Six Inch (6") Used, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, MSGrp1, and Back End Equipment
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Thin Film/Implant
| Item
| Equipment
| Qty
| Make
| Model
| Serial #
| Description
|
| 1
| Reactor
| 4
| AMAT
| AMS 2100
| 0740,0207,0742,0208
| Silox reactors, w/ 2 wafer trays, continuous feed, pre, main & post heat
|
| 2
| CVD System
| 1
| AMAT
| P-5000
| 5412 (1625)
| 4 chambers, 2 oxide dep, 1 oxide etch, 1 nitride dep, robot loader, w/ ozonator, TEOS/BPTEOS, ENI power supplies, pump set, mini controller, on board gas panel
|
| 3
| CVD System
| 1
| AMAT
| P-5000 MK II
| 0085
| 4 chambers, 2 CVD, 2 etch, endpoint control, on board gas panel, TEOS/BPTEOS, ENI power supplies, 5 Busch pump sets, chiller
|
| 4
| CVD System
| 1
| AMAT
| P-5000
| 5223 (1312)
| 2 oxide dep, 1 oxide etch, 1 trench etch chamber, ozonator, robot loader, TEOS/BPTEOS, ENI pwr supplies, remote gas panel, pump set, mini controller
|
| 5
| Sputter System
| 1
| MRC
| Star Eclipse
| 1391 (1335)
| 3 sputter chambers, 1 RF etch, Al, Md, TiW, ion gauge control, assorted power supply towers, remote terminal
|
| 6
| Implanter
| 1
| Eaton
| 6200A
| 696 (1316)
| 6" wafer handler, 4.0 software, CTI 8 cryo pump, VHS 6 diff pump, assorted power supply and gas box
|
| 7
| Implanter
| 2
| Varian
| 350D
| 50889 (08330), 50865 (0835)
| 4 diff pump, Hi Cool 6” platen, MP350 dose process, Fab M scan generator. Note: #4 unit has Glassman 180 kev pwr supply and Brookhaven dose processor
|
Diffusion
| Item
| Equipment
| Qty
| Make
| Model
| Serial #
| Description
|
| 1
| RTP
| 1
| AG Associates
| 4100
| IL8021 (1309)
| Mfg 1968, robt load, control screen, 2 chillers
|
| 2
| Diffusion Furnace
| 1
| Bruce/BTU
| |
|
4 stack, 3 atmos, 1 LPCVD, catiliver load, 7351C controllers, Argo cont Busch pump set, Evans exhaust burnbox
|
| 3
| Diffusion Furnace
| 1
| Bruce/BTU
| |
(0356)
| 4 stack, 2 stacks operational, 1 alloy, 1 atmos, Schumacher control, Bruce gas control
|
| 4
| Diffusion Furnace
| 1
| Bruce/BTU
| |
(1313)
| 4 stack, cantiliver load, 7355x controllers, 3 oxidation, 1 LPCVD, Schumacher source control, Bruce 7900 atmos control model 8115 V-CVD for tube #4; Ebara pump set
|
| 5
| Diffusion Furnace
| 1
| Bruce/BTU
| |
(1315)
| 4 stack, cantiliver load, 7355x controllers, 3 oxidation, 1 LPCVD, 1 Nitride, 3 pump sets, V-CVD & 7900 control, Schumacher source controller
|
| 6
| Diffusion Furnace
| 1
| Bruce/BTU
| |
(1314)
| 4 stack, 2 atmos, 2 LPCVD, 7355x control, 2 pump sets, V-CVD & 7900 controls, Schumacher source controller
|
| 7
| Diffusion Furnace
| 1
| Bruce/BTU
| |
(0732)
| 4 stack, 2 stacks operational, 2 atmos, 2 POCL3, cantiliver load, 7351C control, Schumacher source control, w/ pump sets
|
| 8
