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RF/DC Power Supplies & Matching Networks

Make / Model# Power Frequency
AE MDX-10 10000W DC
AE MDX-10 Slave 10000W DC
AE PE-1000SG 1250W 25-100kHZ
Branson PM 119 500W 13.56MHz
Branson PM 118 500W 13.56MHz
Branson PM 112 1500W 13.56MHz
Branson PM 122 1500W 13.56MHz
Branson PM 129 500W 13.56MHz
Branson PM 332 1000W 13.56MHz
Comdel CPS-1001 1000W 13.56MHz
ENI HF1 2000W 13.56MHz
ENI AGC-10T 1000W 13.56MHz
ENI OEM-6 & 6A XL 600W 13.56MHz
ENI OEM12A&B 1250W 13.56MHz
ENI OEM25 & 25XL 2500W 13.56MHz
ENI OEM28B 2800W 13.56MHz
ENI OEM50 5000W 13.56MHz
ENI Matchworks 25D 3000W 13.56MHz
Huettinger IS6/13560 6000W 13.56MHz
LFE/SA 40C 500W 13.56MHz
Plasma Therm HFS2000/3000D 3000W 13.56MHz
RF Plasma Prod. T502S 500W 13.56MHz
RFPP 50 5000W 13.56MHz
RF Svcs 9900 match 10000W 13.56MHz
Tegal 300W 13.56MHz

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All equipment are subject to availability at time and date of inquiry


Plasma Systems

Applied Materials Mod. 3300 PECVD system, Silicon Nitride and Silicon Dioxide films, Wafer capacity: 42ea 3" wafers, 22ea 4" wafers 16ea 5" wafers, ENI Mod. PS-300 RF Power Supply, 2000W @ 8-111 KHz, 3 zone temperature control, Gas shower, Vacuum pumps and filtration system

Branson Mod. L2101 Plasma /Asher/Etcher, 1ea 12 x 20" quartz chamber, low particulate, 5ea mass flow gas inputs, computer controlled w/recipe storage of up to 350 process steps, temp controller, Mod. PM 332/ENI OEM 12 1000W solid state RF Generator, rebuilt

Branson Mod. L2200 Plasma Stripper, 2ea composite ceramic/aluminum chambers for 3-8" wafers, low particulate, cassette to cassette operation, computer controlled, robot loader/unloader, ENI 1000W solid state RF generator, rebuilt

Branson Mod. L3200 Plasma Stripper, 2ea quartz chambers for 3-6" wafers, low particulate, cassette to cassette operation, computer controlled, robot/indexer loader/unloader, ENI 1000W solid state RF generator, rebuilt

Branson/IPC Mod. 2000, 1ea 10"(dia) x 20"(D) quartz barrel, 3ea gas inputs, w/Mod. 906U 3 channel process programmer, w/Mod. 921C temperature controller, Mod. PM119 500W RF Generator

Branson/IPC Mod. 3000, 1ea 10"(dia) x 20"(D) quartz chamber, 1ea gas inputs, single channel, Mod. PM 119 RF Generator, 500W @ 13.56MHz

Branson/IPC Mod. 3000, 1ea 8"(dia) x 13"(D) quartz chamber, 1ea gas inputs, single channel, Mod. PM 119 RF Generator, 500W @ 13.56MHz

Branson/IPC Mod. 4000, 1ea 10"(dia) x 20"(D) quartz barrel, 2ea gas inputs, w/Mod. 906U-4 single channel process programmer, Mod. PM112 1000W RF Generator

Branson/IPC Mod. 4150, 1ea 16"(dia) x 30"(D) aluminum barrel, 10.5" dia x 24" D faraday cage, 2ea gas inputs, single channel process programmer, Mod. PM112 1000W RF Generator

Branson/IPC Mod. 4055 Plasma Surface Treatment/cleaning system, aluminum trays/electrodes, 2ea gas inputs, single channel, Mod. PM 119 RF Generator, 500W @ 13.56MHz

Branson/IPC Mod. 7150, 1ea 24"(dia) x 36"(D) aluminum chamber, 4ea gas inputs, 3 channel controller, Mod. PM 132 1500W RF Generator

