Semiconductor Equipment: Vacuum and Plasma Systems, Vacuum Pumps, Turbo Balancing & Measurement System, Polishing Wheels, Service and Parts
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BUY - SELL - LEASE - TRADE - SERVICE - PROCESS
The following are notes from the list provider:
Equipment Sales
- We completely rebuild systems, and offer them with a 90 day warranty. We also do special modifications on these systems. We can configure many of these systems to your specifications. A complete source inspection at our facility is possible. Please see the following lists of our current inventory.
Equipment Purchasing/Trade
- We will also buy your equipment, and take your systems in trade.
Equipment Spare Parts
- We carry many spare parts for the systems listed below, specifically Branson/IPC, Drytek, Gasonics, LFE, Technics, Tegal, etc. Also, we have vacuum related products and fluids, and RF Power Tubes.
Equipment Repair/Service
- We will completely rebuild your system at our facility, or service your system at your location. Our service rate plus travel expenses.
Plasma Processing
- We have equipment installed at our facility to do surface treating and cleaning of your parts. This service can usually be performed within 24 hours.
Note:
- All items included in the following table and list are subject to prior sale or availability upon time and date of inquiry.
Plasma Systems, Rebuilt
| Item
| Qty
| Description
| Condition
|
| 1
| 3 Ea
| Applied Materials Model 3300 PECVD system, Silicon Nitride and Silicon Dioxide films, Wafer capacity: 42 ea 3" wafers, 22 ea 4" wafers, 16 ea 5" wafers, ENI Model PS-300 RF Power Supply, 2000W @ 8111 KHz, 3 zone temperature control, Gas shower, Vacuum pumps, and filtration system.
| Rebuilt
|
| 2
| 1 Ea
| Branson Model L2101 Plasma /Asher/Etcher, 1 ea 12" x 20" quartz chamber, low particulate, 5 ea mass flow gas inputs, computer controlled w/ recipe storage of up to 350 process steps, temp controller, Model PM 332/ENI OEM 12 1000W solid state RF Generator.
| Rebuilt
|
| 3
| 1 Ea
| Branson Model L2200 Plasma Stripper, 2 ea composite ceramic/aluminum chambers for 4-8" wafers, low particulate, cassette to cassette operation, computer controlled, robot/indexer loader/unloader, ENI 1000W solid state RF Generator.
| Rebuilt
|
| 4
| 1 Ea
| Branson Model L3200 Plasma Stripper, 2 ea quartz chambers for 3-6" wafers, low particulate, cassette to cassette operation, computer controlled, robot/indexer loader/unloader, ENI 1000W solid state RF Generator.
| Rebuilt
|
| 5
| 2 Ea
| Branson/IPC Model S2100, 1 ea 12" (dia) x 20"(Depth) quartz barrel, 3 ea gas inputs, with Model 2000C 3 channel process programmer, with temperature controller, Model PM112 1000W RF Generator.
| ”As-Is”
|
| 6
| 2 Ea
| Branson/IPC Model S3100, 1 ea 12" (dia) x 20"(Depth) quartz barrel, 1 ea gas input, with Model 4000C 1 channel process programmer, Model PM112 1000W RF Generator.
| ”As-Is”
|
| 7
| 2 Ea
| Branson/IPC Model S4100, 1 ea 12" (dia) x 20"(Depth) quartz barrel, 2 ea gas inputs, with Model 4000C 1 channel process programmer, Model PM112 1000W RF Generator.
| ”As-Is”
|
| 8
| 2 Ea
| Branson/IPC Model S4150, 1 ea 16" (dia) x 30"(Depth) aluminum barrel, 10.5" dia x 24" depth faraday cage, 2 ea gas inputs, single channel process programmer, Model PM112 1000W RF Generator.
| ”As-Is”
|
| 9
| 2 Ea
| Branson/IPC Model S7150, 1 ea 24" (dia) x 36"(Depth) aluminum chamber, 4 ea gas inputs, 3 channel controller, Model PM132 1500W RF Generator.
