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Used Semiconductor Equipment, Vacuum Systems, Pumps, Etc: fl01

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Novellus Sputter Deposition, Model 3290-STQ

Details and Configuration:

    Quantity: 2
    Excellent Condition
    Serial No. LVE80511, Date Installed: June, 2000
    Serial No. LVE80512, Date Installed: June, 2000

    • Model 3290-STQ Fully automatic, cassette-to-cassette wafer loading and unloading:

    • Quantum Sputter Deposition Sources for each Deposition Station including:
      • 1. (1) Quantum Sputtering Source
      • 2. (1) CMD GEN 2.5-12KW-DC power supply per source including:
        • a. Remote digital power supply readout meters
        • b. Conveniently installed in system control electronics rack
        • c. One set of 50 ft. cables for each Quantum Source

    • 586 System Controller Including:
      • 1. 14" VGA colog touch screen via surface acoustic technology
      • 2. 238 Meg Hard Drive
      • 3. Interface Keyboard, Track Ball
      • 4. Printer Port
      • 5. Graphic User Interface
      • 6. Recipe Controlled Heaters
      • 7. Cryo Pump Quick Regeration Capability
      • 8. On-screen Data Collection and History Log
      • 9. User definable system access levels and access codes
      • 10. Diagnostic routines for maintenance and troubleshooting
      • 11. Programmable cool-time prior to wafer unload

    • CTI Onboard Cryo Pump with Fast Regeneration capability
    • Dedicated Load Lock Turbo Pump
    • (2) Edwards ESDP 30 Mechanical Roughing Pumps
    • Proximity Switches for Load Lock and Sealed Doors
    • Particle Reduction Kit
    • Electropolished Argon Develivery System
    • Argon Line Isolation Valve
    • AC Power Line Filter
    • 15 Minute UPS
    • (2) Sets of Quick Change Shields
    • Quantum Targets
    • RF Etch with Preheat at Station 1
    • CTI Water Pump
    • VIP at Station 1

If interested, please click here.

Note: All equipment are subject to availability at time and date of inquiry


Applied Materials Centura HP PVD

Details and Configuration:

    Quantity: 1
    Escellent Condition
    Serial No. T-27094-33-2519, (System 2519)
    Date Installed: May 2001

    Applied Materials Cuntura HP PVD, 6", mainframe with:
    • One ultra-high vacuum Centura HP PVD platform featuring the HP dual high speed wafer transfer robotics, dual load lock chambers, a Fast Regen Cryo pump, and wafer mapping cassette capability.

    • The Centura HP PVD control system features a 32-bit microprocessor control, CRT display with light pen. Software capability includes sophisticated recipe programming, process parameter and wafer history storage, self diagnostics, automated service routines, and host computer interface via an RS232 port.

    Chambers A, B, & D - Aluminum PVD (Aluminum Dura Source Process)
    • PVD Chamber Opt.: Std. PVD Chamber
    • PVD UHV Pump Opt.: CTI Fast Regen Low Vibration
    • PVD Power Supply Opt.: High Accuracy Low Output (HALO)
    • PVD Wafer Chuck Opt.: Mechanically Clamped Heaters
    • Mechanical Clamped: Clamped "Original" Heater
    • Clamp Ring Opt.: SST ARC Sprayed Clamp Rings
    • Shield Opt.: SST One Piece Arc Sprayed
    • PVD Pressure Control:
      • Gate Valve: 2-Position Gate Valve
      • Cryo Restrictors: Standard Cryo Restrictor

    Chamber C - Aluminum PVD (Aluminum Dura Source Process)
    • Same as above except:
      • Clamp Ring Opt.: Ti Arc Sprayed Clamp Ring

    Chamber F - Auxiliary Chamber
    • Orienter Chamber Opt.: Orienter with Std. Degas

If interested, please click here.

