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RF/DC Power Supplies & Matching Networks

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All equipment are subject to availability at time and date of inquiry

Plasma Systems

Applied Materials Mod. 3300 PECVD system, Silicon Nitride and Silicon Dioxide films, Wafer capacity: 42ea 3" wafers, 22ea 4" wafers 16ea 5" wafers, ENI Mod. PS-300 RF Power Supply, 2000W @ 8-111 KHz, 3 zone temperature control, Gas shower, Vacuum pumps and filtration system

Branson Mod. L2101 Plasma /Asher/Etcher, 1ea 12 x 20" quartz chamber, low particulate, 5ea mass flow gas inputs, computer controlled w/recipe storage of up to 350 process steps, temp controller, Mod. PM 332/ENI OEM 12 1000W solid state RF Generator, rebuilt

Branson Mod. L2200 Plasma Stripper, 2ea composite ceramic/aluminum chambers for 3-8" wafers, low particulate, cassette to cassette operation, computer controlled, robot loader/unloader, ENI 1000W solid state RF generator, rebuilt

Branson Mod. L3200 Plasma Stripper, 2ea quartz chambers for 3-6" wafers, low particulate, cassette to cassette operation, computer controlled, robot/indexer loader/unloader, ENI 1000W solid state RF generator, rebuilt

Branson/IPC Mod. 2000, 1ea 10"(dia) x 20"(D) quartz barrel, 3ea gas inputs, w/Mod. 906U 3 channel process programmer, w/Mod. 921C temperature controller, Mod. PM119 500W RF Generator

Branson/IPC Mod. 3000, 1ea 10"(dia) x 20"(D) quartz chamber, 1ea gas inputs, single channel, Mod. PM 119 RF Generator, 500W @ 13.56MHz

Branson/IPC Mod. 3000, 1ea 8"(dia) x 13"(D) quartz chamber, 1ea gas inputs, single channel, Mod. PM 119 RF Generator, 500W @ 13.56MHz

Branson/IPC Mod. 4000, 1ea 10"(dia) x 20"(D) quartz barrel, 2ea gas inputs, w/Mod. 906U-4 single channel process programmer, Mod. PM112 1000W RF Generator

Branson/IPC Mod. 4150, 1ea 16"(dia) x 30"(D) aluminum barrel, 10.5" dia x 24" D faraday cage, 2ea gas inputs, single channel process programmer, Mod. PM112 1000W RF Generator

Branson/IPC Mod. 4055 Plasma Surface Treatment/cleaning system, aluminum trays/electrodes, 2ea gas inputs, single channel, Mod. PM 119 RF Generator, 500W @ 13.56MHz

Branson/IPC Mod. 7150, 1ea 24"(dia) x 36"(D) aluminum chamber, 4ea gas inputs, 3 channel controller, Mod. PM 132 1500W RF Generator

Branson/IPC Mod. S2100MFC, 1ea 12"(dia) x 20"(D) quartz barrel, 2ea rotometer gas inputs, 2ea mass flow gas inputs, three channel, with temperature controller tied into channel one, Mod. PM 112 1000W RF Generator

Branson/IPC Mod. S3003, 1ea 8"(dia) x 13"(D) quartz chamber, 1ea gas inputs, single channel, Mod. PM 119 RF Generator, 500W @ 13.56MHz

Branson/IPC Mod. S3100, 1ea 12"(dia) x 20"(D) quartz barrel, 1ea gas inputs, w/Mod. 3000C 1 channel process programmer, Mod. PM112 1000W RF Generator

Branson/IPC Mod. S4100, 1ea 12"(dia) x 20"(D) quartz barrel, 2ea gas inputs, w/Mod. 4000C 1 channel process programmer, Mod. PM112 1000W RF Generator

D&W Mod. 425 plasma etcher, 28" dia electrode for 2-5" wafers or flat panels, 3ea mass flow gas inputs, 3ea regulator controlled gas inputs, 4 channel digital controller, 3000W RF Generator @ 13.56MHz

Gasonics PEP 3510A/C Asher/Clean system, Kensington Robot, '96 vintage, for 3-8" wafers, microwave downstream Asher/clean system

Gasonics Mod. AE-2001 Nitride etcher, for 3-6" wafers, 4ea mass flow gas inputs microwave downstream etcher

LAM Research Mod. 490 Plasma Etcher, set up for 5" (can convert to 4 or 6"), Poly Etch, cassette to cassette operation, load locks, ENI 600W RF Generator, rebuilt

Leybold Mod. Z410S RIE/PE etcher, load-lock, pallet capable of handling up to 200mm wafer, can select power to bottom, top, or both electrodes, turbo pumped, MKS throttle valve, Xinix End Point Detector, 4ea mass flow gas inputs, PLC/computer controlled, w/ENI OEM6 RF Generator

