Used and Refurbished Semiconductor Equipment: GSD-200E & GSD-200EE Ion Implanters, Furnaces, Novellus, Lam, Varian Systems and Parts, Etc.
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Novellus Concept One, Lam 4520i, KLA-Tencor Surfscan SP1, Axcelis-Eaton Ion Implanters GSD-200E and GSD-200EE, Varian 3190 Configurations and Equipment List
Please click on the links below to explore Systems configurations and other equipment for sale.
- Novellus, Concept One, #734 System
- Novellus, Concept One, #770 System
- Novellus, Concept One, #852 System
- Lam 4520i, ER
- KLA-Tencor Surfscan, Model SP1, ER
- Axcelis-Eaton, GSD-200EE, ER
- Axcelis-Eaton, GSD-200E, MS
- Varian Sputtering System, 5 Inch 3190
- Significant Parts for Semiconductor Equipment
- Significant Parts for Semiconductor Equipment #2
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- Used Vertical Furnace, TEL LPCVD System, 6 & 8 Inch
- Used Kokusai Vertical Furnace System, 8 Inch
- Hewlett Packard Tester IV HP-4071
- Surplus Semiconductor Equipment
- Other Equipment:
- Eaton Nova Ion Implanter, NV-10-160, 4 Inch
- Eaton/Axcelis GSD-200, Eight Inch, High Current Ion Implant System, S/N 080280
- Eaton NV8250P, 6 Inch, Medium Current Ion Implanter
- Varian Ion Implanter, 8 Inch, High Energy Ion Implantation System, Model: G1510
- Automatic Resistivity Meter
- Diamond Blades by Disco Abrasive Company for Sale
- 4 Inch Semiconductor Equipment for Sale
- Rotary Polishing Wheel
| Item
| Equipment/Description
| Model/Serial No.
| Manufacturer
| Comments
|
| 1
| Vertical Furnace, LPCVD System, 6 and 8 Inches
| Alpa 8SE-C, M00009860061
| TEL
| Used for Poly deposition process. One and a half year usage. Supplied by Tokyo Electron Ltd. Equipment is in crate. Some spare parts included.
|
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| Item
| Equipment/Description
| Model/Serial No.
| Manufacturer
| Comments
|
| 1
| Kokusai Vertical Furnace System, 8 Inch
| Vertron DJ-803V
| Kokusai
| Used for Nitride, Poly, and Teos processes. One large crate of spare parts is available. To be sold "As-Is", "Where-Is".
|
Submit reasonable offers for immediate consideration.
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Note: 0.3 micron technology, 17 to 21 photoresist levels, 150mm wafers.
| Item
| Equipment/Description
| Model/Serial No.
| Manufacturer
| Comments
|
| 1
| Tester
| TESTER IV HP-4071
| Hewlett-Packard, HP
| System includes: 3458A voltmeter, software, programmable power supply, LCR, capacitance meter 4284, HP handler and HP computer.
|
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Surplus or Excess Semiconductor Equipment
- 1 Ea - Dynatech Laboratories Immunoassay System with Microplate Reader, and Incubator Stacker
- Hitachi Model S-570 Scanning Electron Microscope
- Model Access 60 75 W CO2 /5 mW HeNe Laser
- Instrumentation Laboratories Model 661-10 Chemistry Analyzer
- Lumiscan Model 150 Lumiscan
- Perking-Elmer Model Lambda 31 UV/VIS Spectrophotometer
- Spectra-Physica Model 270 Laser Exciter
- Spectra-Physics Model SP4270 Integrator
- Tektronix Model 1480R WaveForm Monitor
- Tektronix Model 528 WaveForm Monitor
- Tektronix Model 1420 NTSC VectroScope
- UniLase Code # 2100 CO2 Laser
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Note: All equipment are subject to availability at time and date of inquiry
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I. Wet Bench . . . Totally New
II. Fluoroware Cassetes with Carriers for 6 Inches Wafers, Model E160
- Material . . . STAT-PRO 175 (polipropylene and carbon).
- .5 degrees wafer tilt from vertical reduces wafer movement and avoids particle generation.
- Capacity for 25 wafers and stackable.
- Quantity available . . . 3,000 cassetes with carriers.
