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Used Semiconductor Equipment, Vacuum Systems, Pumps, Etc: fl01

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02a

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Semiconductor Back End Equipment, Etc: fl04

Helium Leak Detectors, Rebuilt: fl05

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8 Inch Semiconductor Equipment: fl17

Helium Leak Detectors & Vacuum Pumps: fl18

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Parts for Novellus, Concept One & Two, Wafer Fab Equipment, fl20

Leybold Helium Leak Detectors, Converters, Turbo Pumps, Etc.fl21

Various Helium Leak Detectors, Converters and Vacuum Pumps, Etc.fl22

6 Inch Wafer Fab Equipment, Back End Semiconductor Equipment, Etc, fl23

Back End Semiconductor Equipment, 6 Inch Wafer Fab Equipment, Etc, fl24

Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26

Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26a

Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26b

Six Inch (6 Inch) Semiconductor or Wafer Fab Equipment Package, Etc. fl27

Semiconductor Equipment: Ion Implanters, Furnaces, Resistivity Meter, Etc. fl28

Semiconductor Equipment: Kokusai & TEL Furnaces, Ion Implanters, 4 Point Probe, Etc. fl29

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Surplus Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. fl31

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KLA Equipment, Back End & 6 Inch Semiconductor Equipment, Dicing Saws, fl33

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Used or Surplus Six Inch (6") Semiconductor Equipment and Back End Equipment

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Contents


Six Inch (6") Wafer Fab or Semiconductor Equipment

Item Vendor Model Process Type Vintage
1 NISSIN NH-20SR Mid-Current Ion Implanter 1/1/1992
2 NISSIN NH-20SR Mid-Current Ion Implanter 1/1/1993
3 MACTRONLY FV-6 TYPE T-BAWL   1/1/1993
4 TEL VCF-615S FURNACE Anneal (Pre N+, ILD Density, Poly) 1/1/1992
5 TEL VCF-615S FURNACE LPCVD Nitride 1/1/1992
6 TEL VCF-615S FURNACE (POLY) 1/1/1992
7 TEL VCF-615S FURNACE (POLY) 1/1/1992
8 Therma Wave TP-300 Dose Measurement 1/1/1992
9 AG AG 8108 RTA 1/1/1993
10 DNS WSW625 SC-1 Clean (Metal) 1/1/1993
11 DNS WSW625 SC-1 Clean (Metal) 1/1/1992
12 EATON NV-GSD-100 HI-Current Ion Implanter 1/1/1994
13 TEL TEL-615 Pyro-Ox  
14 TEL TEL-615 TEOS  
15 TEL TEL-615 D-POLY  
16 TEL TEL-615 Pyro-Ox  
17 TEL TEL-615 Nitride-1  
18 TEL TEL-615 Poly  
19 KOYO VF-4000 PIX Cure 1/1/92
20 TEL TE-5000 CT, VI Etch  
21 TEL TE-5000 CT, VI Etch  
22 TEL TE-8500 Nitride-l Etch  
23 TEL TE-580L PA Etch 1/1/92
24 Plasma System Corporation DES212-304 AVL Asher 1/1/92
25 MARUWA HOOD   ACT Clean 1/1/92
26 AMAT P5000 Trench Etch 7/1/94
27 TEL TEL-580LC PA Etch 1/1/92
28 TEL TEL-8500 Nitride-l Etch 1/1/94
29 LAM LAM 4520 S/W Oxide Etch ILD SOG/SOG Etch Back 1/1/95
30 TEL TEL-580L PA Etch 1/1/92
31 AMAT P5000 Metal Etch 1/1/93
32 Plasma System Corporation PBM-6200 OVEN 1/1/92
33 TEL TE-5000    
34 LAM LAM 4420   1/1/92
35 TEL Mark II Coater 1/1/1993
36 TEL PIX Developer Coater 1/1/1993
37 KLA KLA-5000 Overlay Inspection 1/1/1994
38 DNS VLM6000-LS Film Thickness Measuring 1/1/1992
39 NANOMETRICS 216S-052 FILM THICKNESS/REFLECT 4/1/1995
40 Hitachi S-6200 Critical Dimension 1/1/1993
41 Koyo Lindberg VF-4000 I/II PIX Cure 1/1/1992
42 Koyo Lindberg VF-4000 I/II PIX Cure 1/1/1992
43 TEL Mark II Coater 1/1/1992
44 TEL Mark II Coater 1/1/1993
45 TEL Mark II Developer 1/1/1993
46 TEL Mark II Developer 1/1/1993
47 KLA KLA-2111B Wafer Defect Inspection System 7/1/1994
48 KLA KLA 2551 Analysis Station 1/1/1994
49 DNS SDM-603-PLS Trench Measuring System 1/1/1992
50 AMAT P-5000 PA OX CVD 1/1/1993
51 AMAT P-5000 PA NIT CVD 1/1/1992
52 CANON APT-4800 ATMOSPHERIC TEOX-OZONE CVD SYSTEM 1/1/1993
53 DNS SC-W80A-AVG SOG Coater  
54 DNS SCW-623-AV SOG Coater 1/1/92
55 AMAT P-5000 IMD PE TEOS CVD 1/1/1992
56 AMAT P-5000 IMD PE TEOS CVD 1/1/1992
57 AMAT P-5000 IMD PE TEOS CVD 7/1/1994
58 AMAT P-5000 WCVD 1/1/1994
59 DNS SSW629-B Single Side Scrubber 1/1/1992
60 DNS SSW629-B Single Side Scrubber 1/1/1992
61 DNS SSW629-B Single Side Scrubber 1/1/1992
62 DNS SSW629-B Single Side Scrubber 1/1/1992
63 DNS SSW629-B Single Side Scrubber 1/1/1992
64 HEWLETT-PACKARD ASIA PACIFIC LIMITED 4062 TSK AUTO PROBING-RT103 1/1/1992