Branson/IPC Mod. S2100MFC, 1ea 12"(dia) x 20"(D) quartz barrel, 2ea rotometer gas inputs, 2ea mass flow gas inputs, three channel, with temperature controller tied into channel one, Mod. PM 112 1000W RF Generator

Branson/IPC Mod. S3003, 1ea 8"(dia) x 13"(D) quartz chamber, 1ea gas inputs, single channel, Mod. PM 119 RF Generator, 500W @ 13.56MHz

Branson/IPC Mod. S3100, 1ea 12"(dia) x 20"(D) quartz barrel, 1ea gas inputs, w/Mod. 3000C 1 channel process programmer, Mod. PM112 1000W RF Generator

Branson/IPC Mod. S4100, 1ea 12"(dia) x 20"(D) quartz barrel, 2ea gas inputs, w/Mod. 4000C 1 channel process programmer, Mod. PM112 1000W RF Generator

D&W Mod. 425 plasma etcher, 28" dia electrode for 2-5" wafers or flat panels, 3ea mass flow gas inputs, 3ea regulator controlled gas inputs, 4 channel digital controller, 3000W RF Generator @ 13.56MHz

Gasonics PEP 3510A/C Asher/Clean system, Kensington Robot, '96 vintage, for 3-8" wafers, microwave downstream Asher/clean system

Gasonics Mod. AE-2001 Nitride etcher, for 3-6" wafers, 4ea mass flow gas inputs microwave downstream etcher

LAM Research Mod. 490 Plasma Etcher, set up for 5" (can convert to 4 or 6"), Poly Etch, cassette to cassette operation, load locks, ENI 600W RF Generator, rebuilt

Leybold Mod. Z410S RIE/PE etcher, load-lock, pallet capable of handling up to 200mm wafer, can select power to bottom, top, or both electrodes, turbo pumped, MKS throttle valve, Xinix End Point Detector, 4ea mass flow gas inputs, PLC/computer controlled, w/ENI OEM6 RF Generator

LFE Mod. PDE-301, 1ea 5"dia x 6"D quartz chamber, 1ea gas input, single channel, auto logic, auto tuning, 300W RF Generator

Metroline/IPC Mod. M4L, state of the art plasma surface treatment system

Plasma Etch Mod. PE-1000 plasma surface treatment system, 23.75"W x 54.25"L x 11"H Aluminum chamber, automated system with conveyor, 1000W RF generator @ 13.56MHz, 2ea Mass Flow Controllers, PC computer controlled

Plasma Quest ECR III multipolar ECR plasma system, Up to 8 inch diameter Parts, load lock, Pfeiffer TCP 600 turbo pump, Edwards Dry Pumping system, rf powered (RIE etch) heatable and coolable electrode, vertical wafer translation ability, downstream processing chamber, downstream gas feed ring full computer control (IBM 350PC), Plasma Quest Mod. AX2050 M'wave generator, 2500W @ 2.45 GHz, Huttinger Mod. PFG 5000 RF Generator, 5KW @ 13.56 MHz 6ea gas inputs

Tegal Mod. 211, for 2-3" wafers, batch type stripper, 1ea gas input, single channel, 300W RF Generator

Tegal Mod. 411, for 2-4" wafers, batch type stripper, single gas input, single channel, 300W RF Generator, manual matching network

Tegal Mod. 415, for 2-4" wafers, batch type stripper, 1ea gas input, single channel, auto tuning, auto/manual logic, 300W RF Generator

Tegal Mod. 421, for 2-4" wafers, batch type stripper/nitride etcher, 2ea gas inputs, two channel, Preheating capability, manual tuning, auto/manual logic, 300W RF Generator

Tegal Mod. 701 Plasma Poly Etcher, for 4" wafers, single wafer cassette to cassette, 4 ea gas inputs, two channels, 300W RF Generator, auto logic/tuning

Tegal Mod. 803 Plasma Oxide Etcher, for 4" wafers, single wafer cassette to cassette, 4 ea gas inputs, two channels, ENI 1 KW RF Generator, auto logic/tuning

Tegal Mod. 903e Plasma Oxide Etcher, for 4" wafers, single wafer cassette to cassette, 4 ea gas inputs, two channels, ENI ACG-10, 1 KW RF Generator, auto logic/tuning

Tegal Mod. 915 Plasma Asher/Stripper system, for up to 5" wafers, batch type, 1ea gas input, 9ea process recipe storage, auto logic, auto tuning, 500W RFPP solid state RF Generator

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All equipment are subject to availability at time and date of inquiry


Spare Parts

The following spare parts is a partial list. There are much more, so, please feel free to send a message of inquiry.