| ”As-Is”
|
| 10
| 2 Ea
| Branson/IPC Model 2000, 1 ea 10" (dia) x 20"(Depth) quartz barrel, 3 ea gas inputs, with Model 921C 3 channel process programmer, with Model 921C temperature controller, Model PM119 500W RF Generator.
| ”As-Is”
|
| 11
| 2 Ea
| Branson/IPC Model 4000, 2 ea 10" (dia) x 20"(Depth) quartz barrel, 2 ea gas inputs, with Model 9906U-4 single channel process programmer, Model PM112 1000W RF Generator.
| ”As-Is”
|
| 12
| 2 Ea
| Branson/IPC Model 3000, 1 ea 8" (dia) x 13"(Depth) quartz chamber, 1 ea gas input single channel, Model PM119 500W RF Generator @ 13.56 MHz.
| ”As-Is”
|
| 13
| 1 Ea
| Branson/IPC Model 4055 Plasma Surface Treatment/Cleaning syste, 5 ea 7" dia. X 17" depth aluminum trays, 2 ea gas inputs, single channel, Model PM 119 RF Generator, 500W @ 13.56MHz.
| ”As-Is”
|
| 14
| 1 Ea
| Branson/IPC Model 4000, 1 ea 10" (dia) x 20"(Depth) quartz chamber, 2 ea gas inputs, single channel, Model PM119 500W @ 13.56MHz RF Generator.
| ”As-Is”
|
| 15
| 2 Ea
| D&W Model 425 plasma etcher, 28" dia electrode for 2-5" wafers or flat panels, 3 ea mass flow gas inputs, 3 ea regulator controlled gas inputs, 4 channel digital controller, 3000W RF Generator @ 13.56MHz.
| ”As-Is”
|
| 16
| 3 Ea
| Drytek Megastrip VI, for 5-6" wafers, batch type stripper, 2 gas inputs, single channel, Advanced Energy Model PE 1650 (Rev C) RF Generator, 1400W @ 25-100KHz
| ”As-Is”
|
| 17
| 1 Ea
| Electrotech Model STS310/15 Plasma Nitride Deposition tool, 30 cm dia table, 8 ea gas inputs, PC controlled, self diagnostics, RF PP RFX600 RF Generator
| ”As-Is”
|
| 18
| 1 Ea
| Gasonics/IPC Model 9104 Plasma Asher/Etcher, 1 ea 12 x 20" quartz chamber, low particulate, 4 ea mass flow gas inputs, computer controlled w/ 486 PC, temp controller, ENI Model OEM 12AB 1000W solid state RF Generator
| Rebuilt
|
| 19
| 1 Ea
| Leybold Model Z410S RIE/PE etcher, load-lock, pallet capable of handling up to 200mm wafer, can select power to bottom, top, or both electrodes, turbo pumped, MKS throttle valve, Xinix End Point Detector, 4 ea mass flow gas inputs, PLC/computer controlled, w/ ENI OEM6 RF Generator,
| ”As-Is”
|
| 20
| 3 Ea
| LFE Model PFS/PcrE/PDS-501, 1 ea 10" (dia) x 18" (depth) quartz chamber, 3 ea gas inputs, 3 channels
| ”As-Is”
|
| 21
| 1 Ea
| LFE Model PALE-301, for 3-4" wafers, single wafer parallel plate aluminum etcher, 2 ea gas inputs, 2 channels, 300W RF Generator
| "As-Is"
|
| 22
| 1 Ea
| LFE Model PALE-301, 1 ea 5" dia x 6" depth quartz chamber, 1 ea gas input, single channel, auto logic, auto tuning, 300W RF Generator
| "As-Is"
|
| 23
| 1 Ea
| Plasma Etch Model PE-1000 plasma surface treatment system, 23.75"W x 54.25L x 11"H aluminum chamber, automated system with conveyor, 1000W RF generator @ 13.56MHz, 2 ea mass flow controllers, PC computer controlled.
