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Mass Flow Controller List #1

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New Parts List, R & D Semiconductor Equipment

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Equipment Wanted, List #1

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Used Semiconductor Equipment, Vacuum Systems, Pumps, Etc: fl01

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02a

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02b

Used Semiconductor Equipment: Vacuum Systems, Lithograthy, Etc: fl02c

Vacuum Pumps: Turbo, Dry, Cryo, Etc: fl03

Semiconductor Back End Equipment, Etc: fl04

Helium Leak Detectors, Rebuilt: fl05

Wafer Fab or Semiconductor Equipment: fl06

Plasma Systems, Vacuum Pumps, Etc: fl07A

Vacuum Systems Systems, Vacuum Pumps, Power Supplies, Etc: fl07B

Vacuum Packaging Systems: fl08

Used or Pre-owned Semiconductor Equipment: fl09

Semiconductor Equipment: fl10

Semiconductor Equipment: fl11

Semiconductor Equipment: fl12

Semiconductor Equipment: fl13

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Semiconductor Equipment: fl16

8 Inch Semiconductor Equipment: fl17

Helium Leak Detectors & Vacuum Pumps: fl18

Vacuum Pumps: Oil, Turbo, Dry, Cryo, & More: fl18a

Helium Leak Detectors, RF Generators, Vacuum Pumps, Etc: fl19

Parts for Novellus, Concept One & Two, Wafer Fab Equipment, fl20

Leybold Helium Leak Detectors, Converters, Turbo Pumps, Etc.fl21

Various Helium Leak Detectors, Converters and Vacuum Pumps, Etc.fl22

6 Inch Wafer Fab Equipment, Back End Semiconductor Equipment, Etc, fl23

Back End Semiconductor Equipment, 6 Inch Wafer Fab Equipment, Etc, fl24

Used or Surplus Semiconductor & Back End Equipment Etc, fl25

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Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26b

Six Inch (6 Inch) Semiconductor or Wafer Fab Equipment Package, Etc. fl27

Semiconductor Equipment: Ion Implanters, Furnaces, Resistivity Meter, Etc. fl28

Semiconductor Equipment: Kokusai & TEL Furnaces, Ion Implanters, 4 Point Probe, Etc. fl29

Semiconductor Equipment: Sputterers, Etchers, Steppers, Kokusai & TEL Furnaces, Ion Implanters, Etc. fl30

Surplus Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. fl31

Surplus Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. fl32

KLA Equipment, Back End & 6 Inch Semiconductor Equipment, Dicing Saws, fl33

Scanning Electron Microscopes, SEMS, Measurement Systems, Accessories, & Semiconductor Equipment, fl34

Semiconductor Equipment Parts, fl35

Rebuilt or Refurbished Semiconductor Equipment, fl36

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Used or Pre-owned and Rebuilt Applied Materials Semiconductor Equipment, AME System Parts, Ion Implanters, Polishing Wheel, Etc.


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Novellus Concept One, Lam 4520i, KLA-Tencor Surfscan SP1, Axcelis-Eaton Ion Implanters GSD-200E and GSD-200EE, Varian 3190 Configurations and Equipment List

Please click on the links below to explore Systems configurations and other equipment for sale.


Contents


To see photos or pictures of other equipment and parts, please click here.


Semiconductor Equipment, Fully Refurbished

The following equipment can be ordered with a lead time of 3-4 weeks upon receipt of order. All equipment are subject to availability at time and date of inquiry. Please click here to request for details.

Equipment List

  • Applied Materials, P5000, 3 chamber CVD, with pumps
  • Applied Materials, P5000, 2 chamber Etch with pumps
  • Applied Materials, 83xx Etch system with pumps
  • LAM, 490, 590 etch system with pumps
  • LAM, 44xx, 45xx etch system with pumps
  • Gasonics, Aura 1000 with pump
  • Gasonics, AE2001 with pump
  • Gasonics, L3510 with pump

Vacuum pumps are rebuilt Edwards QDP80/250 or QDP80.

