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AME Parts, R&D Semiconductor Equipment

Engineering, Design, & Manufacturing Services

Measurement and Turbo Balancing System, Semiconductor Equipment and Related Major Components

Fluid Dispensing & Metering Pumps

Ion Implanter Parts, R&D Semiconductor Equipment

LAM Systems Parts & More Semiconductor Equipment

Mass Flow Controller List #1

Mass Flow Controller List #2

Mass Flow Controller List #3

MFC’s, Turbo Balancing System, Semi Equipment, Etc.

Mass Flow Controller Related Products

Microscopes, R&D Semiconductor Equipment

New Parts List, R & D Semiconductor Equipment

Photos of Some Equipment and Parts

Semiconductor Equipment with Related Major Components

Test Systems & Semiconductor Equipment

R & D Semiconductor Equipment, Tegal Parts

Vacuum Pumps

Varian Parts List, Semiconductor Equipment

Equipment for Sale Hot List

Equipment Wanted, List #1

Equipment Wanted, List #2

Equipment Wanted, List #3

Used Semiconductor Equipment, Vacuum Systems, Pumps, Etc: fl01

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02a

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02b

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02c

Vacuum Pumps: Turbo, Dry, Cryo, Etc: fl03

Semiconductor Back End Equipment, Etc: fl04

Helium Leak Detectors, Rebuilt: fl05

Wafer Fab or Semiconductor Equipment: fl06

Vacuum Systems Systems, Vacuum Pumps, Power Supplies, Etc: fl07B

Vacuum Packaging Systems: fl08

Used or Pre-owned Semiconductor Equipment: fl09

Semiconductor Equipment: fl10

Semiconductor Equipment: fl11

Semiconductor Equipment: fl12

Semiconductor Equipment: fl13

Semiconductor Equipment: fl14

Semiconductor Equipment: fl15

Semiconductor Equipment: fl16

8 Inch Semiconductor Equipment: fl17

Helium Leak Detectors & Vacuum Pumps: fl18

Vacuum Pumps: Oil, Turbo, Dry, Cryo, & More: fl18a

Helium Leak Detectors, RF Generators, Vacuum Pumps, Etc: fl19

Parts for Novellus, Concept One & Two, Wafer Fab Equipment, fl20

Leybold Helium Leak Detectors, Converters, Turbo Pumps, Etc.fl21

Various Helium Leak Detectors, Converters and Vacuum Pumps, Etc.fl22

6 Inch Wafer Fab Equipment, Back End Semiconductor Equipment, Etc, fl23

Back End Semiconductor Equipment, 6 Inch Wafer Fab Equipment, Etc, fl24

Used or Surplus Semiconductor & Back End Equipment Etc, fl25

Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26

Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26a

Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26b

Six Inch (6 Inch) Semiconductor or Wafer Fab Equipment Package, Etc. fl27

Semiconductor Equipment: Ion Implanters, Furnaces, Resistivity Meter, Etc. fl28

Semiconductor Equipment: Kokusai & TEL Furnaces, Ion Implanters, 4 Point Probe, Etc. fl29

Semiconductor Equipment: Sputterers, Etchers, Steppers, Kokusai & TEL Furnaces, Ion Implanters, Etc. fl30

Surplus Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. fl31

Surplus Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. fl32

Semiconductor Equipment & Online Business Opportunities

Business Opportunities Online & Internet Resources

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Semiconductor Equipment: Vacuum and Plasma Systems, Vacuum Pumps, Turbo Balancing & Measurement System, Polishing Wheels, Service and Parts

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BUY - SELL - LEASE - TRADE - SERVICE - PROCESS


The following are notes from the list provider:

    Equipment Sales
    • We completely rebuild systems, and offer them with a 90 day warranty. We also do special modifications on these systems. We can configure many of these systems to your specifications. A complete source inspection at our facility is possible. Please see the following lists of our current inventory.
    Equipment Purchasing/Trade
    • We will also buy your equipment, and take your systems in trade.
    Equipment Spare Parts
    • We carry many spare parts for the systems listed below, specifically Branson/IPC, Drytek, Gasonics, LFE, Technics, Tegal, etc. Also, we have vacuum related products and fluids, and RF Power Tubes.
    Equipment Repair/Service
    • We will completely rebuild your system at our facility, or service your system at your location. Our service rate plus travel expenses.
    Plasma Processing
    • We have equipment installed at our facility to do surface treating and cleaning of your parts. This service can usually be performed within 24 hours.