System Manuals

Fomblin/Krytox vacuum pump fluids

Branson Quartzware

  • Quartz T/C sheath, new, 1/8" dia x 15" long.
  • Quartz pumping shank manifold, 1"OD x 5" long.
  • Quartz gas ball fitting, w/1/4" tubing.
  • Quartz gas ball fitting, blank off/blind ball.
  • Quartz gas ball fitting, new, w/1/4" tubing x 5"long sheath going into chamber.
  • Quartz chamber, new, 10" dia x 20" (D).
  • Quartz chamber, used, 10" dia x 20" (D).
  • Quartz chamber, new, 12" dia x 20" (D).
Note: Quartz parts have a 60 day warranty for materials and workmanship. These quartz parts are not warranted if broken in shipping or handling.

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry


Etch Tunnel

  • 9" dia x 19" long faraday cage, new/seasoned.
  • 9" dia x 19" long faraday cage, used.
  • 7" dia x 19" long faraday cage, new/seasoned.
  • 7" dia x 19" long faraday cage, used.

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry


Branson RF Generator/Controller spares

  • Vacuum/Regulator Board.
  • DC Rectifier Board.
  • Oscillator Board.
  • 12JT6A oscillator tube.
  • Fan, 120VAC.
  • Tube, Eimac Y763/YU127/4CX1500B.
  • Relay, Time Delay, CHB38-70003.
  • Fuse Kit, low current.
  • Switch, EPO.
  • MFJ250 dummy load, rated 1.0KW for 10 min.
  • Triacs.
  • HV Rectifier Board.
  • +/-12VDC Power Supply Board.
  • HV Regulator Board.
  • 6JT6A oscillator tube.
  • Fan, 220VAC.
  • Fuse, KAB-35.
  • Flowmeter, Porter 0-900 SCCM.
  • MJE 350, transistor.
  • 2N5657, transistor.
  • Crystal, 13.56MHz, Xtron.
  • Brand New, 51ea 6" quartz wafer boats, low profile, 25 slot, 6 x 6.125 x 2.625"H

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry


Quartzware for Branson/IPC Plasma Asher/Stripper system

P/N Description
Q1033 Quartz T/C sheath, new, 1/8" dia x 15" long
Q2394  Quartz pumping shank manifold, new, 1"OD x 5" long
Q2395 Quartz pumping shank, for low particulate chamber 3"
Q2248 Quartz gas ball fitting, new, w/1/4 or 3/8" tubing
Q3771 Quartz gas ball fitting, blank off/blind ball
Q9872 Quartz gas ball fitting, new, w/1/4 or 3/8" tubing x 5"long sheath going into chamber
Q8743 Quartz chamber, used, 8" dia x 20" (D)
Q8745 Quartz chamber, new, 10" dia x 20" (D)
Q4653 Quartz chamber, used, 10" dia x 20" (D)
Q8834 Quartz chamber, new, 12" dia x 20" (D), low particulate or standard
Q3376 Quartz window, new, 13.5" x 13.5"
Q4527 Quartz window, new, 11.5" x 11.5"
F9X19 9" dia x 19" long faraday cage, new/seasoned, and unseasoned
F9X19U 9" dia x 19" long faraday cage, used
F7X19 7" dia x 19" long faraday cage, new/seasoned
F7X19 7" dia x 19" long faraday cage, new/unseasoned
F7X19U 7" dia x 19" long faraday cage for 10" dia chamber

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry


Furnace quartzware

4ea Liners, 200x212x52 3/16"

2ea Chambers, 220x236x52 1/4"

