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AME Parts, R&D Semiconductor Equipment

Engineering, Design, & Manufacturing Services

Measurement and Turbo Balancing System, Semiconductor Equipment and Related Major Components

Fluid Dispensing & Metering Pumps

Ion Implanter Parts, R&D Semiconductor Equipment

Mass Flow Controller List #1

Mass Flow Controller List #2

Mass Flow Controller List #3

MFC’s, Turbo Balancing System, Semi Equipment, Etc.

Mass Flow Controller Related Products

Microscopes, R&D Semiconductor Equipment

New Parts List, R & D Semiconductor Equipment

Photos of Some Equipment and Parts

Semiconductor Equipment with Related Major Components

Test Systems & Semiconductor Equipment

R & D Semiconductor Equipment, Tegal Parts

Vacuum Pumps

Varian Parts List, Semiconductor Equipment

Equipment for Sale Hot List

Equipment Wanted, List #1

Equipment Wanted, List #2

Equipment Wanted, List #3

Used Semiconductor Equipment, Vacuum Systems, Pumps, Etc: fl01

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02a

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02b

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02c

Vacuum Pumps: Turbo, Dry, Cryo, Etc: fl03

Semiconductor Back End Equipment, Etc: fl04

Helium Leak Detectors, Rebuilt: fl05

Wafer Fab or Semiconductor Equipment: fl06

Plasma Systems, Vacuum Pumps, Etc: fl07A

Vacuum Systems Systems, Vacuum Pumps, Power Supplies, Etc: fl07B

Vacuum Packaging Systems: fl08

Used or Pre-owned Semiconductor Equipment: fl09

Semiconductor Equipment: fl10

Semiconductor Equipment: fl11

Semiconductor Equipment: fl12

Semiconductor Equipment: fl13

Semiconductor Equipment: fl14

Semiconductor Equipment: fl15

Semiconductor Equipment: fl16

8 Inch Semiconductor Equipment: fl17

Helium Leak Detectors & Vacuum Pumps: fl18

Vacuum Pumps: Oil, Turbo, Dry, Cryo, & More: fl18a

Helium Leak Detectors, RF Generators, Vacuum Pumps, Etc: fl19

Parts for Novellus, Concept One & Two, Wafer Fab Equipment, fl20

Leybold Helium Leak Detectors, Converters, Turbo Pumps, Etc.fl21

Various Helium Leak Detectors, Converters and Vacuum Pumps, Etc.fl22

6 Inch Wafer Fab Equipment, Back End Semiconductor Equipment, Etc, fl23

Back End Semiconductor Equipment, 6 Inch Wafer Fab Equipment, Etc, fl24

Used or Surplus Semiconductor & Back End Equipment Etc, fl25

Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26

Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26a

Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26b

Six Inch (6 Inch) Semiconductor or Wafer Fab Equipment Package, Etc. fl27

Semiconductor Equipment: Ion Implanters, Furnaces, Resistivity Meter, Etc. fl28

Semiconductor Equipment: Kokusai & TEL Furnaces, Ion Implanters, 4 Point Probe, Etc. fl29

Semiconductor Equipment: Sputterers, Etchers, Steppers, Kokusai & TEL Furnaces, Ion Implanters, Etc. fl30

Surplus Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. fl31

Surplus Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. fl32

KLA Equipment, Back End & 6 Inch Semiconductor Equipment, Dicing Saws, fl33

Scanning Electron Microscopes, SEMS, Measurement Systems, Accessories, & Semiconductor Equipment, fl34

Semiconductor Equipment Parts, fl35

Rebuilt or Refurbished Semiconductor Equipment, fl36

Vacuum Systems, Wafer Fab Line, Etc, fl37

Semiconductor Equipment, Vacuum Plasma Systems, Vacuum Pumps, Power Supplies, Parts, Etc, fl38

Business Opportunities Online & Internet Resources

Internet Cash MachinesInternet Cash Machines

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Lam Systems Parts for Semiconductor Etching Equipment, High Vacuum Systems, Excess Inventory, Etc.

