Used, Rebuilt Pre-owned Eight Inch Semiconductor Equipment: Metrology, Deposition, Ellipsometers, Particle Counter, Probe Station, Auto Scriber, Etc.
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Eight Inch (8") Semiconductor Equipment, Refurbished KLA/TENCOR Systems, & Parts
All equipment listed below are sold "as-is", "where-is" basis and are subject to prior sale or availability at date of inquiry.
| Item
| Manufacturer
| Model
| Description
| Condition
| Qty
| Price Each, US$
|
| 1
| Asyst
| ARM 2200-V1315
| SMIF Loader
| New, never used
| 25
| Reasonable Offers
|
| 2
| Asyst
| ARM 220-V1316
| SMIF Loader
| New, never used
| 25
| Reasonable Offers
|
| 3
| Asyst
| MSC 6610
| MSC Box
| New, never used
| 25
| Reasonable Offers
|
| 4
| AG
| 8108
| 8108 with multiple 8800 upgrades
| Good
| 2
| Please call.
|
| 5
| ASML
| ASML 60
| |
Good
| 2
| Please call.
|
| 6
| ASML
| ASML 80
| |
Good
| 4
| Please call.
|
| 7
| Genus
| 8720 W CVD
| Tungsten Deposition
| Good
| 5
| Please call.
|
| 8
| Kensington
| Autoscope
| Metrology
| Good
| 3
| Please call.
|
| 9
| KLA/Tencor
| FT 650
| Film Thickness
| Good
| 2
| Please call.
|
| 10
| KLA/Tencor
| SFS 7700
| Pattern Inspection System
| Good
| 2
| Please call.
|
| 11
| LAM
| 4608
| Metal RIE
| Good
| 6
| Please call.
|
| 12
| AME
| 5000 CVD
| .03 dep/.01 etch
| Good
| 5
| Please call.
|
| 13
| Neslab
| RTE-134A MP
| Pyro Chiller
| Good
| 1
| Reasonable Offer
|
| 14
| Neslab
| |
Heat Exchanger
| Good
| 1
| Reasonable Offer
|
| 15
| SVG
| SVG 90
| Track
| Good
| 4
| Please call.
|
| 16
| SVG
| VTR 7000
| Nitride
| Good
| 1
| Please call.
|
| 17
| Strasbaugh
| 6DSSP
| |
Good
| 5
| Please call.
|
| 18
| Strasbaugh
| 6DSSP
| In Operation
| Good
| 6
| Please call.
|
| 19
| Ultrapointe/KLA
| 1010
| Metrology
| Good
| 2
| Please call.
|
| 20
| Varian
| M2000
| .04 dep. / .01 etchback chamber
| Good
| 2
| Please call.
|
| 21
| Varian
| M2000
| Missing some parts
| Spare System
| 1
| Please call.
|
| 22
| KLA/Tencor
| 4500
| Metrology
| OEM Specs
| 1
| Please call.
|
| 23
| KLA/Tencor
| 6220
| Metrology
| OEM Specs
| 1
| Please call.
|
| 24
| KLA/Tencor
| 6420
| Metrology
| OEM Specs
| 1
| Please call.
|
| 25
| PMS
| 3600
| Metrology
| OEM Specs
| 1
| Please call.
|
| 26
| Cannon
| EX 4
| In clean room available for inspection
| Good
| 5
| |
| 27
| Canon
| EX 5
| In clean room available for inspection
| Good
| 5
| |
| 28
| KLA/Tencor
| SP1
| Metrology, 1998
| Excellent
| 1
| Please call.
|
| 29
| KLA/Tencor
| SP1-TB1
| Metrology, 2001, brand new in crate
| Never uncrated
| 1
| Please call.
|
| 30
| KLA/Tencor
| 6420
| Metrology / Refurbished
| OEM Specs
| 1
| Please call.
|
| 31
| KLA/Tencor
| SP1
| Metrology, “as-is”
| Excellent
| 1
| Please call.
|
Note: Support and installation services for KLA/Tencor equipment are available and performed by factory trained Field Service Engineers. Please call or click here to email request for details.
Semiconductor Equipment: Elipsometers, Particle Counter, Probe Station, Auto Scriber, Etc.
- Rudolph Auto Ellipsometers Model EL III and Model EL II
- The Auto-el III is in “LIKE NEW” condition and has the 3 axis automatic stage with joystick control. It comes with stds. And manuals.
- The Auto-el II is in very nice condition, has the square stage and also comes with the startup std. And maintenance kit.
- Tencor Surfscan, SFS-364
- Surface particle counter. Measures wafers up to 150mm as well as masks. Comes with manuals. Very Nice condition. 1990
- Micromanipulator 6000 Probe Station
- The tool has the Bausch and Lomb microscope on it and comes with 4 magnetic probes (110) with 7B probe tips (.020”). It’s currently outfitted with a 100mm chuck. It also comes with a few extras including an ESI (Electro Scientific Industries) model 1700 digital converter with 1701 ohmeter, 20-200 meg-ohm range.
- Karl Suss Auto Scriber, RA-120
- With manual. Taking offers.
- Yield Engineering (YES-3), vapor prime oven.
- Samco UV/Ozone Stripper Model UV-1
- Semiconductor Equipment wafer expander
- Model 2600. Taking offers!!!
- SemiGas two tank gas cabinet
- The unit is complete with plumbing, regulators, electronics, and scales. It was only used for 6-12 months and was used for Chlorine and BCL3. It has GSM5 (Gas Safety Monitoring) controllers with remote programming units, safety interlocks, etc. . . The unit is in “LIKE NEW” condition and has the glass sliding window in front for easy viewing of gas bottle environment conditions.
All of the above equipment are being sold on "as-is", "where-is" basis. However, they are in if not mint, near mint condition. They are stretch wrapped and moisture protected. They are in dry storage and available for inspection. Subject to availability upon inquiry.
R&D Semiconductor Equipment For Sale
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
| Comments
| Price
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
| Installed and tested but used only 1 or 2 times.
| Please call.
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
| In good working order.
| Please call.
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
| Like New
| Please call.
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
| Installed and working fine. Never used.
| Please call.
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
| Works great. On chamber has a fair sized vacuum leak.
| Please call.
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
| Works great. New Edwards pumps.
| Please call.
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
| Great condition.
| Please call.
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool, Exposure System
| 208V/15A
| 67W X 59D X 103H
| Like New
| Please call.
|
Measurement Instrument or System for Machine Diagnostics and Predictive Machine Maintenance
Schenck, Model VIBROTEST 41
Please click on the image below for enlarged photo
A good business can be established with this equipment. Contact us for details. Basically new. Never been used except for the first time demonstration by the Schenck's Engineer. A "must" for high speed balancing in a "Turbo Pump Repair" business and other applications.
The VIBROTEST 41 is a portable, battery operated, lightweight measuring instrument that can make the following measurements:
Overall
- Bearing vibration
- Rolling element bearing condition (BEARCON)
- Shaft vibration (X/Y)
- Temperature
- Process parameter
Balancing
- One (1) plane
- Two (2) planes
If interested please click here.
Rotary Polishing Wheel
Please click on the image below for enlarged photo
Mounted Felt Polishing Wheel
- 3M Satin Finishing Material
- Stainless steel material for 3/32” shank and related parts
- Specifications:
- 7/8 X 3/8 X 3/32
- 7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
If interested please click here.
If interested in one or more items, please click here.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
Please contact us at:
OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
E-mail: info@semiconweb.net
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Semiconductor Equipment Resource Center
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