Semiconductor Equipment: Varian, Novellus, Applied Materials, LAM, Etc. Equipment Parts List, Semiconductor Equipment
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Novellus Concept One, Lam 4520i, KLA-Tencor Surfscan SP1, Axcelis-Eaton Ion Implanters GSD-200E and GSD-200EE, Varian 3190 Configurations and Equipment List
Please click on the links below to explore Systems configurations and other equipment for sale.
- Novellus, Concept One, #734 System
- Novellus, Concept One, #770 System
- Novellus, Concept One, #852 System
- Lam 4520i, ER
- KLA-Tencor Surfscan, Model SP1, ER
- Axcelis-Eaton, GSD-200EE, ER
- Axcelis-Eaton, GSD-200E, MS
- Varian Sputtering System, 5 Inch 3190
- Significant Parts for Semiconductor Equipment
- Significant Parts for Semiconductor Equipment #2
To see photos or pictures of other equipment and parts, please click here.
Semiconductor Equipment Parts for Sale, SRMM Grp
Please call or send inquiry to info@semiconweb.net.
If interested in one or more items, you may also click here.
Note: All products are subject to availability at time and date of inquiry.
Parts
For Sale
|
SRMM
ID Code
|
Manufacturer
|
Part
Number
|
Description
|
|
SR-20000
|
LAM
4520/4526i
|
716-020904-016
|
Ring,
Lower Edge Focus
|
|
SR-20001
|
LAM
4520/4526i
|
716-020904-016
|
Ring,
Lower Edge Focus
|
|
SR-20002
|
LAM
4520/4526i
|
716-020904-016
|
Ring,
Lower Edge Focus
|
|
SR-20003
|
LAM
4520/4526i
|
716-020904-016
|
Ring,
Lower Edge Focus
|
|
SR-20004
|
LAM
4520/4526i
|
716-020904-016
|
Ring,
Lower Edge Focus
|
|
SR-20005
|
LAM
4520/4526i
|
716-020904-016
|
Ring,
Lower Edge Focus
|
|
SR-20006
|
LAM
4520/4526i
|
716-020904-016
|
Ring,
Lower Edge Focus
|
|
SR-20007
|
LAM
4520/4526i
|
716-020904-016
|
Ring,
Lower Edge Focus
|
|
SR-20008
|
LAM
4520/4526i
|
716-020904-016
|
Ring,
Lower Edge Focus
|
|
SR-20009
|
LAM
4520/4526i
|
716-020904-016
|
Ring,
Lower Edge Focus
|
|
SR-20010
|
LAM
4520/4526i
|
853-012500-002
|
Edge
Sensor Assembly
|
|
SR-20011
|
LAM
4520/4526i
|
716-020905-001
|
Ring
Filler, Lower wafer Clamp
|
|
SR-20012
|
LAM
4520/4526i
|
716-011570-001
|
Orifice
Filler w/c
|
|
SR-20013
|
LAM
4520/4526i
|
716-011570-001
|
Orifice
Filler w/c
|
|
SR-20014
|
LAM
4520/4526i
|
716-011624-001
|
Insulator
Ring Lower Electrode
|
|
SR-20015
|
LAM
4520/4526i
|
716-011624-001
|
Insulator
Ring Lower Electrode
|
|
SR-20016
|
LAM
4520/4526i
|
716-011624-001
|
Insulator
Ring Lower Electrode
|
|
SR-20017
