGNER |
SVGL |
552 |
B3321 |
1369 |
|
|
6 |
P46PE |
PE
ALIGNER |
SVGL |
550R |
2470R |
1364 |
|
|
7 |
P47PE |
PE
ALIGNER |
SVGL |
552HT |
2651R |
1086 |
|
|
8 |
P48PE |
PE
ALIGNER |
SVGL |
552HT |
I4612 |
1435 |
|
|
9 |
P51PE |
PE
ALIGNER |
SVGL |
552HT |
E4791 |
1438 |
|
|
10 |
P35PE |
PE
ALIGNER |
SVGL |
552HT |
K4722 |
1993 |
|
|
11 |
P31PE |
PE
ALIGNER |
SVGL |
552HT |
K4422 |
1995 |
|
|
12 |
P33PE |
PE
ALIGNER |
SVGL |
552HT |
C4581 |
1994 |
|
|
13 |
P34PE |
PE
ALIGNER |
SVGL |
552HT |
D4081 |
1996 |
|
|
14 |
P37PE |
PE
ALIGNER |
PERKIN
ELMER |
552HT |
C5942 |
1992 |
|
|
15 |
P38PE |
PE
ALIGNER |
SVGL |
552HT |
L3351 |
1998 |
|
|
16 |
P52PE |
PE
ALIGNER |
SVGL |
552HT |
L4922 |
1168 |
|
|
17 |
P53PE |
PE
ALIGNER |
SVGL |
552HT |
L4232 |
1437 |
|
|
18 |
P55PE |
PE
ALIGNER |
PERKIN
ELMER |
552HT |
L4232 |
0935 |
|
Track |
19 |
P31CTR |
COATER |
SVG |
8100 |
600311 |
1241 |
|
|
20 |
P37CTR |
COATER |
SVG |
8100 |
G5100 |
0648 |
|
|
21 |
P42CTR |
COATER |
SVG |
8100 |
601988 |
1231 |
|
|
22 |
P44CTR |
COATER |
SVG |
8100 |
G5101 |
1232 |
|
|
23 |
P46CTR |
COATER |
SVG |
8100 |
074-137 |
1361 |
|
|
24 |
P34DEV |
DEVELOPER |
SVG |
8100 |
1900 |
0190 |
|
|
25 |
P38DEV |
DEVELOPER |
SVG |
8100 |
034-303S |
1379 |
|
|
26 |
P41DEV |
DEVELOPER |
SVG |
8100 |
99-4164-13 |
1371 |
|
|
27 |
P43DEV |
DEVELOPER |
SVG |
8100 |
99-4164-14 |
1372 |
|
|
28 |
P45DEV |
DEVELOPER |
SVG |
8100 |
99-4164-15 |
1082 |
|
|
29 |
P51DEV |
DEVELOPER |
SVG |
8100 |
99-4164-16 |
1442 |
|
|
30 |
P52DEV |
DEVELOPER |
SVG |
8100 |
99-4164-17 |
1408 |
|
|
31 |
P32ACTR |
NEGCOAT |
SVG |
8100 |
99-4164-12 |
1816 |
|
|
32 |
P36DEV |
developer |
SVG |
8100 |
98-04010-15 |
1406 |
|
|
33 |
B1COT |
SVG
Resist Coater |
SVG |
214300 |
86700-1078 |
2143 |
|
|
34 |
E1TAZ |
Spin
On Glass |
SEMIX |
TR613200 |
686079 |
1967 |
|
Furnace |
35 |
FTEL |
Furnance |
TEL
SAGAMATI |
UL-260-08 |
9X0165 |
1103 |
|
|
36 |
DAX |
Four
Tube Horizontal Furnace |
LINDBERG |
260 |
610517 |
1471 |
|
|
37 |
DBX |
Four
Tube Horizontal Furnace |
LINDBERG |
260 |
610520 |
1953 |
|
|
38 |
DCX |
Four
Tube Horizontal Furnace |
LINDBERG |
260 |
610518 |
1952 |
|
|
39 |
DDX |
Four
Tube Horizontal Furnace |
LINDBERG |
260 |
610522 |
1941 |
|
|
40 |
DGX |
Four
Tube Horizontal Furnace |
LINDBERG/TEMPRESS |
260
DDC / 260-014 |
848941
/ 610145 |
1931 |
|
|
41 |
DIX |
Four
Tube Horizontal Furnace |
LINDBERG/TEMPRESS |
260
DDC/260- |
848540
/ 610103 |
1921 |
|
|
42 |
DJX |
Four
Tube Horizontal Furnace |
LINDBERG/TEMPRESS |
260
DDC/260 |
610102
/ 610102 |
1917 |