| Diffusion Furnace
| 1
| Bruce/BTU
| |
(0733)
| 4 stack, cantiliver load, 7351C control, Argon gas unit
|
| 9
| Fume Scrubber
| 2
| Delatech
| 858V2
| 801-925,801-894
| Exhaust gas conditioner with pump
|
Etch
| Item
| Equipment
| Qty
| Make
| Model
| Serial #
| Description
|
| 1
| Wafer Dryer
| 2
| Yield Up
| Omega 1000
| |
Alcohol based dryer, 2 stations w/ digital display
|
| 2
| Etcher
| 2
| AMAT
| 8310
| 325801 (1590) & 325802 (1310)
| Single chamber, loadlock, oxide etch endpoint detector w/ pump set, heat exchanger, controller, chiller
|
| 3
| Etcher
| 2
| AMAT
| 8330A
| (0904) & 383 (1311)
| Metal etcher, single chamber, loadlock, endpoint, CTI 8200 compressor, heat exchanger, system controller, 2 UPS units, gas panel Ebara A30W pump set, gas trap, remote terminal
|
| 4
| Etcher
| 1
| LAM
| 4400
| 2031 (1330)
| Poly silicon etch, end point detector, cassette-to-cassette, RF gen, chiller, remote terminal, PC tracking system, Busch CS500 pump stack and Edwards pump set
|
Lithography
| Item
| Equipment
| Qty
| Make
| Model
| Serial #
| Description
|
| 1
| Inspection Microscope
| 5
| Nikon, Oly, MM
| |
7106089 (0802)
| 10X eyepiece, & 5, 20, 50, 100X objectives, w/ light
|
| 2
| Track System
| 5
| SVG
| 90 Series
| 5510CAB-19 mfg 95, 5601CAB-02 mfg 96, 9703CAB-01 mfg 97, 9704CAB-01 mfg 97, 9706CAB-07 mfg 97
| W/ video display, Asyst smif enclosure/loaders, spin coater, dual sided, 2 coat, 2 vapor prime, 2 chill plates, 3 hot plate modules, w/ robot transfer system
|
| 3
| Track System
| 3
| SVG
| 90 Series
| 5510CAB-20 mfg 95, 5601CAB-03 mfg 96, 9707CAB-01 mfg 97
| 3 dev, 6 hot plates, 2 chill plate modules, Assyst encl w/ load, dual sided, w/ robot transfer system. (S/N 9707CAB-01 unit in storage, brand new, unsed)
|
| 4
| Stepper
| 3
| ASM03, ASM04, & ASM05
| PAS5000-50
| 9938 mfg 93, 7586 mfg 96, 6666 mfg 96
| Send/receive, 5" reticle, flat, 5 micron, 15 x 15 mm field size, 48 NA laser alignment, w/ control panel (s/n 4232, 3636, 9992 have TEP options)
|
| 5
| Stepper
| 1
| ASM06
| PAS5000-50
| 9992 mfg 96
| P-chuck needs repair for this tool
|
| 6
| CD System
| 1
| Bio-Rad
| Q5 Questor
| Q2804
| Auto CD & overlay system, 2 send, auto load, control system
|
| 7
| CD SEM
| 1
| Opal
| 7830i
| PR-146
| 4 station load in-line, w/ Mitsubishi LP200 video copy processor
|
Metrology
| Item
| Equipment
| Qty
| Make
| Model
| Serial #
| Description
|
| 1
| Wafer Defect System
| 1
| KLA
| 26088-RS
| W2608308
| Mfg 1997, send/received, w/ Olm micro., 5 assorted obj., w/ LCD display
|
| 2
| CV System
| 1
| MDC
| |
541-414 (0353)
| CSM/2 Semiconductor measure system, CSM PC control, Signatone hot chuck w/ probe station, Booton 72B capacitor meter
|
| 3
| Film Thickness Measurer
| 1
| Prometrix
| FT530e
| |
w/ PC control & video display