SVG Vert Furnace chamber, approx 9.5 x 40" w/TC Probe

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry


Vacuum Pumps

Make / Model# Pumping Speed
Alcatel/2030C 17.7CFM/500 1/m
Alcatel/2033C 27CFM/765 1/m
Alcatel/ZT2063C 50CFM/1420 1/m
Edwards/E2M1 1CFM/28 1/m
Edwards/E2M8 6.7 CFM/190 1/m
Edwards/E2M40 30CFM/845 1/m
Edwards/E2M80 57 CFM/1613 1/m
Edwards/EH250 Fomblin 190CFM/5367 1/m
Leybold D90AC 55CFM/1556 1/m
Leybold Heraeus/D30AC 26.8CFM/760 1/m
Leybold/D16 14.1CFM/400 l/m
Leybold/D16BCS 11.6CFM/328 1/m
Leybold/D2 2.2CFM/62 l/m
Leybold/D4 4.5CFM/127 1/m
Leybold/D40BCS 28.3CFM/ 920 1/m
Leybold/D60 36.7CFM/1039 l/m
Leybold/D8 7.0CFM/198 l/m


Pump/Blower Packages

Make / Model# Pumping Speed
Edwards EH250 blower E2M40 pump 220 CFM/6196 1/m30 CFM/845 1/m
Leybold Heraeus WA250 LH D30AC Fomblin 179 CFM/ 26.8 CFM
Leybold Heraeus/WAU250 LH D40B 169 CFM/28.3 CFM
Leybold/D40BCS, w/blower 28.3 CFM 920 1/m

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry


Cryo /Turbo Pumps

Alcatel Mod. 5030CP turbo pump, w/Mod. CFF 450 controller

Alcatel Mod. 5100 turbo pump, w/Mod CFF 100 controller

CTI 10" cryo pump Mod. #8018-184, w/Mod. 1020RW compressor

Leybold TMP 450 turbo pump, w/NT450 Converter, rebuilt

Leybold Turbo Vac 150 model # 85471 

Leybold Turbovac 340 turbo pump

Varian Mod. 969-9001S011 turbo pump

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry


Vacuum Systems

Balzers BAK 760 Evaporation system (1187), Chamber Inside Dims: 35 W x 37 D x 36.5" H , manual load system w/21" dia x 25"D rotary drum (parts fixture) installed on door, Advanced Energy Mod. 2225-009-S DC P/S w/slave unit PC 101 valve controller, DPRTA Dual process RTA, MKS 246 power supply/mass flow gas readout, RTA 101 Rate Time Adder, USU 101 controller: sputter power level (pre sput and sput), cycle controller (start, stop, vent) gas on/off, cryo regen auto, shutter open/close, drum rotate, EDS 100 disconnect switch module, EEU 401 Emergency cutout unit, Glow discharge control/Nitrogen cooling control/Rotary Discharge control, Breaker Box w/cryo pump switch, QMG 064 partial pressure gauge, MCU 120 Magnetron control unit, w/magnetron P/S, IMG 060B Ion Gauge control, RVG 040 Valve controller, EEO 101 Emergency Stop Module, TPG 300 total pressure controller, IKW 010 High Vacuum relay, Analog meter (mBar), Cryo Thermometer, Cryo compressor alarm, Alarm reset/Shutter fail alarm, cryo pumped

CVC Mod. 18 Evaporator, 18"dia x 26" H SS bell jar, CTI 8" cryo pump, with compressor, Edwards E2M80 roughing pump, Sloan Substrate Heater Control, Veeco Mod. EC 200 filament Control, valve sequencer (auto/manual modes), Inficon IC 6000 Deposition rate monitor, GP 260 Ion Gauge Controller, AC Power Distribution Panel,

CVC Mod CVE 301 EB-FR, E Beam Evap, 14" dia x 14"H SS bell jar, CTI 100 cryo pump, w/compressor, Leybold D30 mech pump, manual valving, Inficon XTC Dep. Rate controller, CVP Mod. 301 EPS Filament power supply, CVP substrate heater control with Athena Digital Temp controller, single pocket E-Gun w/EB4M E-gun power supply, built in TC/Cold Cathode gauges, with analog meters

CVC sputterer, 4 stations, manual operation, MDX-10 DC Power Supply, 6" diffusion pump

Innotech sputterer customized: 486 industrial computer tied to PLC, CTI 8 cryo w/compressor, RF Services automatch networks w/controllers, approx 28" dia SS chamber, RGA port, Henry 10KW RF Power Supply, Advanced Energy Mod. RFX 1250

Leybold Heraeus Mod. Ultratest F Leak Detector, automatic operation, diffusion pumped, rebuilt

