Ion Implanter Parts and Services, Vacuum Systems, Measurement System, and More Semiconductor Equipment
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Contents
Reference: ColeKeef324
Note 1: All of the above parts are believed to be in perfect condition.
Note 2: Miscellaneous cables and gauges thrown in at no additional cost with purchase of all items listed above.
Note 2: All products are subject to availability at time and date of inquiry.
If interested, please click here. Please include Reference.
Contents
List and Descriptions
Eaton NV 3206
- Medium Current
- Quantity: 2 Ea
- Serial Nos: 300 and 344
Varian 350D
- Quantity: 1 Ea
- Serial No. 00508570
- Comes with 2 end stations: 5 inch and 4 inch
- Software version 4.4.2.1
Eaton NV 10-80
- High Current
- Quantity: 1 Ea
- Serial No. 0350245
- All latest Eaton revisions included
- 5 Inch Clampless
- Flood Gun 4 Power Supply
- Turbo Pumped Source
Eaton NV 10-160, Rebuilt
- Quantity: 2 Ea
- Serial Nos: 11 and 52
- One with 6 inch manual load and the other with 6 inch clampless AT4
Submit offer per system or entire package!!!
If interested, please click here.
Contents
| Item
| Application
| Description
| Price
| Comments
|
| 1
| NV-10 Analyzer Magnet Power Supply, E.M.I.
| Complete Power Suppl, Tested & Calibrated
| $11,995.00
| Replaces the 3 Ea. H.P. originals
|
| 2
| NV-10 Analyzer Magnet Power Supply, E.M.I.
| Cable Kit, with instructions and plug/receptacle
| $300.00
| No comments
|
| 3
| NV-10 Analyzer Magnet Power Supply, E.M.I.
| New reduced height swing-out frame/rack
| Call for prices
| No comments
|
| 4
| Eaton High Current
| H.P. Analyzer Supplies, P/N 10065
| $2,000.00
| Repair/Exchange
|
| 5
| Eaton Medium Current
| Source baseplate with 2 removable feed-thrus
| $875.00
| Repair/Exchange
|
| 6
| Eaton Medium Current
| Removable feedthrus
| $150.00 Ea.
| No comments
|
| 7
| Eaton Medium Current
| Source can, source-to-can alighment, P/N 10064
| $512.00
| No comments
|
| 8
| Universal Cooling Water Resistivity Monitoring System
| Remote digital readout, sensor head with process flow adaptor, and power cable
| $1,120.00 + tax
| No comments
|
| 9
| Eaton NV-6200/3206 Source Vacuum Monitoring System
| Source H.C.I.G. Ion Gauge Controller w/ control cable, power cable, remote digital readout/panel mount, and gauge tube.
Source High Vac Valve with ion gauge port (exchange with old valve)
| $10,157.00
| No comments
|
| 10
| NV-10-160/180
| Accel. Aperture Assy., Graphite, P/N 10063
| $440.00
| No comments
|
If interested please click here.
Contents
Interface computer and data links
| Item #
| Description
| Axcellis Part No.
| Page
| Qty
|
| 1
| Assembly, Interface Computer
| 0342-0707-4001
| 13-5
| 1
|
| 2
| F1,2 digital I/O card
| 0342-0689-4001
| 13-09
| 1
|
| 3
| F5 analog input interface card
| 0342-0681-4001
| 13-11
| 1
|
| 4
| F7 A/D PCB mod
| 0342-0770-2001
| 13-13
| 1
|
| 5
| F9 programmable counter PCB
| 0342-0720-4001
| 13-15
| 1
|
| 6
| F10 programmable counter PCB
| 0342-0721-4001
| 13-17
| 1
|
| 7
| F14 MPU PCB
| 0342-0772-3001
| 13-15
| 1
|
| 8
| F16 Interface PCB
| 0342-0771-3001
| 13-21
| 1
|
| 9
| Assy, Terminal controller processor PCB
| 0342-0918-0001R
| 8-67
| 3
|
| 10
| Source terminal data link
| 0342-0906-0001
| 8-31
| 1
|
| 11
| Assembly, magnet terminal data link
| 0342-0907-0001
| 8-11
| 1
|
Contents
A rack and PCB's
| Item #
| Description
| Axcellis Part No.