|
| 4
| Film Thickness Measurer
| 1
| Bio-Rad
| QS-300
| 24400
| Manual load, w/3420 PC control
|
| 5
| Film Thickness Measurer
| 1
| Bio-Rad
| S-100
| 60690 (0824)
| digilab, manual load
|
| 6
| Stress Gauge
| 1
| Ionic System
| 30058
| 0038
| w/ PC controller
|
| 7
| Ion Measurer
| 1
| ThermaWave
| TP200
| TP02200-1105 (1266)
| w/ video display and manual load
|
| 8
| Ion Measurer
| 1
| ThermaWave
| TP300
| 0300-3361
| Video terminal unit, manual robot load
|
| 9
| Ion Analyzer
| 1
| Semi-Diag
| SPV CMS 4000
| 8942CMS4010
| w/ chuck, heat lamp, PC controller
|
| 10
| Inspection Microscope
| 2
| B&L
| |
|
Inspection type, w/ stand
|
| 11
| Wafer Comparator
| 1
| Micro-Vu
| H-14
| 3175
| 14" optical comparator, tabletop
|
| 12
| Mask Comparator
| 1
| Leitz
| |
177 (0690)
| 10x eyepiece, 3, 2, 16, 50x objectives, dual station, comparator projector w/ x, y control
|
| 13
| SEM
| 1
| Jeol
| IC848A
| EP13202275 (1327)
| w/ camera attachment, Sony monitor
|
| 14
| SEM
| 1
| Hitachi
| S800
| |
w/ camera attachment, Sony monitor
|
| 15
| Wet Sink
| 2
| Assorted
| |
|
3 ft unit w/ digital controls
|
| 16
| Wet Sink
| 12
| Assorted
| |
|
4 ft unit w/ digital controls
|
| 17
| Wet Sink
| 1
| SEC
| |
|
5 ft unit w/ digital controls
|
| 18
| Wet Sink
| 3
| Assorted
| |
|
6 ft unit w/ digital controls
|
| 19
| Wet Sink
| 4
| Assorted
| |
|
8 ft unit w/ digital controls
|
| 20
| Wet Sink
| 1
| SEC
| |
|
10 ft unit w/ digital controls
|
| 21
| Wet Sink
| 1
| Bold Tech
| |
1806
| 6 ft, 2 hot pots, quick dump rinse, enclosed w/ digital controls
|
| 22
| Ultrasonic Cleaner
| 1
| Semi. Tech
| |
|
2 ft dual bin, w/ transfer arm
|
| 23
| Spin Dryer
| 16
| Semitool
| 270D
| |
Double stack, 6" set-up, w/ digital display
|
Miscellaneous
| Item
| Equipment
| Qty
| Make
| Model
| Serial #
| Description
|
| 1
| Bake Oven
| 10
| VWR
| 1610/1620
| W2608308
| table top models, 24" x 24"
|
| 2
| Wafer Transfer
| 7
| Fortrend
| |
|
Automatic wafer transfer system
|
| 3
| Vertical Tube Cleaner
| 1
| Polyflow
| |
|
|
| 4
| APEX Furnace Controller
| 1
| |
|
|
|
| 4
| PROMIS Server
| 1
| |
|
|
|
If interested in one or more, or all of the items above, please click here.
Thin Film/Implant
| Item
| Equipment
| Manufacturer/Model
| Qty
| Note
|
| 1
| H/C Ion Implanter
| Eaton Nova/NV GSD-80
| 1
| |
| 2
| Positive Coater
| AIO (3 track x 1, 2 track x 2)
| 3
| Actually SVG 8600 or 8800 model
|
| 3
| Positive Developer
| AIO (3 track x 2, 2 track x 1)
| 3
| Actually SVG 8600 or 8800 model
|
| 4
| Negative Coater
| AIO (2 track x 2)
| 2
| Actually SVG 8600 or 8800 model
|
| 5
| Negative Developer
| AIO (3 track x 1, 2 track x 2))
| 3
| Actually SVG 8600 or 8800 model
|
| 6
| Nitrice/Oxide Etcher
| LAM 590
| 1
| Pumps not included
|
| 7
| Plasma Asher