|
|
43 |
DZX |
Four
Tube Horizontal Furnace |
TEMPRESS |
TS
61004 |
97-K024 |
0662 |
|
|
44 |
F2PWS |
Furnance |
PACIFIC
WESTERN SYSTEMS |
DA30448 |
12574 |
1867 |
|
Etcher/Wet
Oxide |
45 |
E1SNK |
Wet
Oxide Etch |
SANKYO |
AWC-662S |
SNY1480M |
0166 |
|
|
46 |
E13LAM |
Oxide
Etcher |
LAM
RESEARCH |
580
AUTOETCHER |
1065 |
1864 |
|
|
47 |
E14LAM |
Oxide
Etcher |
LAM
RESEARCH |
580
AUTOETCHER |
1053 |
1972 |
|
|
48 |
E15LAM |
Oxide
Etcher |
LAM
RESEARCH |
580
AUTOETCHER |
1136 |
1863 |
|
|
49 |
E16LAM |
Oxide
Etcher |
LAM
RESEARCH |
580
AUTOETCHER |
1269 |
0552 |
|
|
50 |
E18LAM |
Oxide
Etcher |
LAM
RESEARCH |
580
AUTOETCHER |
1207 |
1973 |
|
|
51 |
E19LAM |
Oxide
Etcher |
LAM
RESEARCH |
580
AUTOETCHER |
1012 |
1861 |
|
|
52 |
E110LAM |
Oxide
Etcher |
LAM
RESEARCH |
580
AUTOETCHER |
1166 |
1245 |
|
|
53 |
E21
X PHOS |
Wet
Nitride Etch |
NOAH
PRECISION |
1008/5 |
117594 |
1307 |
|
Etcher/Wet
Metal |
54 |
E71ATIW |
Wet
Metal Etch |
NOAH
PRECISION |
62100 |
1000/4 |
0621 |
|
|
55 |
E71
X MET |
Wet
Metal Etch |
SCP |
UNKNOWN |
UNKNOWN |
1906 |
|
Etcher/Wet
Silicon |
56 |
E72
X DEF |
Wet
Silicon Etch |
NOAH
PRECISION |
1000 |
NP179295 |
2383 |
|
Etcher/Poly-Oxide |
57 |
E5K5AME |
Silicon
Etcher |
APPLIED
MATERIALS |
P5000 |
6160 |
1402 |
|
|
58 |
E26AME |
Poly
/ Oxide Etcher |
APPLIED
MATERIALS |
8100 |
300701 |
1982 |
|
|
59 |
E76AME |
Aluminium
Etcher |
APPLIED
MATERIALS |
8300 |
013901 |
0637 |
|
|
60 |
E78AME |
Aluminium
Etcher |
APPLIED
MATERIALS |
8300 |
268901 |
1463 |
|
Etcher/Nitride |
61 |
E63BSN |
Nitride
Etcher |
BRANSON
IPC |
2100
SERIES |
M905631-1 |
1909 |
|
|
62 |
E21BSN |
Nitride
Etcher |
BRANSON
IPC |
2100
SERIES |
10002288 |
2518 |
|
|
63 |
E61LAM |
Poly
/ Nitride |
LAM
RESEARCH |
480
AUTOETCHER |
1194 |
1287 |
|
|
64 |
E62LAM |
Poly
/ Nitride |
LAM
RESEARCH |
480
AUTOETCHER |
1179 |
0831 |
|
|
65 |
E63LAM |
Poly
/ Nitride |
LAM
RESEARCH |
480
AUTOETCHER |
1019 |
1288 |
|
|
66 |
E64LAM |
Poly
/ Nitride |
LAM
RESEARCH |
480
AUTOETCHER |
1085 |
1865 |
|
|
67 |
E65LAM |
Poly
/ Nitride |
LAM
RESEARCH |
480
AUTOETCHER |
1229 |
1114 |
|
|
68 |
E69LAM |
Poly
/ Nitride |
LAM
RESEARCH |
480
AUTOETCHER |
1110 |
1290 |
|
|
69 |
E67LAM |
Poly
/ Nitride |
LAM
RESEARCH |
480
AUTOETCHER |
1033 |
1115 |
|
|
70 |
E22
X SUF |
Wet
Resist Strip |
WAFAB |
VLFRA102-28-72 |
UNKNOWN |
0988 |
|
|
71 |
E61
X RCA |
Wet
Resist strip |
NOAH
PRECISION |
UNKNOWN |
UNKNOWN |
1492 |
|
|
72 |
E62
X PRS |
Wet
Resist Strip |
SANTA
CLARA PLASTICS |
UNKNOWN |
UNKNOWN |
1275 |
|
|
73 |
E63
X RCA |
Unknown |