Note:

  • All items included in the following table and list are subject to prior sale or availability upon time and date of inquiry.

Plasma Systems, Rebuilt

Item Qty Description Condition
1 3 Ea Applied Materials Model 3300 PECVD system, Silicon Nitride and Silicon Dioxide films, Wafer capacity: 42 ea 3" wafers, 22 ea 4" wafers, 16 ea 5" wafers, ENI Model PS-300 RF Power Supply, 2000W @ 8111 KHz, 3 zone temperature control, Gas shower, Vacuum pumps, and filtration system. Rebuilt
2 1 Ea Branson Model L2101 Plasma /Asher/Etcher, 1 ea 12" x 20" quartz chamber, low particulate, 5 ea mass flow gas inputs, computer controlled w/ recipe storage of up to 350 process steps, temp controller, Model PM 332/ENI OEM 12 1000W solid state RF Generator. Rebuilt
3 1 Ea Branson Model L2200 Plasma Stripper, 2 ea composite ceramic/aluminum chambers for 4-8" wafers, low particulate, cassette to cassette operation, computer controlled, robot/indexer loader/unloader, ENI 1000W solid state RF Generator. Rebuilt
4 1 Ea Branson Model L3200 Plasma Stripper, 2 ea quartz chambers for 3-6" wafers, low particulate, cassette to cassette operation, computer controlled, robot/indexer loader/unloader, ENI 1000W solid state RF Generator. Rebuilt
5 2 Ea Branson/IPC Model S2100, 1 ea 12" (dia) x 20"(Depth) quartz barrel, 3 ea gas inputs, with Model 2000C 3 channel process programmer, with temperature controller, Model PM112 1000W RF Generator. ”As-Is”
6 2 Ea Branson/IPC Model S3100, 1 ea 12" (dia) x 20"(Depth) quartz barrel, 1 ea gas input, with Model 4000C 1 channel process programmer, Model PM112 1000W RF Generator. ”As-Is”
7 2 Ea Branson/IPC Model S4100, 1 ea 12" (dia) x 20"(Depth) quartz barrel, 2 ea gas inputs, with Model 4000C 1 channel process programmer, Model PM112 1000W RF Generator. ”As-Is”
8 2 Ea Branson/IPC Model S4150, 1 ea 16" (dia) x 30"(Depth) aluminum barrel, 10.5" dia x 24" depth faraday cage, 2 ea gas inputs, single channel process programmer, Model PM112 1000W RF Generator. ”As-Is”
9 2 Ea Branson/IPC Model S7150, 1 ea 24" (dia) x 36"(Depth) aluminum chamber, 4 ea gas inputs, 3 channel controller, Model PM132 1500W RF Generator. ”As-Is”
10 2 Ea Branson/IPC Model 2000, 1 ea 10" (dia) x 20"(Depth) quartz barrel, 3 ea gas inputs, with Model 921C 3 channel process programmer, with Model 921C temperature controller, Model PM119 500W RF Generator. ”As-Is”
11 2 Ea Branson/IPC Model 4000, 2 ea 10" (dia) x 20"(Depth) quartz barrel, 2 ea gas inputs, with Model 9906U-4 single channel process programmer, Model PM112 1000W RF Generator. ”As-Is”
12 2 Ea Branson/IPC Model 3000, 1 ea 8" (dia) x 13"(Depth) quartz chamber, 1 ea gas input single channel, Model PM119 500W RF Generator @ 13.56 MHz. ”As-Is”
13 1 Ea Branson/IPC Model 4055 Plasma Surface Treatment/Cleaning syste, 5 ea 7" dia. X 17" depth aluminum trays, 2 ea gas inputs, single channel, Model PM 119 RF Generator, 500W @ 13.56MHz. ”As-Is”
14 1 Ea Branson/IPC Model 4000, 1 ea 10" (dia) x 20"(Depth) quartz chamber, 2 ea gas inputs, single channel, Model PM119 500W @ 13.56MHz RF Generator. ”As-Is”
15 2 Ea D&W Model 425 plasma etcher, 28" dia electrode for 2-5" wafers or flat panels, 3 ea mass flow gas inputs, 3 ea regulator controlled gas inputs, 4 channel digital controller, 3000W RF Generator @ 13.56MHz. ”As-Is”
16 3 Ea Drytek Megastrip VI, for 5-6" wafers, batch type stripper, 2 gas inputs, single channel, Advanced Energy Model PE 1650 (Rev C) RF Generator, 1400W @ 25-100KHz ”As-Is”