| Gasonics Aura 1000
| 5
| Pumps not included
|
| 8
| Plasma Asher
| BRANSON/IPC
| 2
| Pumps not included
|
| 9
| Stepper
| NIKON G3A X 6, G4D X 2
| 8
| |
| 10
| Positive Batch Developer
| ULTRA FAB
| 1
| |
| 11
| Rinser Dryer
| SEMITOOL 870 Dual
| 13
| |
| 12
| M/C Ion Implanter
| Eaton Nova/NV-6200AV
| 1
| |
| 13
| Horizontal Furnace
| MRL, EXPOTECH
| 6
| |
| 14
| Vertical Furnace (Phos Dep)
| SVG/VTR-7000
| 2
| |
| 15
| LP-SiN (Vertical)
| SVG/VTR-7000
| 1
| Pump not included
|
| 16
| AL Wet Etch Sink
| ULTRA FAB
| 1
| |
| 17
| BOE Sink
| WPS 2, ULTRA FAB 1
| 3
| |
| 18
| Diffusion Pre-Clean Sink
| WPS 3, ULTRA FAB 2
| 5
| |
| 19
| H2SO4 Strip Sink
| WPS 2
| 2
| |
| 20
| HF Etch Sink
| WPS 1, ULTRA FAB 1
| 2
| |
| 21
| As Coater Cup Clean Sink
| |
1
| |
| 22
| Tube Clean Sink
| ULTRA FAB
| 1
| |
| 23
| Parts Clean Sink
| |
1
| |
| 24
| M/C Ion Implanter
| Eaton Nova/NV-6200
| 1
| |
| 25
| EPI Reactor
| AMAT/AMC-7600
| 6
| Begins NP list, grp2
|
| 26
| Horizontal Furnace
| MRL 1, BTU 1
| 2
| |
| 27
| Back Metal Vacuum Evaporation System
| CHA
| 1
| |
| 28
| Rinser Dryer
| SEMITOOL
| 5
| |
| 29
| Box Cleaner
| Atcor CRD-2410
| 2
| |
| 30
| Surfscan
| KLA Tencor/Surfscan 4000
| 1
| |
| 31
| Pointprobe
| Magne-Tron M700
| 1
| |
| 32
| Nano Spec
| Nanometrics
| 1
| |
| 33
| Microscope
| NIKON
| 3
| |
| 34
| Diffusion Pre-Clean Sink
| ULTRA FAB
| 1
| |
| 35
| Mega-Sonic Sink
| FSI
| 2
| |
| 36
| Back Side Etch Sink
| WPS
| 1
| |
| 37
| H2O2 Sink
| ULTRA FAB
| 1
| |
| 38
| HF Sink
| WPS
| 1
| |
| 39
| Parts Clean Sink
| Amro Plastic Products
| 1
| |
| 40
| Bottle Clean Sink
| |
1
| |
| 41
| Automatic Wafer Probing Machine (PCM)
| Tokyo Seimitsu A-PM-6000A
| 1
| Begins 760K list, grp2
|
| 42
| Manual Prober
| Rucker & Kolls Model #660J
| 1
| |
| 43
| Manual Prober
| Rucker & Kolls Model #668
| 1
| |
| 44
| Curve Tracer
| Tektronix Type 576
| 1
| |
| 45
| Microscope
| Olympus BH2
| 1
| |
| 46
| Oscilloscope
| Tektronix 60MHz 2215A
| 1
| |
| 47
| Bake Oven
| Despatch
| 1
| |
If interested in one or more, or all of the items above, please click here.
| Item
| Manufacturer
| Model
| Description
| Age
| Serial #
|
| 1
| |
AMI3100 Parts
| Spare Parts & Modules for AMI3100A
| |
N/A
|
| 2
| Disco Corporation
| DFD 2S/8
| Dicing Saw, Fully Automatic
| 12
| DR 1135
|
| 3
| MCT (Aseco Corporation)
| MCT3608A6
| 600Mil Test Handler
| |
|
| 4
| Multitest GMBH & Co. Kg
| MT9105
| TQFP Test Handlers
| 6
| |
| 5
| Multitest GMBH & Co. Kg
| MT9105 Spares
| Handler Spare Parts
| |
|
| 6
| Symtek Systems, Inc.
| 7936HC-5
| PDIP Test Handler
| |
4256
|
| 7
| Symtek Systems, Inc.
| 7192C
| Burn In Oven w/ 9308 Test Socket
| 18
| |
| 8
| TOKYO SEIMITSU CO., LTD
| APM60A
| Automatic Test Probers
| 11
| |
| 9
| Exclusive Design Company, Inc.