|
LAM
4520/4526i
|
716-011624-001
|
Insulator
Ring Lower Electrode
|
|
SR-20018
|
LAM
4520/4526i
|
716-011624-001
|
Insulator
Ring Lower Electrode
|
|
SR-20019
|
LAM
4520/4526i
|
716-011-923-001
|
Plate
w/c Attachment
|
|
SR-20020
|
LAM
4520/4526i
|
716-011-923-001
|
Plate
w/c Attachment
|
|
SR-20021
|
LAM
4520/4526i
|
716-011-923-001
|
Plate
w/c Attachment
|
|
SR-20022
|
LAM
4520/4526i
|
716-011-923-001
|
Plate
w/c Attachment
|
|
SR-20023
|
LAM
4520/4526i
|
715011985-106
|
Cap
Lower Elec. W/vent
|
|
SR-20024
|
LAM
4520/4526i
|
715011985-106
|
Cap
Lower Elec. W/vent
|
|
SR-20025
|
LAM
4520/4526i
|
715011985-106
|
Cap
Lower Elec. W/vent
|
|
SR-20026
|
LAM
4520/4526i
|
715011985-106
|
Cap
Lower Elec. W/vent
|
|
SR-20027
|
LAM
4520/4526i
|
715011985-106
|
Cap
Lower Elec. W/vent
|
|
SR-20028
|
LAM
4520/4526i
|
715011985-106
|
Cap
Lower Elec. W/vent
|
|
SR-20029
|
LAM
4520/4526i
|
716-011536-001
|
Insulator
Ring Upper Electrode
|
|
SR-20030
|
LAM
4520/4526i
|
716-011536-001
|
Insulator
Ring Upper Electrode
|
|
SR-20031
|
LAM
4520/4526i
|
716-011536-001
|
Insulator
Ring Upper Electrode
|
|
SR-20032
|
LAM
4520/4526i
|
716-011536-001
|
Insulator
Ring Upper Electrode
|
|
SR-20033
|
LAM
4520/4526i
|
716-011536-001
|
Insulator
Ring Upper Electrode
|
|
SR-20034
|
LAM
4520/4526i
|
716-011536-001
|
Insulator
Ring Upper Electrode
|
|
SR-20035
|
LAM
4520/4526i
|
716-011536-001
|
Insulator
Ring Upper Electrode
|
|
SR-20036
|
LAM
4520/4526i
|
716-011536-001
|
Insulator
Ring Upper Electrode
|
|
SR-20037
|
LAM
4520/4526i
|
716-011623-001
|
Upper
Electrode Insulator Ring
|
|
SR-20038
|
LAM
4520/4526i
|
716-011623-001
|
Upper
Electrode Insulator Ring
|
|
SR-20039
|
LAM
4520/4526i
|
716-011623-001
|
Upper
Electrode Insulator Ring
|
|
SR-20040
|
LAM
4520/4526i
|
716-011623-001
|
Upper
Electrode Insulator Ring
|
|
SR-20041
|
LAM
4520/4526i
|
715-011502-001
|
Cooling
Ring Upper Electrode
|
|
SR-20042
|
LAM
4520/4526i
|
715-011502-001
|
Cooling
Ring Upper Electrode
|
|
SR-20043
|
LAM
4520/4526i
|
715-011502-001
|
Cooling
Ring Upper Electrode
|
|
SR-20044
|
LAM
4520/4526i
|
715-021741-006
|
Wafer
Holder
|
|
SR-20045
|
LAM
4520/4526i
|
716-028028-004
|
Electrode
Clamp Ring
|
|
SR-20046
|
LAM
4520/4526i
|
716-028028-004
|
Electrode
Clamp Ring
|
|
SR-20047
|
LAM
4520/4526i
|
716-020904-016
|
Lower
Edge Focus Ring
|
|
SR-20048
|
LAM
4520/4526i
|
716-028028-004
|
Electrode
Clamp Ring
|
|
SR-20049
|
Pillar
|
PE
20 MA
|