- Fluoroware carrier for 25 wafers, Model KA 182
- Polieterketone (PEK) material
- Made of dissipative blend made of polyetherketone and carbon fiber
III. Nitrogen and Oxygen Purifying System Manufactured by SAES Getters
System includes:
- One OPAL S-26 cabin. Inside it, the following equipment are included:
- Oxygen Mega Torr Purifier, Model PS6MG15-O-S26
- Nitrogen Mega Torr Purifier, Model PS8-MG1500-N-S26
- PCDAS & Fixed Analytical Rack
- Mobile Analytical Cart
- Carrier HVAC Mod. 50SS060
The OPAL S-26 cabin includes air conditioning system, Carrier model 50SS060 for facilitating the proper functioning of the control equipment and gas analyzers.
The system also includes AMETEK oxygen analyzers, humidity 5900UHP and particle as well as condensation nucleus counter MET-ONE, in a portable cart for analyzing nitrogen as well as the humidity and particles ina fixed rack.
At this cabin, the purifiers PS6-MG15-O-S26 for oxygen and PS8-MG1500-N-S26 for nitrogen are mounted.
It also has PCDAS for data retrieval. The OPAL has the necessary installation ports or adapters for working once connecting the required services as nitrogen, oxygen, power, air, water and hydrogen and is capable to purify Nitrogen and Oxygen simultaneously.
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Note: All Products: Subject to availability at time and date of inquiry.
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| Item
| Equipment/Description
| Model/Vintage
| Manufacturer
| Comments
|
| 1
| High Current Ion Implanter
| NV-10-160, 1993
| EATON
| Configured for 4 inch wafers. Very good working condition. Equiped with automatic loading system -AT-4. Purchased new in 1993, installed in 1994 by EATON's technical group.
|
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Configuration
- Configured for 200 mm wafers
- Manufactured Date:May, 1996
- CE Marked System
- Interface:
- Sun Spac V computer
- MTI floppy and backup drive
- Sun service monitor
- Software version 4.4.2.1
- SECS I/O interface
- Programmable tilt angle: -10 to +10
- Dose range: 1.0 E11 to 1.0 E17 ions/cm squared
- Energy range: 10 to 180 keV
- ASYST wafer handler
- 4 cassette stages
- Extra sources: Enhanced without vaporizer
- Macrobot, s/n 95497
- Oil-filled transformer
- Auxiliary equipment:
- Chiller: Neslab, s/n C95128144
- Pumps:
- Ebara 40x20 tur backup, s/n 956274
- Ebara 40x20 end station pump, s/n 156270
- Seiko H2000C turbo, s/n 0274R
- CTI CT8 beamline, s/n 32C8916481
- CTI CT10 end station, s/n 1389406376
- Cryo compressors:
- CTI 8300, s/n 85C0006349
- CTI 8500, s/n 68B9608751
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Note: Subject to availability at time and date of inquiry.
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Vital Information and Configuration:
- Purchased 10/25/1998
- Configured for 6 inch wafers
- Sun Sparc 5 Operating System
- Software version 3.5.2i
- 8 mm tape backup
- Extended life source (VLS)
- Remote monitor
- Miscellaneous parts of $100,000 spare parts kit remaining
- 2 extra sources, approx $40,000 each
- Seiko-Seiki turbos:
- 2 with STP 100C controller
- 1 STP 300C
- Up to 750 keV with triple charge
- 4x SDS gas box (subatmospheric delivery system)
- Edwards DP40 W/ 350 blower for end station/load lock
- 3 CTA on-board cryos
- 2 Edwards DP40's for chamber
- Neslab chiller
- ESC chuck
- Power conditioning/isolation transformer
- Front End:
- 3 load cassettes
- Flat finder
- Buffer cassette
- Macrobot robot (standard)
- Programmable flat orient (27.5 deg default)
- Wafer rotation
- Programmable auto tilt, 0 to 89 degrees
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Configuration
- Year of Installation: 1996
- 200MM Batch
- 9 Site Disk
- 180 Wafers per Hour
- 40 Kev to 3 Mev Energy Range
- EBARA 40X20 Backing Pumps
- Seiko-Seiki STP-H2000C and Varian XXX Turbo Pumps
- CTI Cryo pumps
- Up to 35 Degree Implant Angle
- Touch Screen User Interface
- (1) Triple Charge Implant
- 1 Million Volts
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Note: All Products: Subject to availability at time and date of inquiry.