LFE Mod. PDE-301, 1ea 5"dia x 6"D quartz chamber, 1ea gas input, single channel, auto logic, auto tuning, 300W RF Generator

Metroline/IPC Mod. M4L, state of the art plasma surface treatment system

Plasma Etch Mod. PE-1000 plasma surface treatment system, 23.75"W x 54.25"L x 11"H Aluminum chamber, automated system with conveyor, 1000W RF generator @ 13.56MHz, 2ea Mass Flow Controllers, PC computer controlled

Plasma Quest ECR III multipolar ECR plasma system, Up to 8 inch diameter Parts, load lock, Pfeiffer TCP 600 turbo pump, Edwards Dry Pumping system, rf powered (RIE etch) heatable and coolable electrode, vertical wafer translation ability, downstream processing chamber, downstream gas feed ring full computer control (IBM 350PC), Plasma Quest Mod. AX2050 M'wave generator, 2500W @ 2.45 GHz, Huttinger Mod. PFG 5000 RF Generator, 5KW @ 13.56 MHz 6ea gas inputs

Tegal Mod. 211, for 2-3" wafers, batch type stripper, 1ea gas input, single channel, 300W RF Generator

Tegal Mod. 411, for 2-4" wafers, batch type stripper, single gas input, single channel, 300W RF Generator, manual matching network

Tegal Mod. 415, for 2-4" wafers, batch type stripper, 1ea gas input, single channel, auto tuning, auto/manual logic, 300W RF Generator

Tegal Mod. 421, for 2-4" wafers, batch type stripper/nitride etcher, 2ea gas inputs, two channel, Preheating capability, manual tuning, auto/manual logic, 300W RF Generator

Tegal Mod. 701 Plasma Poly Etcher, for 4" wafers, single wafer cassette to cassette, 4 ea gas inputs, two channels, 300W RF Generator, auto logic/tuning

Tegal Mod. 803 Plasma Oxide Etcher, for 4" wafers, single wafer cassette to cassette, 4 ea gas inputs, two channels, ENI 1 KW RF Generator, auto logic/tuning

Tegal Mod. 903e Plasma Oxide Etcher, for 4" wafers, single wafer cassette to cassette, 4 ea gas inputs, two channels, ENI ACG-10, 1 KW RF Generator, auto logic/tuning

Tegal Mod. 915 Plasma Asher/Stripper system, for up to 5" wafers, batch type, 1ea gas input, 9ea process recipe storage, auto logic, auto tuning, 500W RFPP solid state RF Generator

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All equipment are subject to availability at time and date of inquiry

The following spare parts is a partial list. There are much more, so, please feel free to send a message of inquiry.

System Manuals

Fomblin/Krytox vacuum pump fluids

Branson Quartzware

• Quartz T/C sheath, new, 1/8" dia x 15" long.
• Quartz pumping shank manifold, 1"OD x 5" long.
• Quartz gas ball fitting, w/1/4" tubing.
• Quartz gas ball fitting, blank off/blind ball.
• Quartz gas ball fitting, new, w/1/4" tubing x 5"long sheath going into chamber.
• Quartz chamber, new, 10" dia x 20" (D).
• Quartz chamber, used, 10" dia x 20" (D).
• Quartz chamber, new, 12" dia x 20" (D).

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry

Etch Tunnel

• 9" dia x 19" long faraday cage, new/seasoned.
• 9" dia x 19" long faraday cage, used.
• 7" dia x 19" long faraday cage, new/seasoned.
• 7" dia x 19" long faraday cage, used.

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry

Branson RF Generator/Controller spares

• Vacuum/Regulator Board.
• DC Rectifier Board.
• Oscillator Board.
• 12JT6A oscillator tube.
• Fan, 120VAC.
• Tube, Eimac Y763/YU127/4CX1500B.
• Relay, Time Delay, CHB38-70003.
• Fuse Kit, low current.
• Switch, EPO.
• MFJ250 dummy load, rated 1.0KW for 10 min.
• Triacs.
• HV Rectifier Board.
• +/-12VDC Power Supply Board.
• HV Regulator Board.
• 6JT6A oscillator tube.
• Fan, 220VAC.
• Fuse, KAB-35.
• Flowmeter, Porter 0-900 SCCM.
• MJE 350, transistor.
• 2N5657, transistor.
• Crystal, 13.56MHz, Xtron.
• Brand New, 51ea 6" quartz wafer boats, low profile, 25 slot, 6 x 6.125 x 2.625"H

