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Wafer Fab Equipment for Sale

New Arrivals

• Trilennium, Model 3203, Mfg: Solid State Equipment Corporation
  • Application: Etch and Cleaning, Excellent Condition

• Ozone Generator, SGA11: Ozone/Oxygen Systems, Brand New Condition
  • The SGA Series Ozone/Oxygen Systems are the most powerful and compact ozone systems in their class. Each combines a high concentration, air-cooled ozone generator with an onboard oxygen concentrator in an attractive, compact, wall-mounted stainless steel housing.

• Matrix 105
• Fusion 150PC, 4 Inch
• SVG 88 Coater, Dual Track, 4 Inch
• SVG 88 Scrubber, Dual Track, 4 Inch
• SVG 88 Developer, Dual Track, 4 Inch
• SVG 86 Coater/DeveloperTrack, 4 Inch
• SVG 81 Developer, Dual Track, 4 Inch
• SVG 81 Polyamid Scrubber, Dual Track, 4 Inch
• Semix SOG 6123, Four Inch
• Gasonics, AE 1000, Four to Six Inch
• Blue M Oven
• B&G Decapsulator, Model 250
• Edwards Dry Pump, IQDP 40
• Rudolph Auto El III Ellipsometer
• DNS 612 Spray Etcher
• Nanometrics, AFT 181
• Hitachi, SEM-6200
• Semitool, SAT 2080

DNS Tract Systems

• SKW-80A-AVPE, 3 Developer, 6 Inch
• SKW-80A-AVPE, 2 Coater, 6 Inch
• SKW-80A-AVPE, 2 Developer and 2 Coater, 6 Inch

TEL Track Systems

• Mark 5, 2 DIP Developer and 2 Coater, 5 Inch
• Mark 5, 1 Coater, 5 Inch

Ion Implanter

• GSD80, 6 Inch

If interested,   please click here.  Please include reference.

Reference: 1922201911104

Refurbished Semiconductor Equipment, SEM, Scanning Electron Microscopes, KLA Measurement Systems, Etc.

• Hitachi S-2700 Lab 6 SEM
• Hitachi S-806C FE-SEM with EDS system (Oxford X-Ray) and infrared chamberscope, very good condition, 8 inch wafer capable
• Hitachi S-6000 CD-SEM, with new proprietory PC and software
• Hitachi S-8640 CD-SEM for R-W head and mask reticle inspection, High throughput
• Hitachi S-8820 CD-SEM
• Hitachi S-4500 FE-SEM
• Hitachi S-6280 CD-SEM
• Hitachi S-570 SEM with LAB6 source
• SEMTRONIX 791 RIE with 6 process gases, can be used for delayering 12 inch wafers or any wafer size & package
• KLA 5000 CD-SEM measurement system
• KLA 5107 Overlay inspection system
• KLA 5100 Overlay inspection system
• KLA 2131E Defect inspection system
• MICRION 9800 Focused Ion Beam FOR 8 inch wafer, good for cross section in micro area, $200,000.00
• Perkin-Elmer 660 Auger Electron Microscopy, like new
• ALESSI 2100 probe station
• LEITZ Ergoplan 200 Laser microscope, auto focus
• JEOL JSM-ICA848A SEM wafer inspection system
• JEOL FIB 500 Focused Ion Beam Milling System
• JEOL 100CX TEM
• JEOL 840 Field Emission SEM
• JEOL 5600 SEM
• JEOL 1010 TEM
• JEOL 6340 Field Emission SEM + Noran Voyager X-Ray
• JEOL 4000 EX TEM 400 kv
• JEOL 200 CX TEM 200 kv
• JEOL 1200 EX TEM 120 kv
• JEOL FX-90Q NMR + Tecmag
• JEOL T330 SEM
• FEI 300 Focus Ion Beam
• PHI 600 Scanning Auger with PC upgrade
• PHI 670 Hres Scanning Auger system
• PHI 5200 XPS System Based on PHI 10-360 SCA
• PHI 660 Scanning AES system with PC Upgrade
• MRC Summit Inline Sputtering System
• 3500 SIMSII Dynamic SIMS, includes 06-600 Spherical SIMS Energy analyzer, 1-255AMU RF generator, 16mm Quadrupole, 32-055 SIMS controller, 32-600 Quadrupole control, 02 leak valve, 1120 amplifier discriminator, all cables and manuals
• VG 310 XPS, AES
• ISI 193 Mcrostep stepper, 193 nm with spare Cymer Laser
• Dynatex DX III Scriber, Windows Operating System
• LEEDS 10-180 & 11-020 controller. This unit has been used only once, and has been stored under vacuum
• Semitool 860D Spin-Rinse-Dryer
• Semitool 870D Spin-Rinse-Dryer
• EDAX EX-4 EDS system for conventional SEM