| EDC-M400
| Substrate Cleaner
| |
|
| 10
| DISCO CORPORATION
| DFG83H/6
| Wafer Back Grinder
| 14
| GA0396
|
| 11
| LTX Corporation
| TS80 Modules
| LTX77 Modules
| |
|
| 12
| Buehler (USA)
| Isomet TM+
| Precision Dicing Saw
| |
435-ISP-481
|
| 13
| TOKYO SEIMITSU CO., LTD
| APM5000
| Semi-Automatic Test Probers
| |
|
| 14
| TOKYO SEIMITSU CO., LTD
| APM90A
| Automatic Test Probers
| 5
| F01045GM
|
| 15
| DISCO CORPORATION
| 2H6T
| Disco Dicing Saw 2H6T
| 13
| DD6637
|
| 16
| MCT (Aseco Corporation)
| 506274
| MCT2020 Pogo pins spherical head for PEC
| |
|
| 17
| ESEC Group
| 2006PI
| Die Attach Bonder
| 9
| 2006726-7-21
|
| 18
| Sun Microsystems, Inc.
| GDM1962B
| 21” Workstation Monitor
| 4
| |
| 19
| Mitutoyo
| PJ 300
| Profile Projector
| |
170148
|
| 20
| MCT (Aseco Corporation)
| 92F9006(ETP28B)
| MCT2020 Ethernet Super Slim IO base-T transceiver
| |
|
| 21
| MCT (Aseco Corporation)
| 116820
| MCT2020 Dual Timing Generator Boards
| |
|
| 22
| MCT (Aseco Corporation)
| 116325
| MCT2020 Functional Sequencer Boards
| |
|
| 23
| MCT (Aseco Corporation)
| 116800
| MCT2020 AC Parametric Board
| |
|
| 24
| MCT (Aseco Corporation)
| 116477
| MCT2020 PED Cards
| |
|
| 25
| MCT (Aseco Corporation)
| 504529
| MCT2020 Blank Disks/MCT Master Disk
| |
|
| 26
| MCT (Aseco Corporation)
| 106777/105777
| MCT2020 Handle Prober Int’f Bd (HPIB)
| |
|
| 27
| MCT (Aseco Corporation)
| 105739
| MCT2020 Mother Board Int’f (MBIB)
| |
|
| 28
| MCT (Aseco Corporation)
| DGBM
| MCT2020 MCT Diag. Brd.
| |
|
| 29
| MCT (Aseco Corporation)
| Deskew
| MCT2020 Deskew Boards
| |
|
| 30
| MCT (Aseco Corporation)
| |
MCT2020 Controller Box w/ coax Cable
| |
|
| 31
| Sun Microsystems Inc.
| GDM 20D10
| 21 Inch Workstation Monitor
| 4
| |
| 32
| Kulicke & Soffa Industries Inc
| KNS 1488L Turbo Plus
| Gold Ball Bonder
| 6
| 6012
|
| 33
| MULTITEST GMBH & CO. KG
| MT9105 Spares
| Handler Change Kits
| |
Various
|
| 34
| KLA Tencor
| Surfscan 7700
| Pattern Wafer Inspection System
| 7
| 0896-811M SFS7700M
|
| 35
| DISCO CORPORATION
| 2H6TM
| Disco Dicing Saw
| 8
| DD9184
|
| 36
| DISCO CORPORATION
| 2H6TM
| Disco Dicing Saw
| 9
| DD9172
|
| 37
| TOKYO SEIMITSU CO., LTD
| APM90A
| Sutomatic Test Prober
| 4
| F01024AN
|
| 38
| Kulicke & Soffa Industries, Inc.
| |
Spares for Model 8060/8020/8028
| |
Various
|
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If interested in one or more, or all of the items above, please click here.
Schenck, Model VIBROTEST 41
Please click on the image below for enlarged photo
A good business can be established with this equipment. Contact us for details. Basically new. Never been used except for the first time demonstration by the Schenck's Engineer. A "must" for high speed balancing in a "Turbo Pump Repair" business and other applications.
The VIBROTEST 41 is a portable, battery operated, lightweight measuring instrument that can make the following measurements:
Overall
- Bearing vibration
- Rolling element bearing condition (BEARCON)
- Shaft vibration (X/Y)
- Temperature
- Process parameter
Balancing
- One (1) plane
- Two (2) planes
If interested please click here.
Please click on the image below for enlarged photo
Mounted Felt Polishing Wheel
- 3M Satin Finishing Material
- Stainless steel material for 3/32” shank and related parts
- Specifications:
- 7/8 X 3/8 X 3/32
- 7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
If interested please click here.
Please contact us at:
OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
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