| "As-Is"
|
| 24
| 1 Ea
| Plasma Therm Model # System, VII 72, S/N PTI-4330M(05), 7/90, 11" dia electrode, configured for RIE, single chamber, Plasma Therm Model MSC-70 programmable controller/sequencer, RFPP Model RF5S RF Generator, 500W @ 13.56MHz w/ RFPP Model AM-5 matching network, w/ controller, MKS Model 252 Exhaust valve controller, w/ Throttle Valve, 6 ea Brooks mass flow controllers currently installed (can accept up to 8 MFC's), Tek Temp Model TKD-100 chiller (4000 BTU/hr), Power Distribution Assy, 208/240VAC, 3 Ph/60Hz/60A, Alcatel Model 2033C/RSV 300 pump/blower package.
| "As-Is"
|
| 25
| 1 Ea
| Technics Plasma RIB Etch 160-ECR LL Powercool, R&D Ion Beam Etcher w/ load lock, filament free ECR ion source, PC controlled, IBE, RIBE, and CAIBE modes of operation for etching III/V semiconductor compounds, silicon compounds, metals, and dielectrics, currently operational and can be demonstrated. New cost $800K +.
| "As-Is"
|
| 26
| 1 Ea
| Technics Model PE-IIA plasma etcher, 11" parallel plate, w/ deposition option, for 2-4" wafers, 2 ea gas inputs, 500W RF Generator @ 30 KHz, auto/manual logic,
| Rebuilt
|
| 27
| 1 Ea
| Tegal Model 965 Plasma Asher/Stripper system for up to 6" wafers, batch type, 1 ea gas input, 9 ea process recipe storage, auto logic, auto tuning, 500W RFPP solid state RF Generator
| "As-Is"
|
| 28
| 1 Ea
| Tegal Model 803 Plasma Oxide Etcher, for 4" wafers, single wafer cassette to cassette, 4 ea gas inputs, two channels, ENI 1 KW RF Generator, auto logic/tuning.
| ”As-Is”
|
| 29
| 2 Ea
| Tegal Model 701 Plasma Poly Etcher, for 4" wafers, single wafer cassette to cassette, 4 ea gas inputs, two channels, 300W RF Generator, auto logic/tuning.
| "As-Is"
|
| 30
| 2 Ea
| Tegal Model 421, for 2-4" wafers, batch type stripper/nitride etcher, 2 ea gas inputs, two channel, Preheating capability, manual tuning, auto/manual logic, 300W RF Generator.
| "As-Is"
|
| 31
| 2 Ea
| Tegal Model 415, for 2-4" wafers, batch type stripper, 1 ea gas input, single channel, auto tuning, auto/manual logic, 300W RF Generator.
| "As-Is"
|
| 32
| 3 Ea
| Tegal Model 411, for 2-4" wafers, batch type stripper, single gas input, single channel, 300W RF Generator, manual matching network.
| "As-Is"
|
| 33
| 3 Ea
| Tegal Model 211, for 2-3" wafers, batch type stripper, 1 ea gas input, single channel, 300W RF Generator.
| "As-Is"
|
R&D Semiconductor Equipment For Sale
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool
| 208V/15A
| 67W X 59D X 103H
|
Measurement Instrument or System for Machine Diagnostics and Predictive Machine Maintenance
Schenck, Model VIBROTEST 41
Please click on the image below for enlarged photo
A good business can be established with this equipment. Contact us for details. Basically new. Never been used except for the first time demonstration by the Schenck's Engineer. A "must" for high speed balancing in a "Turbo Pump Repair" business and other applications.
The VIBROTEST 41 is a portable, battery operated, lightweight measuring instrument that can make the following measurements:
Overall
- Bearing vibration
- Rolling element bearing condition (BEARCON)
- Shaft vibration (X/Y)
- Temperature
- Process parameter
Balancing
- One (1) plane
- Two (2) planes
If interested please click here.
Rotary Polishing Wheel
Please click on the image below for enlarged photo
Mounted Felt Polishing Wheel
- 3M Satin Finishing Material
- Stainless steel material for 3/32” shank and related parts
- Specifications:
- 7/8 X 3/8 X 3/32
- 7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
If interested please click here.
If interested in one or more items, please click here.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
Please contact us at:
OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
E-mail: info@semiconweb.net
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Semiconductor Equipment Resource Center
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