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| Item
| Equipment/Description
| Model/Vintage
| Manufacturer
| Comments
|
| 1
| Automatic Resistivity Meter
| FPP 5000 (4 Point Probe)
| MILLER DESIGN & EQUIPMENT
| Very good condition. Includes stardards (control wafers) for sheet resistivity, slice resistivity and metal thickness.
|
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Type of blades:
- NBC - ZB - 204J 50.2 X 0.020 X 40 mm 79 pcs
- NBC - Z - 1060 50.4 X 0.025 X 40 mm 429 pcs
- NBC - Z - 1060 50.6 X 0.030 X 40 mm 399 pcs
- NBC - Z - 1060 50.2 X 0.020 X 40 mm 379 pcs
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Equipment List
Front End
1. 4 Inch Coaters/Developers
- EATON 6000XL
- Vintage: 1991
- 5 Units, Good Working Condition
- 3-Track System
- Track 1: Indexer, coating spinner - hot plate - hot (cool) plate-indexer
- Track 2: Indexer, hot plate-hot(cool) plate-indexer
- Track 3: Indexer, developing spinner - hot plate - hot(cool) plate-indexer
2. 4 Inch Developer System
- MILTIFAB
- Vintage: 1992
- With arm robots and hot platees
- 2 Units
- Very Good Working Condition
3. 4 Inch Wafer Steppers
- GCA, Mann 6100
- G-line, 5:1 reduction, Maximus 1000
- Equiped with climatic chambers
- 2 Units
- Very Good Condition
4. 4 Inch Wafer Steppers
- GCA, Mann 6300
- G-line, 5:1 reduction, Maximus 1000
- Equiped with climatic chambers
- 7 Units
- Very Good Condition
5. 4 Inch Magnetron Sputtering System
- Varian 3190
- Vintage: 1990
- Refurbished in year 2000 in USA
6. Magnetron Sputtering System
- Leybold-Heraeus Z-650
- Vintage: 1992
- Very Good Condition
7. Magnetron Sputtering System
- BALZERS, BAK 450
- Vintage: 1988
- Very Good Working Condition
8. Ion Implanters
- ULVAC IM-2000MH (License DF-4-Varian)
- Vintage: 1988
- Very Good Working Condition
- 2 Units + 2 Units for Spares
9. Plasma Etchers, 6 Units
- ALCATEL, GIR 220
- Vintage: 1988
- 2 Units for Si3N4/Poly-Si, 2 Units for Oxide, and 2 Units for Metal
- Good Condition
10. Plasma Etchers
- Applied Materials 8120
- Applied Materials 8130
- Vintage: Both 1989
- Both are in working condition
11. 4 Inch CVD Reactors
- ASM-mPCVD 210
- RH, 4 Tubes (Si3N4, Poly-Si, LTO, PSG)
- Vintage: 1989
- Very Good Condition
12. Diffusion Furnaces
- ASM 210
- RH, 4 Tubes
- Soft Contact Loading
- MFC Gas Flow System
- Vintage: 1989
- 4 Units Available
13. Laser Marking System
- LASERMARK LUMONICS 345
- Vintage: 1990
- Good Condition
Back End
1. Molding Presses
- ASM-FICO-100
- Vintage: 1990
- 2 Units, Very Good Condition
2. Trim and Form Presses
- ASM-FICO-TFX-2A
- Vintage: 1990
- 2 Units, Very Good Condition
3. Dicing Saw
- DISCO DFD 3D08
- Vintage: 1988
- 1 Unit + 1 Unit for Spares
4. Wire Bonder
- ASM AB 308A
- Vintage: 1990
- Good Condition
- 1 Unit
5. Wire Bonder
- K&S 1470-3
- Refurbished in 2001 by LUNA TECH (USA)
- Very Good Condition
6. Automatic Wire Bonder
- KAIJO DENKI 1435A, w/ automatic transport for 16, 24, 28, and 40 pin lead-frames
- Vintage: 1988
- 2 Units, Very Good Condition
7. Automatic Wire Bonder
- SHINKAWA SWB FA UTC-5, w/ automatic transport for 16, 28, and 40 pin lead-frames
- Vintage: 1988
- 2 Units, Very Good Condition
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Mounted Felt Polishing Wheel
- 3M Satin Finishing Material
- Stainless steel material for 3/32" shank and related parts
- Specifications:
- 7/8 X 3/8 X 3/32
- 7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
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Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
E-mail: info@semiconweb.net
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