17 1 Ea Electrotech Model STS310/15 Plasma Nitride Deposition tool, 30 cm dia table, 8 ea gas inputs, PC controlled, self diagnostics, RF PP RFX600 RF Generator ”As-Is”
18 1 Ea Gasonics/IPC Model 9104 Plasma Asher/Etcher, 1 ea 12 x 20" quartz chamber, low particulate, 4 ea mass flow gas inputs, computer controlled w/ 486 PC, temp controller, ENI Model OEM 12AB 1000W solid state RF Generator Rebuilt
19 1 Ea Leybold Model Z410S RIE/PE etcher, load-lock, pallet capable of handling up to 200mm wafer, can select power to bottom, top, or both electrodes, turbo pumped, MKS throttle valve, Xinix End Point Detector, 4 ea mass flow gas inputs, PLC/computer controlled, w/ ENI OEM6 RF Generator, ”As-Is”
20 3 Ea LFE Model PFS/PcrE/PDS-501, 1 ea 10" (dia) x 18" (depth) quartz chamber, 3 ea gas inputs, 3 channels ”As-Is”
21 1 Ea LFE Model PALE-301, for 3-4" wafers, single wafer parallel plate aluminum etcher, 2 ea gas inputs, 2 channels, 300W RF Generator "As-Is"
22 1 Ea LFE Model PALE-301, 1 ea 5" dia x 6" depth quartz chamber, 1 ea gas input, single channel, auto logic, auto tuning, 300W RF Generator "As-Is"
23 1 Ea Plasma Etch Model PE-1000 plasma surface treatment system, 23.75"W x 54.25L x 11"H aluminum chamber, automated system with conveyor, 1000W RF generator @ 13.56MHz, 2 ea mass flow controllers, PC computer controlled. "As-Is"
24 1 Ea Plasma Therm Model # System, VII 72, S/N PTI-4330M(05), 7/90, 11" dia electrode, configured for RIE, single chamber, Plasma Therm Model MSC-70 programmable controller/sequencer, RFPP Model RF5S RF Generator, 500W @ 13.56MHz w/ RFPP Model AM-5 matching network, w/ controller, MKS Model 252 Exhaust valve controller, w/ Throttle Valve, 6 ea Brooks mass flow controllers currently installed (can accept up to 8 MFC's), Tek Temp Model TKD-100 chiller (4000 BTU/hr), Power Distribution Assy, 208/240VAC, 3 Ph/60Hz/60A, Alcatel Model 2033C/RSV 300 pump/blower package. "As-Is"
25 1 Ea Technics Plasma RIB Etch 160-ECR LL Powercool, R&D Ion Beam Etcher w/ load lock, filament free ECR ion source, PC controlled, IBE, RIBE, and CAIBE modes of operation for etching III/V semiconductor compounds, silicon compounds, metals, and dielectrics, currently operational and can be demonstrated. New cost $800K +. "As-Is"
26 1 Ea Technics Model PE-IIA plasma etcher, 11" parallel plate, w/ deposition option, for 2-4" wafers, 2 ea gas inputs, 500W RF Generator @ 30 KHz, auto/manual logic, Rebuilt
27 1 Ea Tegal Model 965 Plasma Asher/Stripper system for up to 6" wafers, batch type, 1 ea gas input, 9 ea process recipe storage, auto logic, auto tuning, 500W RFPP solid state RF Generator "As-Is"
28 1 Ea Tegal Model 803 Plasma Oxide Etcher, for 4" wafers, single wafer cassette to cassette, 4 ea gas inputs, two channels, ENI 1 KW RF Generator, auto logic/tuning. ”As-Is”
29 2 Ea Tegal Model 701 Plasma Poly Etcher, for 4" wafers, single wafer cassette to cassette, 4 ea gas inputs, two channels, 300W RF Generator, auto logic/tuning. "As-Is"
30 2 Ea Tegal Model 421, for 2-4" wafers, batch type stripper/nitride etcher, 2 ea gas inputs, two channel, Preheating capability, manual tuning, auto/manual logic, 300W RF Generator. "As-Is"
31 2 Ea Tegal Model 415, for 2-4" wafers, batch type stripper, 1 ea gas input, single channel, auto tuning, auto/manual logic, 300W RF Generator. "As-Is"
32 3 Ea Tegal Model 411, for 2-4" wafers, batch type stripper, single gas input, single channel, 300W RF Generator, manual matching network. "As-Is"
33 3 Ea Tegal Model 211, for 2-3" wafers, batch type stripper, 1 ea gas input, single channel, 300W RF Generator. "As-Is"


