Lam Systems Parts for Semiconductor Etching Equipment, High Vacuum Systems, Excess Inventory, Etc.
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Semiconductor Equipment: Lam Systems Parts List
| Item
| Part No.
| Description
| Qty
|
| 1
| 688-090733-001
| Filter, RF Lowpass
| 1
|
| 2
| 713-000032-001
| Bushing, Large Polyemide
| 9
|
| 3
| 713-011579-001
| Housing Plunger
| 6
|
| 4
| 713-011980-001
| Housing Plunger
| 6
|
| 5
| 713-013486-001
| Pan, Drip Nozzle
| 1
|
| 6
| 713-013488-001
| Block, Nozzle Mtg. L/H
| 1
|
| 7
| 713-013489-001
| Block, Nozzle Mtg. R/H
| 1
|
| 8
| 713-021725-001
| Bumer, Chemraz
| 5
|
| 9
| 714-002421-001
| Shim for Reactor Chamber
| 14
|
| 10
| 714-008777-001
| Baffle Scrn, Upper
| 2
|
| 11
| 714-013487-001
| Bracket, Mtg.
| 2
|
| 12
| 714-220541-001
| Box Flowmeter AMP Hot & Cold
| 1
|
| 13
| 715-001408-001
| Electrode, Hard Anodized
| 1
|
| 14
| 715-002542-001
| Rack, Guide Gate, LKG
| 4
|
| 15
| 715-006856-001
| Mt Ball Screw
| 6
|
| 16
| 715-008067-001
| Gate, Hard Anodized
| 2
|
| 17
| 715-009306-006
| Focus Ring
| 1
|
| 18
| 715-011035-001
| Plate, Lower End, Reaction Chmbr
| 1
|
| 19
| 715-011229-001
| Plate, Seal, Exit Load Lock
| 1
|
| 20
| 715-011492-008
| Holder,Wafer, 8" Stripper
| 1
|
| 21
| 715-011532-006
| Plate, Upper Seal, 6" Elect
| 1
|
| 22
| 715-011665-006
| Lower Elec Cap, 6" w/ Vent Grooved
| 1
|
| 23
| 715-011673-105
| Cap, Lower Elect 5" Domed
| 1
|
| 24
| 715-011746-156B
| Plate, W/C, 5", 0.020" Dome RDCD
| 4
|
| 25
| 715-011901-005
| Lwr Baffle, Domed, 5" Electrode
| 1
|
| 26
| 715-011985-006
| Cap, Lower Electrode, (Domed .025")
| 10
|
| 27
| 715-012101-004
| Holder, Wafer, 4", Arm, Exit
| 1
|
| 28
| 715-012101-006
| Holder, Wafer, 6", Arm, Exit
| 2
|
| 29
| 715-012101-008
| Holder, Wfr Arm, Exit
| 1
|
| 30
| 715-012165-008
| Holder, Wfr 8" Tght Pocket
| 1
|
| 31
| 715-012233-002
| Gate (Hard Anodized) Inner Gat
| 1
|
| 32
| 715-013477-001
| Plate, MTG
| 1
|
| 33
| 715-021494-001
| Hinge, Process Chamber
| 2
|
| 34
| 715-028626-001
| Plate, Upper Baffle, 6"
| 1
|
| 35
| 715-028699-013
| Shower Head
| 1
|
| 36
| 715-032423-008
| Cover, Bowl, Rinse
| 1
|
| 37
| 716-006446-001
| Diffuser Cathode
| 1
|
| 38
| 716-011563-151
| Domed, W/C 1.5mm Cover w/ Pins
| 1
|
| 39
| 716-011563-152
| 5" Domed, W/C (1.5mm Cover w/ Pins)
| 1
|
| 40
| 716-011572-001
| Clamp, Retainer, 1/4 Turn
| 3
|
| 41
| 716-028668-251
| Plate, TP Wfr Clamp DMD Shadow
| 1
|
| 42
| 716-028668-281
| Plate, Lower Wfr Clamp, 8" Shad
| 1
|
| 43
| 718-092326-081
|
| 1
|
| 44
| 718-092326-082
| Assy, ESC DG#LA8PPF
| 1
|
| 45
| 720-000930-008
| SCR, SCH Cap, 6-32
| 4
|
| 46
| 720-000940-005
| SCR, SCH Cap, 8-32 2AX5
| 2
|
| 47
| 720-000940-005
| SCR, SCH Cap, 8-32
| 4
|
| 48
| 721-000936-001
| Wshr, FLT, #6
| 2
|
| 49
| 721-000936-002
| Wshr, LK, #6
| 2
|
| 50
| 721-000946-001
| Wshr, FLT, #8
| 4
|
| 51
| 721-000946-002
| Wshr, LK, #8
| 4
|
| 52
| 754-091624-001
| Spring, Compression
| 6
|
| 53
| 765-008372-001
| Encoder Shaft
| 2
|
| 54
| 766-009593-002
| Reg, Press, Teflon
| 1
|
| 55
| 766-090814-001
| Actuator Assy, N.C.