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry

Quartzware for Branson/IPC Plasma Asher/Stripper system

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry

Furnace quartzware

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry

Vacuum Pumps

Pump/Blower Packages

Reference:   EH883PT

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Note: All products or equipment are subject to availability at time and date of inquiry

Cryo /Turbo Pumps

Alcatel Mod. 5030CP turbo pump, w/Mod. CFF 450 controller

Alcatel Mod. 5100 turbo pump, w/Mod CFF 100 controller

CTI 10" cryo pump Mod. #8018-184, w/Mod. 1020RW compressor

Leybold TMP 450 turbo pump, w/NT450 Converter, rebuilt

Leybold Turbo Vac 150 model # 85471 

Leybold Turbovac 340 turbo pump

Varian Mod. 969-9001S011 turbo pump

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry

Vacuum Systems

Reference:   EH883PT

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Note: All products or equipment are subject to availability at time and date of inquiry

Semiconductor Equipment

Accurate Gas Control chiller, Mod. AG-T, -15 to 85 Deg C, 2136W

Air Products auto purge gas cabinet

Anger electronic Mod. TSN 180 dry film laminator, for thick resist coatings up to 30-40 microns

Aquafine Water Sterilizer, portable

ASGT single cylinder gas cabinet (for small cylinders)

ASM LPCVD furnace, 9" ID heating elements, LTO and Atm processes

B&L Mod. Vision TS-2 Stereo Dynascope, teaching microscope 

B&L Stereo Zoom 4 microscope, with boom stand

Blue M Oven OV8A Mini Oven

Blue M Oven Mod. POM 206B-1, to 343 Deg C

Blue M Oven, Mod # unknown, programmable high temp 0-1200F, chamber 25”Wx14”Dx20”H pass through door configuration, Fast Trac 620 controller, process and purge gas inputs

Chatillon TCD-200 Digital Force Gauge/Pull Tester

Dage Mod. BT23 Shear Tester, for ball bonds, and tab bumps. 200 gram

Disco DAD 2H/5 wafer saw

EG&G Microdensitometer, Mods. DR-2550 and 700-10-90, complete

Engis Corp. Mod EM1 Hyprez Minimiser Electronic Dispenser

FSI Polaris 1000 Microlithography Cluster tool, set up for 6", 1 Coat Module, 1 Develope Module, 1 Vapor Prime/Chill module, 1 Programmable proximity precision back/chill module (4 back/1 chill each), 1 150mm I/O module, 1 Staubi 560C robot, 1 Ultratech 2700 Stepper Interface, 1 RAM 3000 cluster environmental control system, 1 Electrical Power Distribution system, 1 remote cluster controller, 1 corner dispense module with 3 cybor pumps w/integral millipore 16 stack filters, 1 corner dispense module with 3 cybor pumps w/o intergral filters, 1 Optical Specialties Inc. optical inspection station interface

High Yield Technology Mod. 150 & HYT controllers

Inficon Quadrex Mod. 100 RGA system

Innovative Engineering Mod. 815 burn box

J.C. Schumacker Mod 13 and 100 Source Temperature Controller Power Supply, with pots

LDM Plasma Controller

Mech-El Mod. 990 Thermal Compression Bonder

Micromanipulator 6000 prober

Micromanipulator C0222 manual prober 2"

Neslab Mod. HX-150 water chiller, w/DI filter

Olympus BH-2 microscope, binoc head w/10X eyepieces, 40X objective

Olympus Stereo Zoom Microscope, on boom stand

Praxair auto purge gas cabinet

Rucker and Kolls Mod. 430 manual probe station for 2"

Semifab CD-100 Environmental Control Systems, used with wafer track systems 

SSEC Mod. 156-SC Plate cleaner

Tri Mer portable/mobile fume scrubber

UltraTech 603 Plate/Mask Cleaner, for 3-6"

Vector Fume scrubber, Mod. ES 350, w/spare pump

Verteq Spin Rinse Dryers, Models, 1600-34, and 1600-55A

Westbond Mod. 7440C wire bonder, for insulated wire, manual

Zeiss metallurgical microscope, binoc head w/10X eyepieces, 4X, 8X, 16X objectives, w/misc. wafer/mask fixtures.

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry

If you don't find the product you came for, we set up another communications vehicle so you can place the product you want to buy or want to sell thru our "Classified Ads Section".  We believe this worldwide advertising for FREE or Extended can help our valued visitors get what they want. Please click on the following link.

However, if you are interested to advertise with a whole page like this, or part of it in plain text, table or list formats, button or banner ads, please click here  for more information.

Note: For link exchange, please email us the location of our link in you website and your code for our website. We will send you the location where your link will be.

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OLM Enterprises
Semiconductor Equipment Resource Center

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Copyright ©1999 OLM Enterprises

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