If interested,   please click here.

Note: All Products: Subject to availability at time and date of inquiry.

Contents


HYGT Used or Pre-owned Semiconductor Equipment

Equipment List

Item Manufacturer Model Qty Vintage Description
1 KLA 5015 1 N/A Alignment Registration System
2 SVG 88 1 N/A SVG-88 wafer scrubber
3 N/A 6” Wafer Heater 3 2000 6” Hot Plate
4 N/A 6” Wafer Cooler 2 2000 6” Chill Plate
5 Laurell WS-400-6NPP 2 2000 Photoresist Spin Coater
6 Thermawave TP-320 1 1993 Ion Implant Dose Measurement System
7 Thermawave TP-320 1 1991 Ion Implant Dose Measurement System
8 TEL Mark VZ(3D) 1 1995.11 Developer
9 TEL Mark VZ(1C) 2 1995.01 Coater
10 TEL Mark 8 C/S ARM 8” 4 N/A Mark C/S ARM 8”
11 TEL Mark 8 M/A ARM 8” 6 N/A Mark M/A ARM 8”
12 TEL Mark 8 Coater Cathc Cup 8” 2 N/A Mark 8 Coater Cathc Cup 8”
13 TEL Mark 8 E2 Nozzle 8” 2 N/A Mark 8 E2 Nozzle 8”
14 TEL Mark 8 Mapping Sensor 8” 2 N/A Mark 8 Mapping Sensor 8”
15 Bio Rad QS100 1 1984 FTIR
16 Hong-Su (Taiwan) Quartz Clean Tank 1 1988 Parts Clean Tank
17 JBA LS60-8 1 1993 Aligner
18 Solitec 5110-C 1 1997 Manual Coater
19 Vision Eng’g & Irvine Optical Co. Ultra Station 3.c Model 2 2 1999 Dynascope w/ wafer handling system
20 KDF 643GT 1 1998 Sputter System
21 KSC Japan BPE 1168 1 1999 bump Plating System
22 Nanometrics 2100 1 1997 Microscope
23 Weslan 5PP-36-76-PPM 1 1995 Plating Bench

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If interested in one or more, or all of the items above,   please click here.

Note: All products are subject to availability at time and date of inquiry.

Contents


Back End Semiconductor Equipment and Parts

Equipment List

Item Manufacturer Model Description Age Serial #
1 AMI3100 Parts Spare Parts & Modules for AMI3100A N/A
2 Disco Corporation DFD 2S/8 Dicing Saw, Fully Automatic 12 DR 1135
3 MCT (Aseco Corporation) MCT3608A6 600Mil Test Handler
4 Multitest GMBH & Co. Kg MT9105 TQFP Test Handlers 6
5 Multitest GMBH & Co. Kg MT9105 Spares Handler Spare Parts
6 Symtek Systems, Inc. 7936HC-5 PDIP Test Handler 4256
7 Symtek Systems, Inc. 7192C Burn In Oven w/ 9308 Test Socket 18
8 TOKYO SEIMITSU CO., LTD APM60A Automatic Test Probers 11
9 Exclusive Design Company, Inc. EDC-M400 Substrate Cleaner
10 DISCO CORPORATION DFG83H/6 Wafer Back Grinder 14 GA0396
11 LTX Corporation TS80 Modules LTX77 Modules
12 Buehler (USA) Isomet TM+ Precision Dicing Saw 435-ISP-481
13 TOKYO SEIMITSU CO., LTD APM5000 Semi-Automatic Test Probers
14 TOKYO SEIMITSU CO., LTD APM90A Automatic Test Probers 5 F01045GM
15 DISCO CORPORATION 2H6T Disco Dicing Saw 2H6T 13 DD6637
16 MCT (Aseco Corporation) 506274 MCT2020 Pogo pins spherical head for PEC
17 ESEC Group 2006PI Die Attach Bonder 9 2006726-7-21
18 Sun Microsystems, Inc. GDM1962B 21” Workstation Monitor 4
19 Mitutoyo PJ 300 Profile Projector 170148
20 MCT (Aseco Corporation) 92F9006(ETP28B) MCT2020 Ethernet Super Slim IO base-T transceiver
21 MCT (Aseco Corporation) 116820 MCT2020 Dual Timing Generator Boards
22 MCT (Aseco Corporation) 116325 MCT2020 Functional Sequencer Boards
23 MCT (Aseco Corporation) 116800 MCT2020 AC Parametric Board
24 MCT (Aseco Corporation) 116477 MCT2020 PED Cards
25 MCT (Aseco Corporation) 504529 MCT2020 Blank Disks/MCT Master Disk
26 MCT (Aseco Corporation) 106777/105777 MCT2020 Handle Prober Int’f Bd (HPIB)
27 MCT (Aseco Corporation) 105739 MCT2020 Mother Board Int’f (MBIB)
28 MCT (Aseco Corporation) DGBM MCT2020 MCT Diag. Brd.
29 MCT (Aseco Corporation) Deskew MCT2020 Deskew Boards
30 MCT (Aseco Corporation) MCT2020 Controller Box w/ coax Cable
31 Sun Microsystems Inc. GDM 20D10 21 Inch Workstation Monitor 4
32 Kulicke & Soffa Industries Inc KNS 1488L Turbo Plus Gold Ball Bonder 6 6012
33 MULTITEST GMBH & CO. KG MT9105 Spares Handler Change Kits Various
34 KLA Tencor Surfscan 7700 Pattern Wafer Inspection System 7 0896-811M SFS7700M
35 DISCO CORPORATION 2H6TM Disco Dicing Saw 8 DD9184
36 DISCO CORPORATION 2H6TM Disco Dicing Saw 9 DD9172
37 TOKYO SEIMITSU CO., LTD APM90A Sutomatic Test Prober 4 F01024AN
38 Kulicke & Soffa Industries, Inc. Spares for Model 8060/8020/8028 Various

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If interested in one or more, or all of the items above,   please click here.

Note: All products are subject to availability at time and date of inquiry.

Contents


Six Inch (6”) Used, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Furnaces, EPI Reactors, Vacuum Systems, MSGrp1

Diffusion

Item Equipment Qty Make Model Serial # Description
1 RTP 1 AG Associates 4100 IL8021 (1309) Mfg 1968, robt load, control screen, 2 chillers
2 Diffusion Furnace 1 Bruce/BTU 4 stack, 3 atmos, 1 LPCVD, catiliver load, 7351C controllers, Argo cont Busch pump set, Evans exhaust burnbox
3 Diffusion Furnace 1 Bruce/BTU (0356) 4 stack, 2 stacks operational, 1 alloy, 1 atmos, Schumacher control, Bruce gas control
4 Diffusion Furnace 1 Bruce/BTU (1313) 4 stack, cantiliver load, 7355x controllers, 3 oxidation, 1 LPCVD, Schumacher source control, Bruce 7900 atmos control model 8115 V-CVD for tube #4; Ebara pump set
5 Diffusion Furnace 1 Bruce/BTU (1315) 4 stack, cantiliver load, 7355x controllers, 3 oxidation, 1 LPCVD, 1 Nitride, 3 pump sets, V-CVD & 7900 control, Schumacher source controller
6 Diffusion Furnace 1 Bruce/BTU (1314) 4 stack, 2 atmos, 2 LPCVD, 7355x control, 2 pump sets, V-CVD & 7900 controls, Schumacher source controller
7 Diffusion Furnace 1 Bruce/BTU (0732) 4 stack, 2 stacks operational, 2 atmos, 2 POCL3, cantiliver load, 7351C control, Schumacher source control, w/ pump sets
8 Diffusion Furnace 1 Bruce/BTU (0733) 4 stack, cantiliver load, 7351C control, Argon gas unit
9 Fume Scrubber 2 Delatech 858V2 801-925,801-894 Exhaust gas conditioner with pump

Etch

Item Equipment Qty Make Model Serial # Description
1 Wafer Dryer 2 Yield Up Omega 1000 Alcohol based dryer, 2 stations w/ digital display
2 Etcher 2 AMAT 8310 325801 (1590) & 325802 (1310) Single chamber, loadlock, oxide etch endpoint detector w/ pump set, heat exchanger, controller, chiller
3 Etcher 2 AMAT 8330A (0904) & 383 (1311) Metal etcher, single chamber, loadlock, endpoint, CTI 8200 compressor, heat exchanger, system controller, 2 UPS units, gas panel Ebara A30W pump set, gas trap, remote terminal
4 Etcher 1 LAM 4400 2031 (1330) Poly silicon etch, end point detector, cassette-to-cassette, RF gen, chiller, remote terminal, PC tracking system, Busch CS500 pump stack and Edwards pump set

Lithography

Item Equipment Qty Make Model Serial # Description
1 Inspection Microscope 5 Nikon, Oly, MM 7106089 (0802) 10X eyepiece, & 5, 20, 50, 100X objectives, w/ light
2 Track System 5 SVG 90 Series 5510CAB-19 mfg 95, 5601CAB-02 mfg 96, 9703CAB-01 mfg 97, 9704CAB-01 mfg 97, 9706CAB-07 mfg 97 W/ video display, Asyst smif enclosure/loaders, spin coater, dual sided, 2 coat, 2 vapor prime, 2 chill plates, 3 hot plate modules, w/ robot transfer system
3 Track System 3 SVG 90 Series 5510CAB-20 mfg 95, 5601CAB-03 mfg 96, 9707CAB-01 mfg 97 3 dev, 6 hot plates, 2 chill plate modules, Assyst encl w/ load, dual sided, w/ robot transfer system. (S/N 9707CAB-01 unit in storage, brand new, unsed)
4 Stepper 3 ASM03, ASM04, & ASM05 PAS5000-50 9938 mfg 93, 7586 mfg 96, 6666 mfg 96 Send/receive, 5” reticle, flat, 5 micron, 15 x 15 mm field size, 48 NA laser alignment, w/ control panel (s/n 4232, 3636, 9992 have TEP options)
5 Stepper 1 ASM06 PAS5000-50 9992 mfg 96 P-chuck needs repair for this tool
6 CD System 1 Bio-Rad Q5 Questor Q2804 Auto CD & overlay system, 2 send, auto load, control system
7 CD SEM 1 Opal 7830i PR-146 4 station load in-line, w/ Mitsubishi LP200 video copy processor