If interested in any item above, please click here.

Note: All products are subject to availability at time and date of inquiry.

Surfscan SP1-TBI Wafer Analysis System, Vintage 08-2001, Unused, & includes the following:

• Normal illumination 0.079 um defect sensitivity
• 0.005 ppm haze sensitivity
• Argon ion laser 488 nm
• RTDC
• Measurement chamber with ULPA filter and blower
• Operator interface integrated into the measurement module
• Microsoft Windows NT4.0 operating system
• Security logging & native networking as provided by Windows NT
• Interactive pointing device and keypad controls
• TFT flat panel display
• Parallel printer port
• Defect map and histogram with zoom
• Microview measurement capability
• Iomega 1 GB removable Jaz drive
• Operations manual, clean room
• Book on board softcopy of SP1 operations manual

Features
• SP1-TBI normal and oblique illumination 0.060um defect sensitivity using oblique illumination normal narrow, oblique wide

• 300/200 mm puck handling system

• Six 200 mm extended handling modules
• Dual end effector robotic handler with wafer position feedback sensors
• Two fixed cassette and four rotating cassette stations
• Clear side panels for wafer environmental protection
• Cassette size recognition

• Four 300mm wide handling module
• Dual end effector robotic handler with wafer position feedback sensors
• Random access send and receive units
• Two fixed cassette and two rotating cassette stations with kinematic coupling for 300 mm and H-Bar for 200 mm
• Clear side panels for wafer environmental protection
• Cassette size recognition

Options
• ULPA filter and blower for wide module (3) 300mm (4) 200mm or (6) 200mm bright field collection channel based on the Normarski DIC technique
• X-Y option

Cal Curves and Absolute Contamination 300mm
• ABS contamination, ACS12-0.155C Duke TR
• ABS contamination, ACS12-0.204DC Duke TR

System Configuration

Oblique-Incidence Beam

• 70 degree incidence optical train w/ mounts, lenses,etc.
• Polarization Control:
  • S,P, or C incident polarization on illumination path
  • U,P, or S collection polarization on both DW and DN
• Users-selectable apertures above DW collector (approximates 6420, etc.)
• Collector is notched to allow oblique beam to pass underneath
• BPS (Beam Position System) optics
• 0.060 um in HS mode; 0.080 um in HT mode on Bare Si
• 0.15 um on smooth dielectrics, smooth metals
• 0.2-0.3 um on rough metals

• Station #1 - 200 and 300 mm
• Staion #2 - Only 13 Foup
• Station #3 - 200 and 300 mm

If you don't find the product you came for, we set up another communications vehicle so you can place the product you want to buy or want to sell thru our "Classified Ads Section".  We believe this worldwide advertising for FREE or Extended can help our valued visitors get what they want. Please click on the following link.

However, if you are interested to advertise with a whole page like this, or part of it in plain text, table or list formats, button or banner ads, please click here  for more information.

Note: For link exchange, please email us the location of our link in you website and your code for our website. We will send you the location where your link will be.

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OLM Enterprises
Semiconductor Equipment Resource Center

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Copyright ©1999 OLM Enterprises

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