Contents


Fully Refurbished Applied Materials P5000, Nitride System, 150MM (6")


Guaranteed to meet or exceed AMAT P5000 Specifications

System Configuration

  • P5000 Mark II mainframe
  • Configured for 150mm (6") wafers, SMF
  • Standard remote frame
  • 380VAC/50Hz/3 phase
  • Expanded gas panel with mini-controller
  • Phase III robot I/O wafer sensor
  • 8 slot storage elevator
  • Bolt down loadlock with particle reduction kit
  • 21 slot VME with 3 1/2" FDD
  • Hardware Y2K compliant
  • VGA monitor/light pens through the wall
  • Stand Alone Remote Monitor
  • Three (3) PECVD standard chamber
  • One (1) AMAT heat exchanger
  • Three (3) ENI-12B RF generators
  • Phase IV RF Match
  • Unit 1660 MFC's
  • Dual spring type throttle valve
  • Edwards pump interface
  • Pump(s) quoted separately
  • Installation quoted separately

Chambers

  • Chamber A: PECVD standard chamber, process Kit, 150mm
  • Chamber B: PECVD standard chamber, process Kit, 150mm
  • Chamber C: Blank
  • Chamber D: PECVD standard chamber, process Kit, 150mm
Note: chambers can be configured differently per buyer's request.

PETEOS Chambers (A,B,D)

  • Standard universal chambers
  • 150mm process kit (100% New)
  • ENI OEM 12B RF Generator with Phase IV match
  • Standard throttle valve
  • 100 Torr manometer
  • Up to 4 Unit 1660 MFC's per chamber
  • Gas panel rebuilt with New lines and re-calibrated MFC's, it looks NEW
If interested, please click here.

Note: Subject to availability at time and date of inquiry.

Contents


Fully Refurbished Applied Materials P5000, TEOS System, 150MM (6")


Guaranteed to meet or exceed AMAT P5000 Specifications

System Configuration

  • P5000 Mark II mainframe
  • Configured for 150mm (6") wafers, SMF
  • Standard remote frame
  • 380VAC/50Hz/3 phase
  • Expanded gas panel with mini-controller
  • Phase III robot I/O wafer sensor
  • 8 slot storage elevator
  • Bolt down loadlock with particle reduction kit
  • 21 slot VME with 3 1/2" FDD
  • Hardware Y2K compliant
  • VGA monitor/light pens through the wall
  • Stand Alone Remote Monitor
  • Three (3) universal PETEOS chambers
  • One (1) AMAT heat exchanger
  • Three (3) ENI-12B RF generators
  • Phase IV RF Match
  • Unit 1660 MFC's
  • Dual spring type throttle valve
  • Edwards pump interface
  • Hot Box IV
  • Schumacher TEOS Delivery Cabinet (canisters not included)
  • Pump(s) quoted separately
  • Installation quoted separately

Chambers

  • Chamber A: PETEOS/USG chamber, process Kit, 150mm
  • Chamber B: PETEOS/USG chamber, process Kit, 150mm
  • Chamber C: Blank
  • Chamber D: PETEOS/USG chamber, process Kit, 150mm
Note: chambers can be configured differently per buyer's request.

PETEOS Chambers (A,B,D)

  • Standard Universal PETEOS chambers
  • 150mm process kit (100% New)
  • ENI OEM 12B RF Generator with Phase IV match
  • Standard throttle valve
  • 100 Torr manometer
  • Up to 4 Unit 1660 MFC's per chamber
  • Gas panel rebuilt with New lines and re-calibrated MFC's, it looks NEW

If interested,   please click here.

Note: Subject to availability at time and date of inquiry.


Gasonics Aura 1000 Ashing System, 150mm (6"), Refurbished

Guaranteed To Meet OEM Specifications

Basic Configuration:

  • Anodized Al chamber with quarts chamber window
  • Pic & place robot wafer handling
  • Load/unload cassette elevator
  • End point detection
  • Microprocessor interface pressure control
  • Magnetron power supply
  • Lamp alarm board
  • Lamps and Quartz installed
  • Throttle valve included
  • Export packaging included
  • Edwards QDP80/250 pump/blower set included

If interested,   please click here.

Note: Subject to availability at time and date of inquiry.