| 1
|
| 56
| 766-090815-001
| Actuator Assy, N.O.
| 32
|
| 57
| 766-091250-006
| Valve, Nupro, 1/4" Swagelock
| 2
|
| 58
| 768-006970-001
| Switch, Vac 724 Torr
| 2
|
| 59
| 768-091910-001
| Switch, Vac 5 Torr Gauge
| 2
|
| 60
| 770-007494-001
| Cyl Arm Dr 3/4 Bore ISTR
| 1
|
| 61
| 770-009005-001
| Cyl, 1-5/8 Bore X 2-3/4 STR
| 1
|
| 62
| 771-090453-001
| Convectron Tube, 1/4" VCR
| 1
|
| 63
| 771-092520-002
| Flwmtr, DI, Tntlm FLT, U82M1/M
| 2
|
| 64
| 796-007432-101
| Generator, Vacuum
| 2
|
| 65
| 796-009933-001
| Conn, Male, 7/16-20 VCR
| 1
|
| 66
| 796-090059-001
| Ftg, Conn, Male, ULTR, .25TB
| 1
|
| 67
| 796-092914-001
| Ftg, 1/4" Nom Ultra Torr
| 52
|
| 68
| 810-002896-001
| Assy, PCB, Conv Tube Interface
| 1
|
| 69
| 839-014432-101
| Weldmt, Tee Filter
| 5
|
| 70
| 839-021878-001
| Base, Elect, Air Cooled ISO
| 1
|
| 71
| 839-024377-100
| Weldmt, Downstream Sup - UQT
| 1
|
| 72
| 853-004197-001
| Assy, Delay Valve
| 1
|
| 73
| 853-011141-003
| Assy, Brake, RF Gap
| 1
|
| 74
| 853-012095-006
| Assy, Exit Arm 6" WT
| 1
|
| 75
| 853-017631-001
| Assy, Vac Sw 714.5 Torr
| 1
|
| 76
| 853-017643-001
| Assy, Manometer
| 3
|
| 77
| 853-021635-003
| Assy, Manometer LL Stripper
| 1
|
| 78
| 853-031685-002
| Assy, Upper Match
| 1
|
| 79
| 856-010345-006
| Kit, Ret Wafer Kit, 6" ISO
| 1
|
| 80
| 856-025067-161
| Kit, Retrofit, Esc 8", 4720
| 1
|
| 81
| 920-090916-003
| Conn, Blkhead
| 2
|
| 82
| 921-009590-003
| Adaptor, 1/4T x 1/8NPT
| 2
|
| 83
| 955-009576-003
| Teflon Tube, 0.250 O.D. x 0.187 I.D.
| 1
|
Surplus Semiconductor Equipment Parts Inventory
| Item
| Make
| Model
| Description
| Comments
| Qty
|
| 1
| Leybold
| NT 1000/1500
| Frequency Converter (Turbo Pump Controller)
| Looks/works great with TMP 1501C
| 1
|
| 2
| Leybold
| TMP 1501C
| Turbo Pump
| Ceramic Bearings, ISO-K 250 Inlet
| 1
|
| 3
| Leybold
| Trivac D8A
| Rotary Vane Pump, 2-stage, 7.0 cfm, 1 HP, HE-175 oil
| Clean and Operational
| 1
|
| 4
| ASM
| AFC-260
| Mass Flow Controller, 1 slm, SiH4
| 1/4 inch VCR fittings
| 1
|
| 5
| ASM
| AFC-260
| Mass Flow Controller, 2 slm, H2
| 1/4 inch VCR fittings
| 1
|
| 6
| ASM
| AFC-260
| Mass Flow Controller, 5 slm, Argon
| 1/4 inch VCR fittings
| 1
|
| 7
| ASM
| AFC-260
| Mass Flow Controller, 500 sccm, O2
| 1/4 inch VCR fittings
| 1
|
| 8
| ASM
| AFC-261
| Mass Flow Controller, 10 slm, NH3
| 1/4 inch VCR fittings
| 1
|
| 9
| MKS
| 0258C
| Mass Flow Controller, 20 sccm, He @ 6 Torr
| 1/4 inch VCR fittings
| 1
|
| 10
| MKS
| 1461C-00200RM
| Mass Flow Controller, 200 sccm, N2
| 1/4 inch VCR fittings, Card-edge connector, corrosive resistant
| 1
|
| 11
| MKS
| 1461C-00200RM-SPCAL
| Mass Flow Controller, 200 sccm, CL2
| 1/4 inch VCR fittings, Card-edge connector, corrosive resistant
| 1
|
| 12
| STEC-HORIBA
| SEC-7440MC