Bellows
Pump
|
|
SR-20050
|
Pillar
|
PE
20 MA
|
Bellows
Pump
|
|
SR-20051
|
PCB
|
810-009281-001revE
|
Gap
Driver Board
|
|
SR-20052
|
PCB
|
810-008582-001
|
Phase
Mag Director
|
|
SR-20053
|
Synchroflex
|
T2/5/950
565
|
Tooth
Belt
|
|
SR-20054
|
Synchroflex
|
T2/220/
366
|
Tooth
Belt
|
|
SR-20055
|
Synchroflex
|
T2/320/571
|
Tooth
Belt
|
|
SR-20056
|
Synchroflex
|
T2/360/664
|
Tooth
Belt
|
|
SR-20057
|
Synchroflex
|
T2/360/360
|
Tooth
Belt
|
|
SR-20058
|
Synchroflex
|
SBVM
144 1/4
|
Teflon
Valve
|
|
SR-20059
|
SemiTool
|
A185-60-25--0515
|
8"
Rotor
|
|
SR-20060
|
SemiTool
|
PA
91-45-25-0415
|
6"
Rotor
|
|
SR-20061
|
SemiTool
|
PA97-25-2615
|
8"
Rotor
|
|
SR-20062
|
SemiTool
|
A189-30--09-515
|
4"
Rotor
|
|
SR-20063
|
SemiTool
|
A
90 -09
|
6"
Rotor
|
|
SR-20064
|
SemiTool
|
PA97-25-2615
|
8"
Rotor
|
|
SR-20065
|
Verteq
|
ST600-62T
parts tools
|
6"
parts
|
Various Semiconductor Equipment Parts
Please call or send inquiry to info@semiconweb.net.
If interested in one or more items, you may also click here.
Note: All products are subject to availability at time and date of inquiry.
| Item
| OEM Part No.
| Comments/Application
| Description
| Qty Available
|
| 1
| 0000-40210
| See 45200849-1
| 2-Valve Assy, 3 Fem
| 12
|
| 2
| 0000-40310
| See 6LVD1V222P
| 2-Valve Assy, 2-1/4
| 12
|
| 3
| 0000-40400
| |
Nupro Valve, 1/4" VCR
| 4
|
| 4
| 0000-40413
| |
Nupro Valve, 1/4" Mal
| 3
|
| 5
| 00021-39519A
| |
Arm, 300mm
| 1
|
| 6
| 00021-77971P1
| P1
| Threaded Stud
| 52
|
| 7
| 0010-10036
| 200mm
| Susceptor, 8", Screw
| 6
|
| 8
| 0010-00764K
| 150mm
| Blade Assy, 150mm
| 1
|
| 9
| 0010-09914
| |
Nitride/Oxide Assy
| 1
|
| 10
| 0010-09125
| |
Head Assy & Nitride/
| 5
|
| 11
| 0010-09171
| |
Susceptor, Screwless
| 4
|
| 12
| 0010-09463
| |
Susceptor Assy
| 1
|
| 13
| 0010-09495
| P5000
| Assy, Cover Top Etch
| 3
|
| 14
| 0010-10036
| 200mm
| Susceptor, TEOS 20...
| 11
|
| 15
| 0010-10200B
| |
Pedestal, 200mm
| 3
|
| 16
| 0010-10202
| 200mm
| ESC Chuck, 200mm
| 4
|
| 17
| 0010-10327B
| |
ESC, Etch, 200mm
| 4
|
| 18
| 0010-10615
| |
Pedestal Assy, 200mm
| 1
|
| 19
| 0010-14082
| 7700
| 7700 Gas Ring, new
| 2
|
| 20
| 0010-20129
| 5200
| Blade, 6" Test
| 1
|
| 21
| 0010-35282
| |
Oxide Bulb Assy Syl...
| 90
|
| 22
| 0010-38084
| |
Pedestal, 200mm
| 2
|
| 23
| 0010-60004
| 150mm
| Susceptor, 6" Silane
| 2
|
| 24
| 0010-76003
| 5000
| Blade Assy, 5" Phas..
| 1
|
| 25
| 0010-76023
| 5000
| Blade, 200mm ST..