AMAT XR80 Ion Implanter Parts

Reference: ColeKeef324

Item Part No. Description Qty Unit Price
1 0090-91130 80KV Pre-Accel Stack 6 Please call or   Email for Pricing.   Please include Reference: ColeKeef324
2 0090-91131 HV Power Supply 5 Please call or   Email for Pricing.   Please include Reference: ColeKeef324
3 0090-91535 Source Chassis 5 Please call or   Email for Pricing.   Please include Reference: ColeKeef324
4 0240-95932 Transformer 2 Please call or   Email for Pricing.   Please include Reference: ColeKeef324
1 0090-91514 Scim Box 3 Please call or   Email for Pricing.   Please include Reference: ColeKeef324

Note 1: All of the above parts are believed to be in perfect condition.

Note 2: Miscellaneous cables and gauges thrown in at no additional cost with purchase of all items listed above.

Note 2: All products are subject to availability at time and date of inquiry.

If interested,   please click here.  Please include Reference.


Novellus System Parts

Item Part No. Description Qty Unit Price
1 16-033931-00 200mm Showerhead 6 $985.00
2 16-033932-00 150mm Showerhead 8 $925.00
3 02-0093-00 One Arm Robot 1 $17,500.00
3A 02-0093-00 One Arm Robot 1 $15,00.00 (With Exchange)
4 15-00701-00 Bottom Fork Plate, 150mm 1 $1,100.00
5 15-00703-00 Top Fork Plate, 150mm 1 $985.00
6 02-029514-01 Left Indexer Assy. (OEM) 1 $18,500.00
7 02-029514-02 Right Indexer Assy. (OEM) 1 $18,500.00

If interested,   please click here.

Note: All items are subject to availability at time and date of inquiry.


Ion Implanters for Liquidation
End User or Reseller Specials, Make Offers

List and Descriptions

    Eaton NV 3206
    • Medium Current
    • Quantity: 2 Ea
    • Serial Nos: 300 and 344

    Varian 350D
    • Quantity: 1 Ea
    • Serial No. 00508570
    • Comes with 2 end stations: 5 inch and 4 inch
    • Software version 4.4.2.1

    Varian CF3000
    • Quantity: 1 Ea

    Eaton NV 10-80
    • High Current
    • Quantity: 1 Ea
    • Serial No. 0350245
    • All latest Eaton revisions included
    • 5 Inch Clampless
    • Flood Gun 4 Power Supply
    • Turbo Pumped Source

    Eaton NV 10-160, Rebuilt
    • Quantity: 2 Ea
    • Serial Nos: 11 and 52
    • One with 6 inch manual load and the other with 6 inch clampless AT4

Submit offer per system or entire package!!!

If interested,   please click here.

Note: Subject to availability at time and date of inquiry.