R&D Semiconductor Equipment For Sale

Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.

Item Equipment Model Notes Voltage/Current Dimensions
1 SK Vapor Dryer 51028 IPA Dryer 240V/70A 45W X 24D X 100H
2 AEP Stripper UC-7550 Flat Panel Stripper 208V/200A 74W X 50D 94H
3 O3 Detector IN 2000-3 Ozone Monitor 120V/1.5A N/A
4 Steag Wet Etch FPD-400 Wet Etch with Robot 208V/60A 71W X 51L X 65H
5 AKT RIE 1600-ETCH 2 Etch Chambers 208V/240A Cluster Tool
6 AKT PVD 1600-PVD 2 Sputter Chambers 208V/320A Cluster Tool
7 Steag Coater FPD 400 Resist Coater/Developer 208V/175A 115W X 82D X 73H
8 Tamarack T-300 Photo Lithography Tool 208V/15A 67W X 59D X 103H


Measurement Instrument or System for Machine Diagnostics and Predictive Machine Maintenance

Schenck, Model VIBROTEST 41

Please click on the image below for enlarged photo

A good business can be established with this equipment. Contact us for details. Basically new. Never been used except for the first time demonstration by the Schenck's Engineer. A "must" for high speed balancing in a "Turbo Pump Repair" business and other applications.

The VIBROTEST 41 is a portable, battery operated, lightweight measuring instrument that can make the following measurements:

    Overall
    • Bearing vibration
    • Rolling element bearing condition (BEARCON)
    • Shaft vibration (X/Y)
    • Temperature
    • Process parameter

    Frequency Spectrum

    Balancing
    • One (1) plane
    • Two (2) planes

    Oscilloscope
    • Time trace

    Strobe

If interested please click here.


Rotary Polishing Wheel

Please click on the image below for enlarged photo

Mounted Felt Polishing Wheel

  • 3M Satin Finishing Material
  • Stainless steel material for 3/32” shank and related parts
    • Specifications:
      • 7/8 X 3/8 X 3/32
      • 7/8 X X 3/32

Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.

