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CD SEM, Hitachi S-8840

• Wafer size: 8 inches
• Image Resolution: X110 (optical microscope)
• X1,000 - 150,000 (sem image)
• Meas. Mode: automatic edge detection, definable algorithms
• Meas. Range: 0.1 - 10 micrometer
• Reproducibility: +-1% or 5 nanometer (3 sigma) whichever is greater
• Objective lens: highly excited low abberation type
• Movement: 200 mm X 200 mm
• Speed: 50 nm/sec
• Auto Loader: 2 cassette random access
• Automatic wafer alignment using optical microscope
• Throughput: 20 wafers/hr (5 pt meas. Continuous operation)
• Vacuum System: Fully automatic dry vac system with 3 ion pumps, 2 turbo pumps and 2 rotary pumps

Conversion to 6 inch wafers . . . . . Option

Reference: Stxi813-S8840

Please call or   click here  to inquire for prices. Please include reference.

Note: Subject to availability at time and date of inquiry.

Refurbished Semiconductor Equipment, SEM, Scanning Electron Microscopes, KLA Measurement Systems, Etc.

• Hitachi S-2700 Lab 6 SEM
• Hitachi S-806C FE-SEM with EDS system (Oxford X-Ray) and infrared chamberscope, very good condition, 8 inch wafer capable
• Hitachi S-6000 CD-SEM, with new proprietory PC and software
• Hitachi S-8640 CD-SEM for R-W head and mask reticle inspection, High throughput
• Hitachi S-8820 CD-SEM
• Hitachi S-4500 FE-SEM
• Hitachi S-6280 CD-SEM
• Hitachi S-570 SEM with LAB6 source
• SEMTRONIX 791 RIE with 6 process gases, can be used for delayering 12 inch wafers or any wafer size & package
• KLA 5000 CD-SEM measurement system
• KLA 5107 Overlay inspection system
• KLA 5100 Overlay inspection system
• KLA 2131E Defect inspection system
• MICRION 9800 Focused Ion Beam FOR 8 inch wafer, good for cross section in micro area
• Perkin-Elmer 660 Auger Electron Microscopy, like new
• ALESSI 2100 probe station
• LEITZ Ergoplan 200 Laser microscope, auto focus
• JEOL JSM-ICA848A SEM wafer inspection system
• JEOL FIB 500 Focused Ion Beam Milling System
• JEOL 100CX TEM
• JEOL 840 Field Emission SEM
• JEOL 5600 SEM
• JEOL 1010 TEM
• JEOL 6340 Field Emission SEM + Noran Voyager X-Ray
• JEOL 4000 EX TEM 400 kv
• JEOL 200 CX TEM 200 kv
• JEOL 1200 EX TEM 120 kv
• JEOL FX-90Q NMR + Tecmag
• JEOL T330 SEM
• FEI 300 Focus Ion Beam
• PHI 600 Scanning Auger with PC upgrade
• PHI 670 Hres Scanning Auger system
• PHI 5200 XPS System Based on PHI 10-360 SCA
• PHI 660 Scanning AES system with PC Upgrade
• MRC Summit Inline Sputtering System
• 3500 SIMSII Dynamic SIMS, includes 06-600 Spherical SIMS Energy analyzer, 1-255AMU RF generator, 16mm Quadrupole, 32-055 SIMS controller, 32-600 Quadrupole control, 02 leak valve, 1120 amplifier discriminator, all cables and manuals
• VG 310 XPS, AES
• ISI 193 Mcrostep stepper, 193 nm with spare Cymer Laser
• Dynatex DX III Scriber, Windows Operating System
• LEEDS 10-180 & 11-020 controller. This unit has been used only once, and has been stored under vacuum
• Semitool 860D Spin-Rinse-Dryer
• Semitool 870D Spin-Rinse-Dryer
• EDAX EX-4 EDS system for conventional SEM

Reference: Stxi7133a

If interested in any item above, please click here. Please include reference.

Note: All products are subject to availability at time and date of inquiry.

Reference: Stxi7133b

Surfscan SP1-TBI Wafer Analysis System, Vintage 08-2001, Unused, & includes the following:

• Normal illumination 0.079 um defect sensitivity
• 0.005 ppm haze sensitivity
• Argon ion laser 488 nm
• RTDC
• Measurement chamber with ULPA filter and blower
• Operator interface integrated into the measurement module
• Microsoft Windows NT4.0 operating system
• Security logging & native networking as provided by Windows NT
• Interactive pointing device and keypad controls
• TFT flat panel display
• Parallel printer port
• Defect map and histogram with zoom
• Microview measurement capability
• Iomega 1 GB removable Jaz drive
• Operations manual, clean room
• Book on board softcopy of SP1 operations manual

Features
• SP1-TBI normal and oblique illumination 0.060um defect sensitivity using oblique illumination normal narrow, oblique wide

• 300/200 mm puck handling system

• Six 200 mm extended handling modules
• Dual end effector robotic handler with wafer position feedback sensors
• Two fixed cassette and four rotating cassette stations
• Clear side panels for wafer environmental protection
• Cassette size recognition

• Four 300mm wide handling module
• Dual end effector robotic handler with wafer position feedback sensors
• Random access send and receive units
• Two fixed cassette and two rotating cassette stations with kinematic coupling for 300 mm and H-Bar for 200 mm
• Clear side panels for wafer environmental protection
• Cassette size recognition

Options
• ULPA filter and blower for wide module (3) 300mm (4) 200mm or (6) 200mm bright field collection channel based on the Normarski DIC technique
• X-Y option

Cal Curves and Absolute Contamination 300mm
• ABS contamination, ACS12-0.155C Duke TR
• ABS contamination, ACS12-0.204DC Duke TR

Bausch & Lomb:
• StereoZoom 5 with mounting and platform assembly, Zoom Range: 0.8X-4.0X, 1 Ea . . . $1,250.00

• StereoZoom 4, Zoom Range: 0.7X-3.0X, 2 Ea . . . $1,150.00/Ea

Leitz:
• Ergolux
  • Type: 020-448.026572002/043174
    110/120-130/220-230/240-250 VAC
    50-60 HZ Pmzx - 30W
    Lenses: NPL 5X/0.09, NPL 10X/0.20 DF,
    NPL 20X/0.35 DF, and NPL 100X/0.90
    Eyepieces: Periplan 10X/18

• Ortholux
  • Mask inspection microscope
    with four lenses, two 10X eyepieces, and one
    12.5X eyepiece.

• Leitz/Tiyoda
  • Mask inspection microscope
    with four lenses, two 10X eyepieces, and one
    12.5X eyepiece.

Semprex, Model 82S-T - Mask inspection with two lenses, Olympus IC-5 and IC-10, two lamp assemblies.

Vickers Photoplan, 2 Ea (One for parts)

American Optical, Stereo Star, 0.7X-3.0X with mounting and base assembly.

Olympus, Stereo Zoom, with mounting assembly, no base.

Kyowa, Stereo Zoom, G20X eyepieces, no mounting and base.

Wild, Stereo Zoom, with mounting assembly and no base.

• 3M Satin Finishing Material
• Stainless steel material for 3/32” shank and related parts
  • Specifications:
    • 7/8 X 3/8 X 3/32
    • 7/8 X ¼ X 3/32

If you don't find the product you came for, we set up another communications vehicle so you can place the product you want to buy or want to sell thru our "Classified Ads Section".  We believe this worldwide advertising for FREE or Extended can help our valued visitors get what they want. Please click on the following link.

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OLM Enterprises
Semiconductor Equipment Resource Center

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Copyright ©1999 OLM Enterprises

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