Applied Materials Parts List

Item Part Number Description Application Qty
1 03-83601-00   8100 1
2 0010-00265 Blade Assy, 125 mm 8300 1
3 0010-00266 Blade Assy, 150 mm 8300 1
4 0010-00309 wGate Valve Assy 8320/8330 1
5 0010-00338w Ped Assy, 150mm, Oxide, Lower 8310 1
6 0010-00339 Ped Assy, Gas Cooled, 150mm, Oxide, Upper 8300 13
7 0010-00339w wPed Assy, Gas Cooled, 150mm, Oxide, Upper 8300 14
8 0010-00346 wPed Assy, 100mm, Ox 8310 46
9 0010-00346w Ped Assy, 100mm, Ox 8310 12
10 0010-00387 wPed Sub Assy w/ Elastomer, 125mm 8300 10
11 0010-00562 Blade Assy, 100mm 8300 1
12 0010-00663 Ped Assy, Gas Cooled, 150mm, Oxide, Bottom 8300 6
13 0010-00669 Ped Assy, Gas Cooled, 125mm 8300 2
14 0010-00673 Ped Assy, Gas Cooled, 150mm, Oxide, Top 8300 6
15 0010-00674 Ped Assy, Gas Cooled, 150mm, Oxide, Center 8300 5
16 0010-09035 Throttle Valve 5000 1
17 0010-09119 Reducer Box 5000 1
18 0010-17004     1
19 0020-03237 Ped Assy, 200mm, Oxide 8300 2
20 0020-12051 Insert Key 7800 8
21 0020-17042 Race, Brg, Outer, Rot Dr 7810/7700 2
22 0020-32044 Susceptor   2
23 0040-09255      
24 0040-09256     10
25 0040-11217     1
26 0090-00022 wStepping Motor Assy 2.2 Atmosphere 8300 2
27 0090-90333w (0090-90474) Chassis Module Flood Gun 9200 1
28 0100-09162 Manometer Select BD Assy &nbjsp; 3
29 0100-11004 MFC Interface PWB 7010 3
30 0100-20003 Digital I/O Bd   3
31 0100-20100 Input/Output Bd   1
32 0100-40004 Personality Bd   2
33 0100-40012 Backplane Fuse Status BS Assy   1
34 0100-40015 Directional Coupler   1
35 0100-40021 Main Frame Backplane Bd   1
36 0100-40033 Electrostatic Chuck PS Bd   1
37 0100-40044 Remote Chamber Int Board   1
38 0100-76018 Pneumatic Interconnect Bd   1
39 0110-20166 Rem Gas Box Intercon   1
40 0150-09424 Cable   2
41 0190-11053 Manifold, Mark VII 7010 1
42 0190-14016 Output (9) SCR CNTR 7700/7800 2
43 0190-20024     1
44 0190-40001 Mainframe Pneumatic   1
45 0225-03493 wPed Assy, 150mm, Oxide, Bottom 5000E/8300 25
46 0225-03494 wPed Assy, 150mm, Oxide, Top 5000E/8300 33
47 0225-16111 Electronic Timer 5000E/8300 33
48 0680-01027 CB 2P 15Amp 8300 5
49 0680-01196 Circuit Breaker 5000E 1
50 0920-01011     1
51 0980-01001 Keyboard Keytronic 5000 1
52 1140-01054 PS 24V 9A Reg 8300 1
53 1140-01091w     2
54 1350-01080 Span   1
55 1410-01012 wHeater 120VAC 220W 8300 2
56 33-10006-00 Press Sw SPST 8100 1
57 3620-01082 wConverter, NT 1000/1500 w/2 piece cable 8300 3
58 3870-01046w Gate Valve 8300 1
59 3870-01244 KF40 Norcal Valve 5000 1
60 4020-01033     3
61 642987 Motor   5
62 650443w Electrode assy, Scrwless 3300 1
63 670284 Tylan Cable 7810 1
64 831235 Flow Gauge 10-30 GPM 7600 1
65 999187 Seal, Dual Seal Pump 7800 2

If interested in one or more items,   please click here.


R & D Equipment for Semiconductor Processing

Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.

Item Equipment Model Notes Voltage/Current Dimensions
1 SK Vapor Dryer 51028 IPA Dryer 240V/70A 45W X 24D X 100H
2 AEP Stripper UC-7550 Flat Panel Stripper 208V/200A 74W X 50D 94H
3 O3 Detector IN 2000-3 Ozone Monitor 120V/1.5A N/A
4 Steag Wet Etch FPD-400 Wet Etch with Robot 208V/60A 71W X 51L X 65H
5 AKT RIE 1600-ETCH 2 Etch Chambers 208V/240A Cluster Tool
6 AKT PVD 1600-PVD 2 Sputter Chambers 208V/320A Cluster Tool
7 Steag Coater FPD 400 Resist Coater/Developer 208V/175A 115W X 82D X 73H
8 Tamarack T-300 Photo Lithography Tool 208V/15A 67W X 59D X 103H

If interested in one or more items, please click here.


Rotary Polishing Wheel

Please click on the image below for enlarged photo

Mounted Felt Polishing Wheel

  • 3M Satin Finishing Material
  • Stainless steel material for 3/32" shank and related parts
    • Specifications:
      • 7/8 X 3/8 X 3/32
      • 7/8 X X 3/32

Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.

If interested please click here.


If interested in one or more items, please click here.

If you need Mass Flow Controllers, please click here.

If you need Vacuum Pumps, please click here.