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Semiconductor Equipment: Lam Systems Parts List

Item Part No. Description Qty
1 688-090733-001 Filter, RF Lowpass 1
2 713-000032-001 Bushing, Large Polyemide 9
3 713-011579-001 Housing Plunger 6
4 713-011980-001 Housing Plunger 6
5 713-013486-001 Pan, Drip Nozzle 1
6 713-013488-001 Block, Nozzle Mtg. L/H 1
7 713-013489-001 Block, Nozzle Mtg. R/H 1
8 713-021725-001 Bumer, Chemraz 5
9 714-002421-001 Shim for Reactor Chamber 14
10 714-008777-001 Baffle Scrn, Upper 2
11 714-013487-001 Bracket, Mtg. 2
12 714-220541-001 Box Flowmeter AMP Hot & Cold 1
13 715-001408-001 Electrode, Hard Anodized 1
14 715-002542-001 Rack, Guide Gate, LKG 4
15 715-006856-001 Mt Ball Screw 6
16 715-008067-001 Gate, Hard Anodized 2
17 715-009306-006 Focus Ring 1
18 715-011035-001 Plate, Lower End, Reaction Chmbr 1
19 715-011229-001 Plate, Seal, Exit Load Lock 1
20 715-011492-008 Holder,Wafer, 8" Stripper 1
21 715-011532-006 Plate, Upper Seal, 6" Elect 1
22 715-011665-006 Lower Elec Cap, 6" w/ Vent Grooved 1
23 715-011673-105 Cap, Lower Elect 5" Domed 1
24 715-011746-156B Plate, W/C, 5", 0.020" Dome RDCD 4
25 715-011901-005 Lwr Baffle, Domed, 5" Electrode 1
26 715-011985-006 Cap, Lower Electrode, (Domed .025") 10
27 715-012101-004 Holder, Wafer, 4", Arm, Exit 1
28 715-012101-006 Holder, Wafer, 6", Arm, Exit 2
29 715-012101-008 Holder, Wfr Arm, Exit 1
30 715-012165-008 Holder, Wfr 8" Tght Pocket 1
31 715-012233-002 Gate (Hard Anodized) Inner Gat 1
32 715-013477-001 Plate, MTG 1
33 715-021494-001 Hinge, Process Chamber 2
34 715-028626-001 Plate, Upper Baffle, 6" 1
35 715-028699-013 Shower Head 1
36 715-032423-008 Cover, Bowl, Rinse 1
37 716-006446-001 Diffuser Cathode 1
38 716-011563-151 Domed, W/C 1.5mm Cover w/ Pins 1
39 716-011563-152 5" Domed, W/C (1.5mm Cover w/ Pins) 1
40 716-011572-001 Clamp, Retainer, 1/4 Turn 3
41 716-028668-251 Plate, TP Wfr Clamp DMD Shadow 1
42 716-028668-281 Plate, Lower Wfr Clamp, 8" Shad 1
43 718-092326-081 1
44 718-092326-082 Assy, ESC DG#LA8PPF 1
45 720-000930-008 SCR, SCH Cap, 6-32 4
46 720-000940-005 SCR, SCH Cap, 8-32 2AX5 2
47 720-000940-005 SCR, SCH Cap, 8-32 4
48 721-000936-001 Wshr, FLT, #6 2
49 721-000936-002 Wshr, LK, #6 2
50 721-000946-001 Wshr, FLT, #8 4
51 721-000946-002 Wshr, LK, #8 4
52 754-091624-001 Spring, Compression 6
53 765-008372-001 Encoder Shaft 2
54 766-009593-002 Reg, Press, Teflon 1
55 766-090814-001 Actuator Assy, N.C. 1
56 766-090815-001 Actuator Assy, N.O. 32
57 766-091250-006 Valve, Nupro, 1/4" Swagelock 2
58 768-006970-001 Switch, Vac 724 Torr 2
59 768-091910-001 Switch, Vac 5 Torr Gauge 2
60 770-007494-001 Cyl Arm Dr 3/4 Bore ISTR 1
61 770-009005-001 Cyl, 1-5/8 Bore X 2-3/4 STR 1
62 771-090453-001 Convectron Tube, 1/4" VCR 1
63 771-092520-002 Flwmtr, DI, Tntlm FLT, U82M1/M 2
64 796-007432-101 Generator, Vacuum 2
65 796-009933-001 Conn, Male, 7/16-20 VCR 1
66 796-090059-001 Ftg, Conn, Male, ULTR, .25TB 1
67 796-092914-001 Ftg, 1/4" Nom Ultra Torr 52
68 810-002896-001 Assy, PCB, Conv Tube Interface 1
69 839-014432-101 Weldmt, Tee Filter 5
70 839-021878-001 Base, Elect, Air Cooled ISO 1
71 839-024377-100 Weldmt, Downstream Sup - UQT 1
72 853-004197-001 Assy, Delay Valve 1
73 853-011141-003 Assy, Brake, RF Gap 1
74 853-012095-006 Assy, Exit Arm 6" WT 1
75 853-017631-001 Assy, Vac Sw 714.5 Torr 1
76 853-017643-001 Assy, Manometer 3
77 853-021635-003 Assy, Manometer LL Stripper 1
78 853-031685-002 Assy, Upper Match 1
79 856-010345-006 Kit, Ret Wafer Kit, 6" ISO 1
80 856-025067-161 Kit, Retrofit, Esc 8", 4720 1
81 920-090916-003 Conn, Blkhead 2
82 921-009590-003 Adaptor, 1/4T x 1/8NPT 2
83 955-009576-003 Teflon Tube, 0.250 O.D. x 0.187 I.D. 1