| 4
|
| 26
| 0010-77168A
| |
Assy, Slurry Dispersion
| 3
|
| 27
| 0015-00371P1
| |
Bracket, Mtg, Alum
| 30
|
| 28
| 0015-09094
| |
Gear, Pin Hub
| 12
|
| 29
| 0015-77040
| |
Clamp, Spindle
| 1
|
| 30
| 0020-78091C
| |
Ring, Plastic
| 1
|
| 31
| 0020-00149
| |
Quartz Tube Suppl...
| 1
|
| 32
| 0020-00330
| |
Ring, Single
| 1
|
| 33
| 0020-00713
| |
Insulator, Clamp Ring, ...
| 2
|
| 34
| 0020-00927
| |
Bracket, Mtg
| 7
|
| 35
| 0020-00969
| |
Clamp Ring, Vespel
| 1
|
| 36
| 0020-01324-01
| |
Bottom Reflector
| 1
|
| 37
| 0020-03413B
| |
Insert, 150mm Oxide
| 2
|
| 38
| 0020-03421
| |
Gear, Pin Hub
| 0
|
| 39
| 0020-03435
| |
Pedestal, 150mm E...
| 1
|
| 40
| 0020-03438
| |
Clamp Ring, Quartz
| 5
|
| 41
| 0020-03586
| |
Alum Ring Anodized
| 70
|
| 42
| 0020-03655
| |
Clamp Ring, 150mm, Vespel...
| 1
|
| 43
| 0020-03656B
| |
VMI Screw, Vespel...
| 400
|
| 44
| 0020-03692E
| |
Clamp Ring, 150mm, Vespel...
| 4
|
| 45
| 0020-04076
| |
Gas Distribution Plate
| 1
|
| 46
| 0020-05048P1
| |
Plate, Gas Distribution
| 4
|
| 47
| 0020-05317
| |
Ring
| 2
|
| 48
| 0020-05335P2
| |
Cap Pyrometer Raid...
| 58
|
| 49
| 0020-05586P1
| |
Ring, Clamp Shield
| 3
|
| 50
| 0020-06315C
| |
Window, View Port
| 1
|
| 51
| 0020-06687
| |
Window, View Port
| 1
|
| 52
| 0020-07376
| |
Arm, Robot
| 4
|
| 53
| 0020-08511
| |
Disk, Al 6061 5.312...
| 3
|
| 54
| 0020-09040
| |
Block, Alum Black Anodized
| 5
|
| 55
| 0020-09063B1
| |
Ring, Quartz 9.56 O...
| 2
|
| 56
| 0020-09088B
| |
Spacer, Teflon OD...
| 20
|
| 57
| 0020-09136
| |
Hanger, Lamp Module
| 1
|
| 58
| 0020-09158
| |
Cover, Quartz Clear...
| 2
|
| 59
| 0020-09270
| |
Cover, Front
| 8
|
| 60
| 0020-09567
| |
Shield, 200mm Delt...
| 7
|
| 61
| 0020-09626B
| |
Collar, 150mm, Silicon Hayw...
| 2
|
| 62
| 0020-09628X1
| |
Ring, Cylinder Mater...
| 1
|
| 63
| 0020-09674
| |
Window, Heater
| 1
|
| 64
| 0020-09977C
| |
Cover, Quartz
| 1
|
| 65
| 0020-10117C
| |
Shower Head, 8" Sa...
| 3
|
| 66
| 0020-10119
| |
Susceptor
| 2
|
| 67
| 0020-10162
| |
Diffuser, Aluminum...
| 3
|
| 68
| 0020-10189
| |
Plate Connector
| 1
|
| 69
| 0020-10204
| |
Plate, Susceptor
| 2
|
| 70
| 0020-10294
| |
Susceptor, 200mm
| 1
|
| 71
| 0020-10518
| |
Pedestal, Thick 200...
| 1
|
| 72
| 0020-10573
| |
Collimator, Inner WC...
| 1
|
| 73
| 0020-10597
| |
Shower Head, 5", Sa...