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E-mail: info@semiconweb.net


Great World of Shopping | Engineering, Design, and Manufacturing Services | Measurement and Turbo Balancing System, Semiconductor Equipment and Related Major Components | Fluid Dispensing & Metering Pumps | Ion Implanter Parts, R & D Semiconductor Equipment | LAM Systems Parts & More Semiconductor Equipment | Mass Flow Controller List #1 | Mass Flow Controller List #2 | Mass Flow Controller List #3 | MFC’s, Turbo Balancing System, Semi Equipment, Etc. | Mass Flow Controller Related Products | Microscopes, R&D Semiconductor Equipment | New Parts List, R & D Semiconductor Equipment | Photos of Some Equipment and Parts | Semiconductor Equipment with Related Major Components | Test Systems & Semiconductor Equipment | R & D Semiconductor Equipment, Tegal Parts | Vacuum Pumps | Varian Parts List, Semiconductor Equipment | Equipment For Sale Hot List | Equipment Wanted, List #1 | Equipment Wanted, List #2 | Equipment Wanted, List #3 | Used Semiconductor Equipment, Vacuum Systems, Pumps, Etc: fl01 | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02 | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02a | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02b | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02c | Vacuum Pumps: Turbo, Dry, Cryo, Etc.: fl03 | Semiconductor Back End Equipment, Etc.: fl04 | Helium Leak Detectors, Rebuilt: fl05 | Wafer Fab or Semiconductor Equipment: fl06 | Plasma Systems, Vacuum Pumps, Etc: fl07A | Vacuum Systems, Vacuum Pumps, Etc: fl07B | Vacuum Packaging Systems, Pumps, Power Supplies, Etc: fl08 | Used or Pre-Owned Semiconductor Equipment: fl09 | Semiconductor Equipment: fl10 | Semiconductor Equipment: fl11 | Semiconductor Equipment: fl12 | Semiconductor Equipment: fl13 | Semiconductor Equipment: fl14 | Semiconductor Equipment: fl15 | Semiconductor Equipment: fl16 | Eight Inch (8 Inch) Semiconductor Equipment: fl17 | Helium Leak Detector & Vacuum Pumps: fl18 | Vacuum Pumps: Oil, Turbo, Dry, Cryo, & More - fl18a | Helium Leak Detectors, RF Generators, Vacuum Pumps, Etc: fl19 | Novellus Parts, Concept One & Two, Wafer Fab Equipment, fl20 | Leybold Helium Leak Detectors, Converters, Turbo Pumps, Etc: fl21 | Various Helium Leak Detectors, Vacuum Pumps, Etc: fl22 | 6 Inch Wafer Fab Equipment, Back End Semiconductor Equipment, Etc: fl23 | Back End Semiconductor Equipment, 6 Inch Wafer Fab Equipment, Back End Equipment, Etc: fl24 | Used or Surplus Semiconductor & Back End Equipment, Etc: fl25 | Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26 | 4 Inch Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26a | 4 Inch Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26b | Six Inch (6 Inch) Semiconductor or Wafer Fab Equipment Package, Etc. fl27 | Semiconductor Equipment: Ion Implanters, Furnaces, Resistivity Meter, Etc. fl28 | Semiconductor Equipment: Kokusai & TEL Furnaces, Ion Implanters, 4 Point Probe, Etc. fl29 | Semiconductor Equipment: Sputterers, Etchers, Steppers, Kokusai & TEL Furnaces, Ion Implanters, Etc. fl30 | Surplus Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. fl31 | Surplus Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. fl32 | KLA Equipment, Back End & 6 Inch Semiconductor Equipment, Dicing Saws, fl33 | Scanning Electron Microscopes, SEMS, Measurement Systems, & Semiconductor Equipment, fl34 | Semiconductor Equipment Parts, fl35 | Rebuilt or Refurbished Semiconductor Equipment, fl36 | Vacuum Systems, Wafer Fab Line, Etc, fl37 | Semiconductor Equipment, Vacuum Plasma Systems, Power Supplies, Vacuum Pumps, Parts, Etc, fl38 | Business Opportunities Online & Internet Resources


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