WAFAB |
UNKNOWN |
UNKNOWN |
2306 |
|
|
74 |
E62
X SOX |
Unknown |
Santa
Clara Plastic |
UNKNOWN |
UNKNOWN |
1525 |
|
Asher |
75 |
E11RAM |
Photoresist
Asher |
RAMCO |
6500 |
7160 |
2315 |
|
|
76 |
E13RAM |
Photoresist
Asher |
RAMCO |
RAM250 |
6997 |
2039 |
|
|
77 |
E15RAM |
Photoresist
Asher |
RAMCO |
6500 |
7196 |
2420 |
|
|
78 |
E17RAM |
Photoresist
Asher |
RAMCO |
RAM-6500 |
7195 |
2372 |
|
|
79 |
E61RAM |
Photoresist
Asher |
RAMCO |
6500 |
7241 |
2371 |
|
|
80 |
E63RAM |
Photoresist
Asher |
RAMCO |
6500 |
7242 |
2421 |
|
|
81 |
G4AMS |
APCVD
System, Doped |
APPLIED
MATERIALS |
AMS
2100 |
7002 |
1101 |
|
|
82 |
G6AMS |
Doped
APCVD System |
APPLIED
MATERIALS |
AMS
2100 |
7635 |
1892 |
|
|
83 |
G3AMS |
Doped
APCVD System |
APPLIED
MATERIALS |
AMS
2100 |
7490 |
1895 |
|
|
84 |
F2SPU |
Platinum
,TiW Sputter |
VARIAN 3180 |
983-3053 |
83145-104 |
1877 |
|
|
85 |
F8SPU |
AlCu
Sputter |
VARIAN 3280 |
983-3252 |
86587-499 |
1883 |
|
|
86 |
F9SPU |
SPUTTER |
VARIAN 3280 |
983-3262 |
86610-517 |
1153 |
|
|
87 |
F10
SPU |
SPUTTER |
VARIAN
3280 |
9833262 |
84403348 |
1152 |
|
SRD |
88 |
S209SRD |
Spin
Rinse Wafer Dryer |
SEMITOOL |
P226 |
11984 |
0746 |
|
|
89 |
S211SRD |
Spin
Rinse Wafer Dryer |
VERTEQ |
1600-55M |
34400A |
0677 |
|
|
90 |
F189SRD |
Spin
Rinse Dryer |
SEMITOOL |
860-D |
Missing |
1448 |
|
|
91 |
F191SRD |
Spin
Rinse Dryer |
SEMITOOL |
860-D |
Missing |
1455 |
|
|
92 |
F193SRD |
Spin
Rinse Dryer |
SEMITOOL |
860-D |
5224VTI |
1453 |
|
|
93 |
B195SRD |
Spin
Rinse Dryer |
SEMITOOL |
860-D |
C6440Q |
1417 |
|
|
94 |
B199SRD |
Spin
Rinse Dryer |
SEMITOOL |
860-D |
C2621C |
1110 |
|
|
95 |
D164SRD |
Spin
Rinse Dryer |
SEMITOOL |
UNKNOWN |
|
1856 |
|
|
96 |
D185SRD |
Spin
Rinse Dryer |
SEMITOOL |
UNKNOWN |
|
1295 |
|
|
97 |
D187SRD |
Spin
Rinse Dryer |
SEMITOOL |
UNKNOWN |
|
1297 |
|
|
98 |
E157SRD |
Spin
Dryer |
SEMITOOL |
ST-260 |
5173 |
1389 |
|
|
99 |
E201SRD |
Spin
Dryer |
VERSATILE
TECHNOLOGIES |
ST-260 |
5499 |
1391 |
|
|
100 |
E167SRD |
Spin
Dryer |
SEMITOOL |
ST-260 |
5216 |
1277 |
|
|
101 |
E169SRD |
Spin
Dryer |
SEMITOOL |
ST-260 |
NA |
1279 |
|
|
102 |
E171SRD |
Spin
Dryer |
SEMITOOL |
ST-260 |
5527 |
1282 |
|
|
103 |
E174SRD |
Spin
Dryer |
SEMITOOL |
ST-260 |
5176 |
1491 |
|
|
104 |
E181SRD |
Spin
Dryer |
SEMITOOL |
ST-260 |
UNKNOWN |
2584 |
|
|
105 |
E207SRD |
Spin
Dryer |
VERSATILE
TECHNOLOGIES |
ST-270 |
11987 |
0626 |
|
|
106 |
E177SRD |
Spin
Dryer |
SEMITOOL |
ST-260 |
5164 |
1282 |
|
|
107 |
E179SRD |
Spin
Dryer |
SEMITOOL |
ST-260 |
5392 |
1469 |
|
|
108 |