| 1
|
| 74
| 0020-10778
| |
Bracket, Aluminum
| 32
|
| 75
| 0020-10811
| |
Ring, Vespel
| 1
|
| 76
| 0020-10943D
| |
Isolator, Teflon 200...
| 1
|
| 77
| 0020-13999A
| |
Arm
| 1
|
| 78
| 0020-14060
| 7700
| Rotation, Inner Race...
| 31
|
| 79
| 0020-14062
| 7700
| Bayonet Collar 7700
| 5
|
| 80
| 0020-14136C
| |
Bellows Assembly A...
| 1
|
| 81
| 0020-14313
| 7800
| Bearing Retainer, Te...
| 6
|
| 82
| 0020-14315
| 7800
| Collar, Front Teflon
| 36
|
| 83
| 0020-14316
| 7800
| Collar, Rear Inject N...
| 40
|
| 84
| 0020-16454PA
| |
Standoff, 1/2-13 x 10...
| 21
|
| 85
| 0020-17041
| 7800
| Rotation, Inner Race...
| 24
|
| 86
| 0020-17042
| 7700
| Rotation, Outer Race
| 20
|
| 87
| 0020-22123D
| |
SST Screen, 3.0 x 5.0
| 83
|
| 88
| 0020-25745CA
| |
Block, Graphite
| 1
|
| 89
| 0020-30320
| |
Focus Ring, 100mm, Lexan,...
| 1
|
| 90
| 0020-30322
| |
Focus Ring, 150mm, Lexan,...
| 2
|
| 91
| 0020-30595C
| |
Ring
| 1
|
| 92
| 0020-30701A
| |
Insert, Etch
| 3
|
| 93
| 0020-31305
| |
Ring, SST
| 2
|
| 94
| 0020-31740A
| |
Screw, Vespel, 6-32...
| 100
|
| 95
| 0020-32036B
| |
Perforated Plate, 150mm
| 2
|
| 96
| 0020-33937
| |
Clamp, Vespel
| 1
|
| 97
| 0020-38059A
| |
Insulator
| 1
|
| 98
| 0021-10901
| 5200
| Clamp Ring, 200 M...
| 3
|
| 99
| 0021-12878
| |
Blade, Robot 300mm
| 1
|
| 100
| 0021-36205A
| |
Edge Isolator, 150mm, TXZ
| 5
|
| 101
| 0021-77652P1
| |
Seal/Gasket
| 15
|
| 102
| 0021-77971P1
| |
Threaded Stud
| 52
|
| 103
| 0040-04976P2
| |
Ring, SST/Ceramic...
| 1
|
| 104
| 0040-09263
| 5000
| Shower Head, WCVD
| 80
|
| 105
| 0040-14085
| 7700
| 7700 Exhaust Cup...
| 5
|
| 106
| 0040-32200
| |
Feed thru, Cathode...
| 2
|
| 107
| 0040-92981
| |
Shaft, Keyed, 1/4 Dia...
| 2
|
| 108
| 0050-09789A
| |
Valve Assy, 2 Way 1...
| 1
|
| 109
| 0050-14029B
| 7700
| 3/8 Tube Water Line...
| 4
|
| 110
| 0050-14060
| 7700
| 7700 Rotation Inner....
| 5
|
| 111
| 0050-17000
| 7800
| Lower Atmospheric...
| 4
|
| 112
| 0050-27684
| |
Tube Assy, Bellows...
| 2
|
| 113
| 0050-37384
| |
Weldment, 2 Veriflo...
| 2
|
| 114
| 0050-37400P1
| See 43900801EX
| Valve Assy, 3, 1/...
| 10
|
| 115
| 0050-39049
| |
Tube Assy, KF40
| 10
|
| 115
| 0050-39051P1
| |
Weldment, 1.0 Dia
| 20
|
| 117
| 0050-76063
| |
Exhaust Line CH D,...
| 15
|
| 118
| 0090-09276P1
| |
Electrostatic Chuck...
| 1
|
| 119
| 0190-13221
| |
Bearing, 4-Pt Radial...
| 7
|
| 120
| 0190-21757A
| |
MFC STEC 20 Sccm...
| 2
|
If interested, please click here.