Leybold Mod. VZK A550 sputtering machine, w/Huttinger Mod. IS 6 10KW RF Power P/S, spare RF Generator

NRC 3317 Sputtering System, MRC S-3007 RF P/S, 1.25 KW, 6" target w/sputter etch station, manual valving, VHS-6" DP with Welch 1397 mechanical pump

Perkin Elmer Mod. 2400 Sputtering system (11/76), PE 2KW RF Power Supply, AE MDX DC P/S, Manual load system, 6 table positions, RF etch, DC and RF Deposition Stations, Digital Clock Timer, PE Digital Gauge Controller, PE Pump (valving) controller, PE Match controller, CTI Cryo Regen Controller, CTI 8" Cryo pump with compressor, Alcatel 2063 roughing pump

Varian 3125 S Gun Evaporator, cylindrical stainless steel chamber

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry


Semiconductor Equipment

Accurate Gas Control chiller, Mod. AG-T, -15 to 85 Deg C, 2136W

Air Products auto purge gas cabinet

Anger electronic Mod. TSN 180 dry film laminator, for thick resist coatings up to 30-40 microns

Aquafine Water Sterilizer, portable

ASGT single cylinder gas cabinet (for small cylinders)

ASM LPCVD furnace, 9" ID heating elements, LTO and Atm processes

B&L Mod. Vision TS-2 Stereo Dynascope, teaching microscope 

B&L Stereo Zoom 4 microscope, with boom stand

Blue M Oven OV8A Mini Oven

Blue M Oven Mod. POM 206B-1, to 343 Deg C

Blue M Oven, Mod # unknown, programmable high temp 0-1200F, chamber 25”Wx14”Dx20”H pass through door configuration, Fast Trac 620 controller, process and purge gas inputs

Chatillon TCD-200 Digital Force Gauge/Pull Tester

Dage Mod. BT23 Shear Tester, for ball bonds, and tab bumps. 200 gram

Disco DAD 2H/5 wafer saw

EG&G Microdensitometer, Mods. DR-2550 and 700-10-90, complete

Engis Corp. Mod EM1 Hyprez Minimiser Electronic Dispenser

FSI Polaris 1000 Microlithography Cluster tool, set up for 6", 1 Coat Module, 1 Develope Module, 1 Vapor Prime/Chill module, 1 Programmable proximity precision back/chill module (4 back/1 chill each), 1 150mm I/O module, 1 Staubi 560C robot, 1 Ultratech 2700 Stepper Interface, 1 RAM 3000 cluster environmental control system, 1 Electrical Power Distribution system, 1 remote cluster controller, 1 corner dispense module with 3 cybor pumps w/integral millipore 16 stack filters, 1 corner dispense module with 3 cybor pumps w/o intergral filters, 1 Optical Specialties Inc. optical inspection station interface

High Yield Technology Mod. 150 & HYT controllers

Inficon Quadrex Mod. 100 RGA system

Innovative Engineering Mod. 815 burn box

J.C. Schumacker Mod 13 and 100 Source Temperature Controller Power Supply, with pots

LDM Plasma Controller

Mech-El Mod. 990 Thermal Compression Bonder

Micromanipulator 6000 prober

Micromanipulator C0222 manual prober 2"

Neslab Mod. HX-150 water chiller, w/DI filter

Olympus BH-2 microscope, binoc head w/10X eyepieces, 40X objective

Olympus Stereo Zoom Microscope, on boom stand

Praxair auto purge gas cabinet

Rucker and Kolls Mod. 430 manual probe station for 2"

Semifab CD-100 Environmental Control Systems, used with wafer track systems 

SSEC Mod. 156-SC Plate cleaner

Tri Mer portable/mobile fume scrubber

UltraTech 603 Plate/Mask Cleaner, for 3-6"

Vector Fume scrubber, Mod. ES 350, w/spare pump

Verteq Spin Rinse Dryers, Models, 1600-34, and 1600-55A

Westbond Mod. 7440C wire bonder, for insulated wire, manual

Zeiss metallurgical microscope, binoc head w/10X eyepieces, 4X, 8X, 16X objectives, w/misc. wafer/mask fixtures.

Reference:   EH883PT

If interested in one or more items,   please click here.  Please include reference.

Note: All products or equipment are subject to availability at time and date of inquiry


Please contact us at:

OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
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