Metrology

Item Equipment Qty Make Model Serial # Description
1 Wafer Defect System 1 KLA 26088-RS W2608308 Mfg 1997, send/received, w/ Olm micro., 5 assorted obj., w/ LCD display
2 CV System 1 MDC 541-414 (0353) CSM/2 Semiconductor measure system, CSM PC control, Signatone hot chuck w/ probe station, Booton 72B capacitor meter
3 Film Thickness Measurer 1 Prometrix FT530e w/ PC control & video display
4 Film Thickness Measurer 1 Bio-Rad QS-300 24400 Manual load, w/3420 PC control
5 Film Thickness Measurer 1 Bio-Rad S-100 60690 (0824) digilab, manual load
6 Stress Gauge 1 Ionic System 30058 0038 w/ PC controller
7 Ion Measurer 1 ThermaWave TP200 TP02200-1105 (1266) w/ video display and manual load
8 Ion Measurer 1 ThermaWave TP300 0300-3361 Video terminal unit, manual robot load
9 Ion Analyzer 1 Semi-Diag SPV CMS 4000 8942CMS4010 w/ chuck, heat lamp, PC controller
10 Inspection Microscope 2 B&L Inspection type, w/ stand
11 Wafer Comparator 1 Micro-Vu H-14 3175 14” optical comparator, tabletop
12 Mask Comparator 1 Leitz 177 (0690) 10x eyepiece, 3, 2, 16, 50x objectives, dual station, comparator projector w/ x, y control
13 SEM 1 Jeol IC848A EP13202275 (1327) w/ camera attachment, Sony monitor
14 SEM 1 Hitachi S800 w/ camera attachment, Sony monitor
15 Wet Sink 2 Assorted 3 ft unit w/ digital controls
16 Wet Sink 12 Assorted 4 ft unit w/ digital controls
17 Wet Sink 1 SEC 5 ft unit w/ digital controls
18 Wet Sink 3 Assorted 6 ft unit w/ digital controls
19 Wet Sink 4 Assorted 8 ft unit w/ digital controls
20 Wet Sink 1 SEC 10 ft unit w/ digital controls
21 Wet Sink 1 Bold Tech 1806 6 ft, 2 hot pots, quick dump rinse, enclosed w/ digital controls
22 Ultrasonic Cleaner 1 Semi. Tech 2 ft dual bin, w/ transfer arm
23 Spin Dryer 16 Semitool 270D Double stack, 6” set-up, w/ digital display

Miscellaneous

Item Equipment Qty Make Model Serial # Description
1 Bake Oven 10 VWR 1610/1620 W2608308 table top models, 24” x 24”
2 Wafer Transfer 7 Fortrend Automatic wafer transfer system
3 Vertical Tube Cleaner 1 Polyflow
4 APEX Furnace Controller 1
4 PROMIS Server 1


If interested in one or more, or all of the items above,   please click here.

Note: All products are subject to availability at time and date of inquiry.