E175SRD |
Spin
Dryer |
SEMITOOL |
ST-260 |
5177 |
1459 |
|
Cleaner-Sink |
109 |
S4MEG |
Megasonic
Cleaner |
VERTEQ |
ST600-42TL |
34401 |
0679 |
|
|
110 |
S5MEG |
Megasonic
Cleaner |
VERTEQ |
ST600-62T |
18214 |
0916 |
|
|
111 |
B1ASNK |
2
Tank Resist Strip Sink |
SANTA
CLARA PLASTICS |
SCP
3107 |
Missing |
1109 |
|
|
112 |
E62POLY |
Poly
Etch ( MOAT Sink ) |
WAFAB |
UNKNOWN |
UNKNOWN |
1068 |
|
|
113 |
E22XSUF
OLD |
Sink |
NOAH |
UNKNOWN |
UNKNOWN |
1985 |
|
Scrubber |
114 |
F4ASCB |
Wafer
scrubber 2
track |
SILICON
VALLEY GROUP |
8620SSC |
Missing |
1903 |
|
|
115 |
F5ASCB |
Wafer
scrubber 3
track |
SILICON
VALLEY GROUP |
8620SSC |
Missing |
1096 |
|
|
116 |
F1DNS |
Spin
Scrubber |
DAINIPPON
SCREEN |
SSW629B |
54700-8686 |
2411 |
|
|
117 |
B1DLAM |
Wafer
Tape Remove |
NEL
SYSTEMS |
HR8500II |
N341196 |
0169 |
|
Metrology |
118 |
M1FTR |
Epi
Film Thickness |
BIORAD |
QS300 |
12330 |
1845 |
|
|
119 |
M1RSMP |
Resistivity
Probe |
CREATIVE
DESIGN ENG. |
CDE
RESMAP178 |
612110178 |
0587 |
|
|
120 |
M1FSM |
Stress
Measureing Tool |
FILM
STRESS MEASUREMENT |
FSM
8800 |
881314 |
1884 |
|
|
121 |
M1PRESNT |
Wafer
presenter,inspection |
H-SQUARE
CORP |
WP5-AC |
003 |
0159 |
|
|
122 |
M2PRESNT |
Wafer
presenter,inspection |
H-SQUARE
CORP |
WP5-AC |
3625 |
0999 |
|
|
123 |
M3PRESNT |
Wafer
presenter,inspection |
H-SQUARE
CORP |
WP6-AC |
3614 |
1148 |
|
|
124 |
M1HIT |
CD
Measurement |
HITACHI |
S-6000 |
544-912 |
1356 |
|
|
125 |
M2HIT |
CD
Measurement |
HITACHI |
S-6000 |
545-5521 |
1355 |
|
|
126 |
M1BBX |
Wafer
Inspection |
IRVINE
OPTICAL |
I-150 |
8192 |
1302 |
|
|
127 |
M2BBX |
Wafer
Inspection |
IRVINE
OPTICAL |
I-150 |
8189 |
1303 |
|
|
128 |
M5BBX |
Wafer
Inspection |
IRVINE
OPTICAL |
I-150 |
8831 |
1126 |
|
|
129 |
M4BBX |
Black
box inspection |
IRVINE
OPTICAL |
1-150 |
8193 |
1300 |
|
|
130 |
M6BBX |
Wafer
Inspection |
IRVINE
OPTICAL |
1-150 |
8191 |
1089 |
|
|
131 |
M7BBX |
Wafer
Inspection |
IRVINE
OPTICAL |
I-150 |
8188 |
1299 |
|
|
132 |
M1MET |
Nitride
and R/I measurement tool |
METIRCON |
PC2000 |
2026 |
1447 |
|
|
133 |
M1ADE |
Wafer
Thickness Measurement |
MICRO
SENSE |
TM8501 |
8749 |
1431 |
|
|
134 |
M6AFT |
Film
Thickness measurment |
NANOMETRICS |
210 |
7775 |
1902 |
|
|
135 |
M8AFT |
Thickness
Measurement |
NANOMETRICS |
210XP |
7612 |
1249 |
|
|
136 |
M7AFT |
THICKNESS
MEASUREMENT |
NANOMETRICS |
NANOSPEC
AFT |
7776 |
1914 |
|
|
137 |
P1DEV |
BATCHDEV |
NOAH
PRECISION |
4000 |
|
0644 |
|
|
138 |
M303 |
Thickness
Measurement |
PROMETRIX |
FT-500 |
9104F3 |
2034 |
|
|
139 |