If interested please click here.


If interested in one or more items, please click here.

If you need Mass Flow Controllers, please click here.

If you need Vacuum Pumps, please click here.


Please contact us at:

OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293

E-mail: info@semiconweb.net


AME Parts, R&D Semiconductor Equipment | Engineering, Design, and Manufacturing Services | Measurement and Turbo Balancing System, Semiconductor Equipment and Related Major Components | Fluid Dispensing & Metering Pumps | Ion Implanter Parts, R & D Semiconductor Equipment | LAM Systems Parts & More Semiconductor Equipment | Mass Flow Controller List #1 | Mass Flow Controller List #2 | Mass Flow Controller List #3 | MFC’s, Turbo Balancing System, Semi Equipment, Etc. | Mass Flow Controller Related Products | Microscopes, R&D Semiconductor Equipment | New Parts List, R & D Semiconductor Equipment | Photos of Some Equipment and Parts | Semiconductor Equipment with Related Major Components | Test Systems & Semiconductor Equipment | R & D Semiconductor Equipment, Tegal Parts | Vacuum Pumps | Varian Parts List, Semiconductor Equipment | Equipment For Sale Hot List | Equipment Wanted, List #1 | Equipment Wanted, List #2 | Equipment Wanted, List #3 | Used Semiconductor Equipment, Vacuum Systems, Pumps, Etc: fl01 | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02 | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02a | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02b | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02c | Vacuum Pumps: Turbo, Dry, Cryo, Etc.: fl03 | Semiconductor Back End Equipment, Etc.: fl04 | Helium Leak Detectors, Rebuilt: fl05 | Wafer Fab or Semiconductor Equipment: fl06 | Vacuum Systems, Vacuum Pumps, Etc: fl07B | Vacuum Packaging Systems, Pumps, Power Supplies, Etc: fl08 | Used or Pre-Owned Semiconductor Equipment: fl09 | Semiconductor Equipment: fl10 | Semiconductor Equipment: fl11 | Semiconductor Equipment: fl12 | Semiconductor Equipment: fl13 | Semiconductor Equipment: fl14 | Semiconductor Equipment: fl15 | Semiconductor Equipment: fl16 | Eight Inch (8 Inch) Semiconductor Equipment: fl17 | Helium Leak Detector & Vacuum Pumps: fl18 | Vacuum Pumps: Oil, Turbo, Dry, Cryo, & More - fl18a | Helium Leak Detectors, RF Generators, Vacuum Pumps, Etc: fl19 | Novellus Parts, Concept One & Two, Wafer Fab Equipment, fl20 | Leybold Helium Leak Detectors, Converters, Turbo Pumps, Etc: fl21 | Various Helium Leak Detectors, Vacuum Pumps, Etc: fl22 | 6 Inch Wafer Fab Equipment, Back End Semiconductor Equipment, Etc: fl23 | Back End Semiconductor Equipment, 6 Inch Wafer Fab Equipment, Back End Equipment, Etc: fl24 | Used or Surplus Semiconductor & Back End Equipment, Etc: fl25 | Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26 | 4 Inch Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26a | 4 Inch Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26b | Six Inch (6 Inch) Semiconductor or Wafer Fab Equipment Package, Etc. fl27 | Semiconductor Equipment: Ion Implanters, Furnaces, Resistivity Meter, Etc. fl28 | Semiconductor Equipment: Kokusai & TEL Furnaces, Ion Implanters, 4 Point Probe, Etc. fl29 | Semiconductor Equipment: Sputterers, Etchers, Steppers, Kokusai & TEL Furnaces, Ion Implanters, Etc. fl30 | Surplus Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. fl31 | Surplus Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. fl32 | Semiconductor equipment & Online Business Opportunities | Business Opportunities Online & Internet Resources | Advertise Worldwide Online


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OLM Enterprises
Semiconductor Equipment Resource Center


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