Semiconductor Equipment: Varian Equipment Parts List
| Item
| Part Number
| Description
| Qty
|
| 1
| 112234001
| Accel PS Driver Assy
| 1
|
| 2
| X470518401
| Process Interface
| 1
|
| 3
| 0471679601
| 12KW Gen 2
| 1
|
| 4
| X40501005
| HV-PS MDL PS 1250
| 2
|
| 5
| 3131045X
| Cryostack-8 Pump
| 1
|
| 6
| 4040032
| Assy Spellman 180KV 1.25MA
| 2
|
| 7
| 4034009
| Assy Spellman 25KVDC, 5 MA
| 1
|
| 8
| XF0746001
| 180KV Glassman PS
| 1
|
| 9
| 685120
| Etching Ring Power Supply
| 1
|
| 10
| E11001061 Rev 3
| Ion Implant Systems
| 1
|
| 11
| 674018
| Cassette Motor Control
| 1
|
| 12
| |
Deposition Bias Power Supply
| 1
|
| 13
| |
Auxiliary Interface Chassis
| 1
|
| 14
| |
DELTEC Uninterruptible P/Sys
| 1
|
| 15
| 0470574901
| Assy Aux Cont
| 2
|
| 16
| 0068599600
| Htr Assy SST 5"
| 1
|
| 17
| 0068505900
| 3" Etch Hd Assy
| 2
|
| 18
| 0068092401
| L8-004
| 2
|
| 19
| 0066631500
| Phase & Mag Det
| 1
|
| 20
| 1730099
| Axis Cont/Amp C
| 1
|
| 21
| 0471875303
| Kit, Pnl M
| 1
|
| 22
| 4040038
| Assy Del 160KV/50KV
| 1
|
| 23
| 112241001
| Accel PS B1 Fdbk Res
| 2
|
| 24
| 1730099
| Axis Control Module
| 1
|
| 25
| 0068363002
| Match Network RF Bias
| 1
|
| 26
| 104702001
| Flip Amp AC Cont
| 1
|
| 27
| E20000019
| Carrol 8001-4194-02
| 1
|
| 28
| 112239001
| Accel P/S RF XFM
| 1
|
| 29
| 104702001
| |
1
|
| 30
| 94021872H
| Suppression P/S
| 1
|
| 31
| 3816390949
| Unit In/Out Brd Assy
| 1
|
| 32
| 101565001
| PCB COMM REV C
| 1
|
| 33
| 101565004
| PCB COMM REV C
| 1
|
| 34
| 0002100045
| PCB MC-31010A
| 1
|
| 35
| 101684001
| PCB ASSY LL CONVERT
| 1
|
Other Parts
| Item
| Model
| Description
| Qty
|
| 1
| PM-326
| Dionex Plasma Processing Controller
| 1
|
| 2
| 3200 AMT
| ENI Power Supply
| 1
|
| 3
| PM-326
| Dionex Plasma Processing Controller
| 1
|
| 4
| 7003
| Harris Digital Communications Test Set
| 1
|
| 5
| 4-Axis Controller Ver 1.54D
| SA Nova Controller
| 2
|
| 5
| 02-10123-00 (S/N)
| WCVD Temp/Press Controller Rev C
| 1
|
R&D Semiconductor Equipment . . . For Sale!!!
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool
| 208V/15A
| 67W X 59D X 103H
|
If interested in one or more items, please click here.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
Please contact us at:
OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
E-mail: info@semiconweb.net
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Semiconductor Equipment Resource Center
Copyright ©1999 OLM Enterprises
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