Note: All equipment are subject to availability at time and date of inquiry


Sputtered Films, Inc. Model 8600

Details and Configuration:

    Quantity: 2
    Escellent Condition
    Serial No. 19347
    Date Installed: January, 1997

    System No. 1:

    • Software rev. 2.0
    • Backing pumps for all modules are Vacuubrand MD-4l
    • TM uses CTI 8510 Cryo compressor

    • PM1 and PM3
      • Sputter module
      • Series 4.2 Gun
      • UPS
      • Omega CN3000 Controller
      • AE RFX-600 RF Generator
      • AE ATX-600 RF Tuner
      • AE MDX-1.5K Magnetron Drive
      • AE MDX-1.5K Magnetron Drive
      • HP 6012B DC Power Supply
      • Pfeiffer TPH180HU Turbo

    • PM2 and PM4
      • Sputter module
      • Series 4.2 Gun
      • UPS
      • AE RFX-600 RF Generator
      • AE ATX-600 RF Tuner
      • AE MDX Pinnacle 6
      • AD MDX Pinnacle 6
      • HP 6012B DC Power Supply
      • Inficon Transpector RGA Head
      • Pfeiffer TPH180HU Turbo

    • PM5
      • Degas, RF etch module
      • Series 3 Gun
      • UPS
      • AE RFX-600 RF Generator
      • AE ATX-600 RF Tuner
      • AE MDX Pinnacle 6
      • HP 6012B DC Power Supply
      • Inficon Transpector RGA Head
      • Pfeiffer TPH180HU Turbo

    • CM
      • Cassette module
      • Omega CN132 Controller
      • UPS
      • Pfeiffer TPH180HU Turbo

    • TM
      • Transfer module
      • Inficon Transpector RGA Head
      • CTI-Cryogenics water pump
      • Pfeiffer TPH180HU Turbo

    System No. 2:

    • Software rev. 2.0
    • Backing pumps for all modules are Vacuubrand MD-4l
    • TM and PM3 share a CTI 9600 Cryo compressor

    • PM1
      • Degas, RF etch module
      • Series 3 Gun
      • UPS
      • AE RFX-600 RF Generator
      • AE ATX-600 RF Tuner
      • AE MDX Pinnacle 6
      • HP 6012B DC Power Supply
      • Pfeiffer TPH180HU Turbo

    • PM2
      • Sputter module
      • Series 4.2 Gun
      • UPS
      • Omega CN3000 Controller
      • AE RFX-600 RF Generator
      • AE ATX-600 RF Tuner
      • AE PE-10K AC Plasma Source
      • AE PE Power Pack
      • Pfeiffer TPH180HU Turbo

    • PM3
      • Sputter module
      • Series 4 Gun
      • UPS
      • CTI Cryogenics Water Pump
      • Omega CN3000 Controller
      • AE RFX-600 RF Generator
      • AE ATX-600 RF Tuner
      • AE MDX-L12M
      • AE MDX-L12M
      • HP 6012B DC Power Supply
      • Inficon Transpector RGA Head
      • Pfeiffer TPH180HU Turbo

    • PM4
      • Sputter module
      • Series 4.2 Gun
      • UPS
      • Omega CN3000 Controller
      • AE MDX Pinnacle 6
      • AD MDX Pinnacle 6
      • Pfeiffer TPH180HU Turbo

    • PM5
      • Sputter module
      • Series 4.2 Gun
      • UPS
      • RGA Computer
      • AE MDX Pinnacle 6
      • AD MDX Pinnacle 6
      • Pfeiffer TPH180HU Turbo

    • CM
      • Cassette module
      • Omega CN132 Controller
      • UPS
      • Pfeiffer TPH180HU Turbo

    • TM
      • Transfer module
      • Inficon Transpector RGA Head
      • CTI-Cryogenics Water Pump
      • Pfeiffer TPH180HU Turbo

If interested, please click here.

Note: All equipment are subject to availability at time and date of inquiry


Used Kokusai Vertical Furnace System

Item Equipment/Description Model/Serial No. Manufacturer Comments
1 Kokusai Vertical Furnace System, 8 Inch Vertron DJ-803V Kokusai Used for Nitride, Poly, and Teos processes. One large crate of spare parts is available. To be sold "As-Is", "Where-Is".

Submit reasonable offers for immediate consideration.

Please click on the stamp images below to see photos:

Nitride Front Photo Poly Front Photo Teos Front Photo Wafer Handler Photo

If interested, please click here.

Note: All Products: Subject to availability at time and date of inquiry.


Surplus Semiconductor Equipment

Surplus or Excess Semiconductor Equipment