Contents


Six Inch (6”) Wafer Fab or Semiconductor Equipment, MSGRP2

Thin Film/Implant

Item Equipment Manufacturer/Model Qty Note
1 H/C Ion Implanter Eaton Nova/NV GSD-80 1
2 Positive Coater AIO (3 track x 1, 2 track x 2) 3 Actually SVG 8600 or 8800 model
3 Positive Developer AIO (3 track x 2, 2 track x 1) 3 Actually SVG 8600 or 8800 model
4 Negative Coater AIO (2 track x 2) 2 Actually SVG 8600 or 8800 model
5 Negative Developer AIO (3 track x 1, 2 track x 2)) 3 Actually SVG 8600 or 8800 model
6 Nitrice/Oxide Etcher LAM 590 1 Pumps not included
7 Plasma Asher Gasonics Aura 1000 5 Pumps not included
8 Plasma Asher BRANSON/IPC 2 Pumps not included
9 Stepper NIKON G3A X 6, G4D X 2 8
10 Positive Batch Developer ULTRA FAB 1
11 Rinser Dryer SEMITOOL 870 Dual 13
12 M/C Ion Implanter Eaton Nova/NV-6200AV 1
13 Horizontal Furnace MRL, EXPOTECH 6
14 Vertical Furnace (Phos Dep) SVG/VTR-7000 2
15 LP-SiN (Vertical) SVG/VTR-7000 1 Pump not included
16 AL Wet Etch Sink ULTRA FAB 1  
17 BOE Sink WPS 2, ULTRA FAB 1 3
18 Diffusion Pre-Clean Sink WPS 3, ULTRA FAB 2 5
19 H2SO4 Strip Sink WPS 2 2
20 HF Etch Sink WPS 1, ULTRA FAB 1 2
21 As Coater Cup Clean Sink 1
22 Tube Clean Sink ULTRA FAB 1
23 Parts Clean Sink 1
24 M/C Ion Implanter Eaton Nova/NV-6200 1
25 EPI Reactor AMAT/AMC-7600 6 Begins NP list, grp2
26 Horizontal Furnace MRL 1, BTU 1 2
27 Back Metal Vacuum Evaporation System CHA 1
28 Rinser Dryer SEMITOOL 5
29 Box Cleaner Atcor CRD-2410 2
30 Surfscan KLA Tencor/Surfscan 4000 1
31 Pointprobe Magne-Tron M700 1
32 Nano Spec Nanometrics 1
33 Microscope NIKON 3
34 Diffusion Pre-Clean Sink ULTRA FAB 1
35 Mega-Sonic Sink FSI 2
36 Back Side Etch Sink WPS 1
37 H2O2 Sink ULTRA FAB 1
38 HF Sink WPS 1
39 Parts Clean Sink Amro Plastic Products 1
40 Bottle Clean Sink 1
41 Automatic Wafer Probing Machine (PCM) Tokyo Seimitsu A-PM-6000A 1 Begins 760K list, grp2
42 Manual Prober Rucker & Kolls Model #660J 1
43 Manual Prober Rucker & Kolls Model #668 1
44 Curve Tracer Tektronix Type 576 1
45 Microscope Olympus BH2 1
46 Oscilloscope Tektronix 60MHz 2215A 1
47 Bake Oven Despatch 1

If interested in one or more, or all of the items above, please click here.

Note: All products are subject to availability at time and date of inquiry.

Contents


Semiconductor Equipment and Major Components

Equipment available for sale

  • Fusion 200PCU POLO UV cure tool (1997, like new)
  • Fusion 200PC UV cure tool, excellent condition
  • Leybold MAG400 turbo pump, NEW
  • ENI generators, calibrated: OEM 12A, OEM650AXL, OEMTR0A, etc.
  • AE RFG Model PDW2200
  • M&W single and dual channel chillers, rebuilt
  • Ebara dry pump, model 65X40, NEW, $13,900.00
  • Drytek mega strip 6, excellent condition
  • Flouroware box washer, model 8010, excellent condition
  • Rucker and Kolls semi auto prober, model 680A
  • Fortrend wafer transfer tool, 6 inch, stainless steel, qty 5

If interested in any or all of the above, please call for details, or please click here. Please specify Reference Code: AM10262L1

Note: All products are subject to availability at time and date of inquiry.

Contents


Rotary Polishing Wheel

Please click on the image below for enlarged photo

Mounted Felt Polishing Wheel

  • 3M Satin Finishing Material
  • Stainless steel material for 3/32” shank and related parts
    • Specifications:
      • 7/8 X 3/8 X 3/32
      • 7/8 X X 3/32

Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.

If interested,   please click here.

Contents


Please contact us at:

OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
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