| Page
| Qty
|
| 1
| Assembly, "A Rack", Complete
| Unkown
| Section 3
| 1
|
| 2
| A2 I/O relay driver PCB
| 0342-0160-4001
| 3-05
| 1
|
| 3
| A3 I/O switch interface PCB
| 0342-0158-4001
| 3-07
| 1
|
| 4
| A4 status display PCB
| 0342-0156-4001
| 3-09
| 1
|
| 5
| A5-8 printer interface PCB
| 0342-0668-4001
| 3-15
| 1
|
| 6
| A9 condition monitor PCB
| 0342-0050-4001
| 3-17
| 1
|
| 7
| A10 hvps control PCB
| 0342-0576-4001
| 3-19
| 1
|
| 8
| A12 system alarm PCB
| 0342-0175-4001
| 3-21
| 1
|
| 9
| A13 accelerator alarm PCB
| 0342-0161-4001
| 3-23
| 1
|
| 10
| A14 chamber vacuum control PCB
| 0342-0049-4001
| 3-25
| 1
|
| 11
| A15 process control PCB
| 0342-0977-4001
| 3-27
| 1
|
| 12
| A16 beam current amplifier PCB
| 5990-0097-4001
| 3-29
| 1
|
| 13
| A17 beam current display driver PCB
| 0342-0138-4001
| 3-31
| 1
|
| 14
| A18 beam current integrator PCB
| 0342-0408-4002
| 3-33
| 1
|
| 15
| A19 scan generator PCB
| 0342-0607-4001
| 3-35
| 1
|
| 16
| A20 system monitor interface PCB
| 0342-0679-3001
| 3-37
| 1
|
| 17
| A24 end station vac control interface PCB
| 0342-1077-4001
| 3-37
| 1
|
Contents
H rack and PCB's
| Item #
| Description
| Axcellis Part No.
| Page
| Qty
|
| 1
| H1 isolation buffer PCB
| 0342-1033-4001
| 10-13
| 1
|
| 2
| H3 input/output PCB
| 0342-0977-9001
| 10-17
| 1
|
| 3
| H4 power input/output PCB
| 0342-1000-9001
| 10-20
| 1
|
| 4
| H5, 7, 8, 10 stepper motor controller PCB
| 0342-0922-4001
| 10-25
| 5
|
| 5
| H6, 9 buffer PCB
| 0342-0987-4001
| 10-29
| 2
|
| 6
| High current motor driver PCB
| 0342-1027-0002
| 10-35
| 2
|
Contents
K rack and PCB's
| Item #
| Description
| Axcellis Part No.
| Page
| Qty
|
| 1
| K2 scan clock card
| 0342-1051-0001
| 4-25
| 1
|
| 2
| K3 vertical scan generator card
| 0342-1049-0001
| 4-30
| 1
|
| 3
| K4 horizontal scan generator card
| 0342-1050-0001
| 4-34
| 1
|
| 4
| K5 scan system card
| 0342-1052-0001
| 4-39
| 5
|
| 5
| K6 multi-function card
| 0342-1053-0001
| 4-43
| 1
|
| 6
| K7 front panel I/O card
| 0342-1054-0001
| 4-47
| 1
|
Terminal PCB's
| Item #
| Description
| Axcellis Part No.
| Page
| Qty
|
| 1
| Vapourizer source control PCB
| 0342-0552-4001
| 8-47
| 1
|
| 2
| Filament power supply PCB
| 0342-0601-4001
| 8-35
| 1
|
| 3
| Magnet power supply regulator PCB
| 0342-0254-3001
| 8-09
| 1
|
| 4
| Discharge power regulator DTC PCB
| 0342-1435-0001
| 8-39
| 1
|
| 5
| Source gas servo amplifier PCB
| 0342-0910-4002
| 8-43
| 1
|
Contents
| Item #
| Description
| Axcellis Part No.
| Page
| Qty
|
| 1
| PSU, filament
| 0342-0854-4001
| |
1
|
| 2
| PSU AMAG
| 0342-1429-0002C
| |
1
|
| 3
| PSU AMAG
| 0342-1429-0001
| |
1
|
Contents
8200 Spares
| Item #
| Description
| Axcellis Part No.
| Page
| Qty
|
| 1
| Scan Tilt DI (repaired)
| 1027-0102-0001
| |
1
|
| 2
| Amplifier, Servo, Brush
| 0261-0102-0001
| |
1
|
If interested in one or more, or all of the items above, please click here.
Contents
| Item #
| OEM P/N
| Description
| Quantity
|
| 1
| 02-0093-00
| One Arm Robot
| 4
|
| 2
| 15-00701-00
| Bottom Fork Plate, 150 MM
| 10
|
| 3
| 15-00703-00
| Top Fork Plate, 150 MM
| 10
|
| 4
| 16-033932-00
| Pinned Showerhead Weldment, 150 MM
| 16
|
| 5
| 16-033931-00
| Pinned Showerhead Weldment, 200 MM
| 16
|
| 6
| 02-029514-01
| Left Indexer Assembly
| 1
|
| 7
| 02-029514-02
| Right Indexer Assembly
| 1
|
If interested in one or more items, please click here.
Contents
Please click on the image below for enlarged photo
Mounted Felt Polishing Wheel
- 3M Satin Finishing Material
- Stainless steel material for 3/32" shank and related parts
- Specifications:
- 7/8 X 3/8 X 3/32
- 7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
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Contents
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool
| 208V/15A
| 67W X 59D X 103H
|
Contents
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Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
E-mail: info@semiconweb.net
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