| Mass Flow Controller, 50 sccm, N2
| 1/4 inch VCR fittings, DB-9/DIPs
| 6
|
| 13
| Tylan
| FC-260F
| Mass Flow Controller
| 1/4 inch VCR fittings, DB-9/DIPs
| 1
|
| 14
| MATHESON
| IL-350
| Regulator, Large Tank, Gauges, P/N 63--3112, 63-3113
| Used/Good
| 1
|
| 15
| MATHESON
| MREG-1170-XX
| Regulator, Large Tank, Gauges, P/N 63--3109, 63-3133
| Mint/New
| 1
|
| 16
| Smith Equipment
| H1710A-540
| Regulator, for Oxygen Gas
| |
1
|
| 17
| Scott Specialty Gases
| S117C350
| Regulator
| |
1
|
| 18
| Edwards
| 655AB
| Pressure Transducer, Capacitance Manometer, 0.1 Torr
| |
1
|
| 19
| MKS
| 127A-11014
| Baratron Pressure Transducer, Capacitance Manometer, 0.1 Torr
| |
1
|
| 20
| FLUKE
| 6011A
| Synthesized Signal Generator, 10 HZ-11MHZ, 0.4 mv-5V, 50W, IEEE-488 int.
| |
1
|
| 21
| FLUKE
| 8050A
| 4.5 Digit Read Out DMM, AC/DC V & I, R & DB Functions
| |
1
|
| 22
| HP
| 200CD
| Wide Range Oscillator, 5 HZ - 600 KHZ
| |
1
|
| 23
| HP
| 5334A
| Frequency Counter, Digital Panel, IEEE-488 Interface
| |
1
|
| 24
| Sorenson
| DCS8-125
| DC Power Supply 0.8V, 0-125A, Input 230VAC
| Rugged/Durable
| 3
|
| 25
| AEA
| CP1
| Computer Patch Interface
| Clean, in good condition. Not tested.
| 1
|
| 26
| Comet
| CV05C-500N/S
| Variable Vacuum Capacitor, 5-500 pF @ 5kV, water cooling, mtg hdwe & teflon HV insulation attached.
| |
1
|
| 27
| Jennings
| UCSL-1500-5D2911
| 10-1500 pF @ 5kV, water cooling, mtg hdwe & teflon HV insulation attached.
| |
1
|
Reference: JDE7313pdidrjde
If interested in one or more items, please click here. Please include "Reference".
Note: All products are subject to availability at time and date of inquiry.
Excess Semiconductor Equipment Parts Inventory
| Item
| Description
| Qty
|
| 1
| Advanced Energy PE 1000 RF Generator
| 24
|
| 2
| Aera MFC FC-980 10 SCCM WF6
| 2
|
| 3
| Aera MFC FC-980 500 SCCM Argon
| 1
|
| 4
| MKS Throttle Valve #653B-13064
| 41
|
If interested in one or more items, please click here.
Unused or New Mass Flow Controllers
| Item
| Description
| Model
| Qty
| Comments
|
| 1
| Aera MFC, 10 SLM, N2
| TC FC-D981SBC
| 1
| |
| 2
| Aera MFC, 1 SLM, N2
| TC FC-D980C
| 1
| Range: Multi, Gas: Multi
|
| 3
| Aera MFC, 100 SCCM, N2
| TC FC-D980C
| 1
| Range: Multi, Gas: Multi
|
| 4
| Brooks, 1000 Sccm, SiH4
| 5850E
| 3
| |
If interested in one or more items, please click here.
R&D Semiconductor Equipment For Sale
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool
| 208V/15A
| 67W X 59D X 103H
|
Rotary Polishing Wheel
Please click on the image below for enlarged photo
Mounted Felt Polishing Wheel
- 3M Satin Finishing Material
- Stainless steel material for 3/32” shank and related parts
- Specifications:
- 7/8 X 3/8 X 3/32
- 7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
If interested please click here.
If interested in one or more items, please click here.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
Please contact us at:
OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
E-mail: info@semiconweb.net
AME Parts, R&D Semiconductor Equipment | Engineering, Design, and Manufacturing Services | Measurement and Turbo Balancing System, Semiconductor Equipment and Related Major Components | Fluid Dispensing & Metering Pumps | Ion Implanter Parts, R & D Semiconductor Equipment | Mass Flow Controller List #1 | Mass Flow Controller List #2 | Mass Flow Controller List #3 | MFC’s, Turbo Balancing System, Semi Equipment, Etc. | Mass Flow Controller Related Products | Microscopes, R&D Semiconductor Equipment | New Parts List, R & D Semiconductor Equipment | Photos of Some Equipment and Parts | Semiconductor Equipment with Related Major Components | Test Systems & Semiconductor Equipment | R & D Semiconductor Equipment, Tegal Parts | Vacuum Pumps | Varian Parts List, Semiconductor Equipment | Equipment For Sale Hot List | Equipment Wanted, List #1 | Equipment Wanted, List #2 | Equipment Wanted, List #3 | Used Semiconductor Equipment, Vacuum Systems, Pumps, Etc: fl01 | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02 | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02a | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02b | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02c | Vacuum Pumps: Turbo, Dry, Cryo, Etc.: fl03 | Semiconductor Back End Equipment, Etc.: fl04 | Helium Leak Detectors, Rebuilt: fl05 | Wafer Fab or Semiconductor Equipment: fl06 | Plasma Systems, Vacuum Pumps, Etc: fl07A | Vacuum Systems, Vacuum Pumps, Etc: fl07B | Vacuum Packaging Systems, Pumps, Power Supplies, Etc: fl08 | Used or Pre-Owned Semiconductor Equipment: fl09 | Semiconductor Equipment: fl10 | Semiconductor Equipment: fl11 | Semiconductor Equipment: fl12 | Semiconductor Equipment: fl13 | Semiconductor Equipment: fl14 | Semiconductor Equipment: fl15 | Semiconductor Equipment: fl16 | Eight Inch (8 Inch) Semiconductor Equipment: fl17 | Helium Leak Detector & Vacuum Pumps: fl18 | Vacuum Pumps: Oil, Turbo, Dry, Cryo, & More - fl18a | Helium Leak Detectors, RF Generators, Vacuum Pumps, Etc: fl19 | Novellus Parts, Concept One & Two, Wafer Fab Equipment, fl20 | Leybold Helium Leak Detectors, Converters, Turbo Pumps, Etc: fl21 | Various Helium Leak Detectors, Vacuum Pumps, Etc: fl22 | 6 Inch Wafer Fab Equipment, Back End Semiconductor Equipment, Etc: fl23 | Back End Semiconductor Equipment, 6 Inch Wafer Fab Equipment, Back End Equipment, Etc: fl24 | Used or Surplus Semiconductor & Back End Equipment, Etc: fl25 | Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26 | 4 Inch Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26a | 4 Inch Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26b | Six Inch (6 Inch) Semiconductor or Wafer Fab Equipment Package, Etc. fl27 | Semiconductor Equipment: Ion Implanters, Furnaces, Resistivity Meter, Etc. fl28 | Semiconductor Equipment: Kokusai & TEL Furnaces, Ion Implanters, 4 Point Probe, Etc. fl29 | Semiconductor Equipment: Sputterers, Etchers, Steppers, Kokusai & TEL Furnaces, Ion Implanters, Etc. fl30 | Surplus Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. fl31 | Surplus Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. fl32 | KLA Equipment, Back End & 6 Inch Semiconductor Equipment, Dicing Saws, fl33 | Scanning Electron Microscopes, SEMS, Measurement Systems, & Semiconductor Equipment, fl34 | Semiconductor Equipment Parts, fl35 | Rebuilt or Refurbished Semiconductor Equipment, fl36 | Vacuum Systems, Wafer Fab Line, Etc, fl37 | Semiconductor Equipment, Vacuum Plasma Systems, Power Supplies, Vacuum Pumps, Parts, Etc, fl38 | Business Opportunities Online & Internet Resources | Advertise Worldwide Online
If you don't find the product you came for, we set up another communications vehicle so you can place the product you want to buy or want to sell thru our "Classified Ads Section". We believe this worldwide advertising for FREE or Extended can help our valued visitors get what they want. Please click on the following link.
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OLM Enterprises
Semiconductor Equipment Resource Center
Copyright ©1999 OLM Enterprises
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