Surplus Semiconductor Equipment Parts Inventory

Item Make Model Description Comments Qty
1 Leybold NT 1000/1500 Frequency Converter (Turbo Pump Controller) Looks/works great with TMP 1501C 1
2 Leybold TMP 1501C Turbo Pump Ceramic Bearings, ISO-K 250 Inlet 1
3 Leybold Trivac D8A Rotary Vane Pump, 2-stage, 7.0 cfm, 1 HP, HE-175 oil Clean and Operational 1
4 ASM AFC-260 Mass Flow Controller, 1 slm, SiH4 1/4 inch VCR fittings 1
5 ASM AFC-260 Mass Flow Controller, 2 slm, H2 1/4 inch VCR fittings 1
6 ASM AFC-260 Mass Flow Controller, 5 slm, Argon 1/4 inch VCR fittings 1
7 ASM AFC-260 Mass Flow Controller, 500 sccm, O2 1/4 inch VCR fittings 1
8 ASM AFC-261 Mass Flow Controller, 10 slm, NH3 1/4 inch VCR fittings 1
9 MKS 0258C Mass Flow Controller, 20 sccm, He @ 6 Torr 1/4 inch VCR fittings 1
10 MKS 1461C-00200RM Mass Flow Controller, 200 sccm, N2 1/4 inch VCR fittings, Card-edge connector, corrosive resistant 1
11 MKS 1461C-00200RM-SPCAL Mass Flow Controller, 200 sccm, CL2 1/4 inch VCR fittings, Card-edge connector, corrosive resistant 1
12 STEC-HORIBA SEC-7440MC Mass Flow Controller, 50 sccm, N2 1/4 inch VCR fittings, DB-9/DIPs 6
13 Tylan FC-260F Mass Flow Controller 1/4 inch VCR fittings, DB-9/DIPs 1
14 MATHESON IL-350 Regulator, Large Tank, Gauges, P/N 63--3112, 63-3113 Used/Good 1
15 MATHESON MREG-1170-XX Regulator, Large Tank, Gauges, P/N 63--3109, 63-3133 Mint/New 1
16 Smith Equipment H1710A-540 Regulator, for Oxygen Gas   1
17 Scott Specialty Gases S117C350 Regulator   1
18 Edwards 655AB Pressure Transducer, Capacitance Manometer, 0.1 Torr   1
19 MKS 127A-11014 Baratron Pressure Transducer, Capacitance Manometer, 0.1 Torr   1
20 FLUKE 6011A Synthesized Signal Generator, 10 HZ-11MHZ, 0.4 mv-5V, 50W, IEEE-488 int.   1
21 FLUKE 8050A 4.5 Digit Read Out DMM, AC/DC V & I, R & DB Functions   1
22 HP 200CD Wide Range Oscillator, 5 HZ - 600 KHZ   1
23 HP 5334A Frequency Counter, Digital Panel, IEEE-488 Interface   1
24 Sorenson DCS8-125 DC Power Supply 0.8V, 0-125A, Input 230VAC Rugged/Durable 3
25 AEA CP1 Computer Patch Interface Clean, in good condition. Not tested. 1
26 Comet CV05C-500N/S Variable Vacuum Capacitor, 5-500 pF @ 5kV, water cooling, mtg hdwe & teflon HV insulation attached.   1
27 Jennings UCSL-1500-5D2911 10-1500 pF @ 5kV, water cooling, mtg hdwe & teflon HV insulation attached.   1

