Used or Pre-owned and Rebuilt Applied Materials Semiconductor Equipment, AME System Parts, Ion Implanters, Polishing Wheel, Etc.
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Novellus Concept One, Lam 4520i, KLA-Tencor Surfscan SP1, Axcelis-Eaton Ion Implanters GSD-200E and GSD-200EE, Varian 3190 Configurations and Equipment List
Please click on the links below to explore Systems configurations and other equipment for sale.
- Novellus, Concept One, #734 System
- Novellus, Concept One, #770 System
- Novellus, Concept One, #852 System
- Lam 4520i, ER
- KLA-Tencor Surfscan, Model SP1, ER
- Axcelis-Eaton, GSD-200EE, ER
- Axcelis-Eaton, GSD-200E, MS
- Varian Sputtering System, 5 Inch 3190
- Significant Parts for Semiconductor Equipment
- Significant Parts for Semiconductor Equipment #2
- Equipment and Parts Wanted
Contents
To see photos or pictures of other equipment and parts, please click here.
The following equipment can be ordered with a lead time of 3-4 weeks upon receipt of order. All equipment are subject to availability at time and date of inquiry. Please click here to request for details.
Equipment List
- Applied Materials, P5000, 3 chamber CVD, with pumps
- Applied Materials, P5000, 2 chamber Etch with pumps
- Applied Materials, 83xx Etch system with pumps
- LAM, 490, 590 etch system with pumps
- LAM, 44xx, 45xx etch system with pumps
- Gasonics, Aura 1000 with pump
- Gasonics, AE2001 with pump
- Gasonics, L3510 with pump
Vacuum pumps are rebuilt Edwards QDP80/250 or QDP80.
Contents
Guaranteed to meet or exceed AMAT P5000 Specifications
System Configuration
- P5000 Mark II mainframe
- Configured for 150mm (6") wafers, SMF
- Standard remote frame
- 380VAC/50Hz/3 phase
- Expanded gas panel with mini-controller
- Phase III robot I/O wafer sensor
- 8 slot storage elevator
- