Semiconductor Equipment: Vacuum Systems, Pumps, Blower, Measurement Systems, Power Supplies and More
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BUY - SELL - LEASE - TRADE - SERVICE - PROCESS
To see photos or pictures of other equipment and parts, please click here.
The following are notes from the list provider:
Equipment Sales
- We completely rebuild systems, and offer them with a 90 day warranty. We also do special modifications on these systems. We can configure many of these systems to your specifications. A complete source inspection at our facility is possible. Please see the following lists of our current inventory.
Equipment Purchasing/Trade
- We will also buy your equipment, and take your systems in trade.
Equipment Spare Parts
- We carry many spare parts for the systems listed below, specifically Branson/IPC, Drytek, Gasonics, LFE, Technics, Tegal, etc. Also, we have vacuum related products and fluids, and RF Power Tubes.
Equipment Repair/Service
- We will completely rebuild your system at our facility, or service your system at your location. Our service rate plus travel expenses.
Plasma Processing
- We have equipment installed at our facility to do surface treating and cleaning of your parts. This service can usually be performed within 24 hours.
Note:
- All items included in the following table and list are subject to prior sale or availability upon time and date of inquiry.
Vacuum Systems
| Item
| Qty
| Description
|
| 1
| 1 Ea
| CPA Model 9900 DC Sputter Deposition System, w/ 4 ea ERA 5 KW DC sputtering power supplies, 2 ea CTI 8 and 1 ea CTI 10 cryo pumps, w/ pumps and chillers.
|
| 2
| 1 Ea
| GSI R&D deposition system, for AMSi, amnual valving, Sierra mass flow controllers, MKS baratron controller, GP 307 vacuum gauge, 2 ea Balzers Model TPU 330 turbo pumps/TCP 310 controllers, ENI ACG-3 RF P/S, Leybold pump/blower package.
|
| 3
| 1 Ea
| Leybold Model VZK A550 sputtering machine, w/ Huttinger Model IS 6 10KW RF Power supply, spare RF Generator.
|
| 4
| 1 Ea
| Innotech sputterer customized: 486 industrial computer tied to PLC, CTI 8 cryo w/ compressor, RF Services automatch networks w/ controllers, approx 28" dia SS chamber, RGA port, Henry 10KW RF Power Supply, Advanced Energy Model RFX 1250 P/S, spare RF Generator.
|
| 5
| 1 Ea
| Leybold Heraeus Model Ultratest F Leak Detector, automatic operation, diffusion pump.
|
| 6
| 1 Ea
| NRC 3317 Sputtering System, MRC S-3007 RF P/S, 1.25 KW, 6" target w/ sputter etch station, manual valving, VHS-6" DP with Welch 1397 mechanical pump.
|
Vacuum Pumps and Blowers
| Item
| Qty
| Manufacturer
| Model
| Capacity, CFM/LPM
|
| 1
| 2
| Alcatel
| 2030C
| 17.7/500
|
| 2
| 1
| Alcatel
| 2033C
| 27/765
|
| 3
| 5
| Alcatel
| ZT2063C
| 50/1420
|
| 4
| 1
| Edwards
| E2M1
| N/A
|
| 5
| 2
| Edwards
| E2M40
| 30/845
|
| 6
| 1
| Edwards
| E2M80
| 57/1613
|
| 7
| 1
| Edwards
| EH250
| 190/5367
|
| 8
| 1
| Leybold
| D2
| 2.2/62
|
| 9
| 1
| Leybold
| D8
| 7.0/198
|
| 10
| 4
| Leybold
| D16
| 14.1/400
|
| 11
| 2
| Leybold
| D16BCS
| 11.6/328
|
| 12
| 1
| Leybold
| D30AC
| 26.8/760
|
| 13
| 2
| Leybold
| D30AC, Fomblin Prep
| 26.8/760
|
| 14
| 1
| Leybold
| D40BCS
| 28.3/920
|
| 15
| 2
| Leybold
| S60
| N/A
|
| 16
| 2
| Leybold
| D60
| 36.7/1039
|
| 17
| 2
| Leybold
| D90AC
| 55/1556
|
Vacuum Pump/Blower Packages
| Item
| Qty
| Manufacturer
| Model
| Capacity, CFM/LPM
|
| 1
| 3
| Edwards
| E2M40/EH250, New
| 220/6196
|
| 2
| 1
| Leybold
| D40BCS/Blower
| 28.3/920
|
| 3
| 1
| Edwards
| Edwards/EH 1200
| 780 CFM
|
| 4
| 1
| Leybold
| D30AC/WA250
| 179 CFM
|
RF Power Supplies
| Item
| Manufacturer
| Model
| Capacity, Watts
| Frequence
|
| 1
| Advanced Energy
| PE-1000SG
| 1250
| 25-100 KHz
|
| 2
| Advanced Energy
| RFX1250
| 1250
| 13.56 MHz
|
| 3
| Advanced Energy
| PDW2200
| 2200
| N/A
|
| 4
| Advanced Energy
| RFG1250
| N/A
| N/A
|
| 5
| Branson
| PM 119
| 500
| 13.56 MHz
|
| 6
| Branson
| PM 118
| 500
| 13.56 MHz
|
| 7
| Branson
| PM 112
| 1500
| 13.56 MHz
|
| 8
| Branson
| PM 122
| 1500
| 13.56 MHz
|
| 9
| Branson
| PM 129
| 500
| 13.56 MHz
|
| 10
| Branson
| PM 332
| 1000
| 13.56 MHz
|
| 11
| Comdel
| CPS-1001
| 1000
| 13.56 MHz
|
| 12
| ENI
| HF1
| 2000
| 13.56 MHz
|
| 13
| ENI
| AGC-10T
| 1000
| 13.56 MHz
|
| 14
| ENI
| OEM-6
| 1000
| 13.56 MHz
|
| 15
| ENI
| OEM-12
| 1250
| 13.56 MHz
|
| 16
| ENI
| Matchworks 25D
| 3000W max
| 13.56 MHz
|
Matching Network
| Item
| Manufacturer
| Model
| Capacity, Watts
| Frequence
|
| 1
| LFE
| SA 40C
| 500W
| 13.56 MHz
|
| 2
| Plasma Therm
| HFS3000D
| 3000W
| 13.56 MHz
|
| 3
| Plasma Therm
| HFS10000
| 10000W
| 13.56 MHz
|
| 4
| RF Plasma Prod.
| RF 50S
| 5000W
| 13.56 MHz
|
| 5
| RF Plasma Prod
| HFS500E
| 500W
| 13.56 MHz
|
| 6
| Tegal
| N/A
| 300W
| 13.56 MHz
|
| 7
| Bird
| Dummy Load, 3 Ea
| 1500W
| N/A
|
R&D Semiconductor Equipment . . . For Sale!!!
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool
| 208V/15A
| 67W X 59D X 103H
|
Measurement Instrument or System for Machine Diagnostics and Predictive Machine Maintenance
Schenck, Model VIBROTEST 41
Please click on the image below for enlarged photo
A good business can be established with this equipment. Contact us for details. Basically new. Never been used except for the first time demonstration by the Schenck's Engineer. A "must" for high speed balancing in a "Turbo Pump Repair" business and other applications.
The VIBROTEST 41 is a portable, battery operated, lightweight measuring instrument that can make the following measurements:
Overall
- Bearing vibration
- Rolling element bearing condition (BEARCON)
- Shaft vibration (X/Y)
- Temperature
- Process parameter
Balancing
- One (1) plane
- Two (2) planes
If interested please click here.
Rotary Polishing Wheel
Please click on the image below for enlarged photo
Mounted Felt Polishing Wheel
- 3M Satin Finishing Material
- Stainless steel material for 3/32" shank and related parts
- Specifications:
- 7/8 X 3/8 X 3/32
- 7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
If interested please click here.
If interested in one or more items, please click here.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
Please contact us at:
OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
E-mail: info@semiconweb.net
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