Reference: JDE7313pdidrjde

If interested in one or more items, please   click here. Please include "Reference".

Note: All products are subject to availability at time and date of inquiry.


Excess Semiconductor Equipment Parts Inventory

Item Description Qty
1 Advanced Energy PE 1000 RF Generator 24
2 Aera MFC FC-980 10 SCCM WF6 2
3 Aera MFC FC-980 500 SCCM Argon 1
4 MKS Throttle Valve #653B-13064 41

If interested in one or more items,   please click here.


Unused or New Mass Flow Controllers

Item Description Model Qty Comments
1 Aera MFC, 10 SLM, N2 TC FC-D981SBC 1  
2 Aera MFC, 1 SLM, N2 TC FC-D980C 1 Range: Multi, Gas: Multi
3 Aera MFC, 100 SCCM, N2 TC FC-D980C 1 Range: Multi, Gas: Multi
4 Brooks, 1000 Sccm, SiH4 5850E 3  

If interested in one or more items,   please click here.


R&D Semiconductor Equipment For Sale

Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.

Item Equipment Model Notes Voltage/Current Dimensions
1 SK Vapor Dryer 51028 IPA Dryer 240V/70A 45W X 24D X 100H
2 AEP Stripper UC-7550 Flat Panel Stripper 208V/200A 74W X 50D 94H
3 O3 Detector IN 2000-3 Ozone Monitor 120V/1.5A N/A
4 Steag Wet Etch FPD-400 Wet Etch with Robot 208V/60A 71W X 51L X 65H
5 AKT RIE 1600-ETCH 2 Etch Chambers 208V/240A Cluster Tool
6 AKT PVD 1600-PVD 2 Sputter Chambers 208V/320A Cluster Tool
7 Steag Coater FPD 400 Resist Coater/Developer 208V/175A 115W X 82D X 73H
8 Tamarack T-300 Photo Lithography Tool 208V/15A 67W X 59D X 103H


Rotary Polishing Wheel

Please click on the image below for enlarged photo

Mounted Felt Polishing Wheel

  • 3M Satin Finishing Material
  • Stainless steel material for 3/32” shank and related parts
    • Specifications:
      • 7/8 X 3/8 X 3/32
      • 7/8 X X 3/32

Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.

If interested please click here.


If interested in one or more items, please click here.

If you need Mass Flow Controllers, please click here.

If you need Vacuum Pumps, please click here.


Please contact us at:

OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293

E-mail: info@semiconweb.net


AME Parts, R&D Semiconductor Equipment | Engineering, Design, and Manufacturing Services | Measurement and Turbo Balancing System, Semiconductor Equipment and Related Major Components | Fluid Dispensing & Metering Pumps | Ion Implanter Parts, R & D Semiconductor Equipment | Mass Flow Controller List #1 | Mass Flow Controller List #2 | Mass Flow Controller List #3 | MFC’s, Turbo Balancing System, Semi Equipment, Etc. | Mass Flow Controller Related Products | Microscopes, R&D Semiconductor Equipment | New Parts List, R & D Semiconductor Equipment | Photos of Some Equipment and Parts | Semiconductor Equipment with Related Major Components | Test Systems & Semiconductor Equipment | R & D Semiconductor Equipment, Tegal Parts | Vacuum Pumps | Varian Parts List, Semiconductor Equipment | Equipment For Sale Hot List | Equipment Wanted, List #1 | Equipment Wanted, List #2 | Equipment Wanted, List #3 | Used Semiconductor Equipment, Vacuum Systems, Pumps, Etc: fl01 | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02 | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02a | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02b | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02c | Vacuum Pumps: Turbo, Dry, Cryo, Etc.: fl03 | Semiconductor Back End Equipment, Etc.: fl04 | Helium Leak Detectors, Rebuilt: fl05 | Wafer Fab or Semiconductor Equipment: fl06 | Plasma Systems, Vacuum Pumps, Etc: fl07A | Vacuum Systems, Vacuum Pumps, Etc: fl07B | Vacuum Packaging Systems, Pumps, Power Supplies, Etc: fl08 | Used or Pre-Owned Semiconductor Equipment: fl09 | Semiconductor Equipment: fl10 | Semiconductor Equipment: fl11 | Semiconductor Equipment: fl12 | Semiconductor Equipment: fl13 | Semiconductor Equipment: fl14 | Semiconductor Equipment: fl15 | Semiconductor Equipment: fl16 | Eight Inch (8 Inch) Semiconductor Equipment: fl17 | Helium Leak Detector & Vacuum Pumps: fl18 | Vacuum Pumps: Oil, Turbo, Dry, Cryo, & More - fl18a | Helium Leak Detectors, RF Generators, Vacuum Pumps, Etc: fl19 | Novellus Parts, Concept One & Two, Wafer Fab Equipment, fl20 | Leybold Helium Leak Detectors, Converters, Turbo Pumps, Etc: fl21 | Various Helium Leak Detectors, Vacuum Pumps, Etc: fl22 | 6 Inch Wafer Fab Equipment, Back End Semiconductor Equipment, Etc: fl23 | Back End Semiconductor Equipment, 6 Inch Wafer Fab Equipment, Back End Equipment, Etc: fl24 | Used or Surplus Semiconductor & Back End Equipment, Etc: fl25 | Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26 | 4 Inch Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26a | 4 Inch Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26b | Six Inch (6 Inch) Semiconductor or Wafer Fab Equipment Package, Etc. fl27 | Semiconductor Equipment: Ion Implanters, Furnaces, Resistivity Meter, Etc. fl28 | Semiconductor Equipment: Kokusai & TEL Furnaces, Ion Implanters, 4 Point Probe, Etc. fl29 | Semiconductor Equipment: Sputterers, Etchers, Steppers, Kokusai & TEL Furnaces, Ion Implanters, Etc. fl30 | Surplus Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. fl31 | Surplus Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. fl32 | KLA Equipment, Back End & 6 Inch Semiconductor Equipment, Dicing Saws, fl33 | Scanning Electron Microscopes, SEMS, Measurement Systems, & Semiconductor Equipment, fl34 | Semiconductor Equipment Parts, fl35 | Rebuilt or Refurbished Semiconductor Equipment, fl36 | Vacuum Systems, Wafer Fab Line, Etc, fl37 | Semiconductor Equipment, Vacuum Plasma Systems, Power Supplies, Vacuum Pumps, Parts, Etc, fl38 | Business Opportunities Online & Internet Resources | Advertise Worldwide Online


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OLM Enterprises
Semiconductor Equipment Resource Center


Copyright 1999 OLM Enterprises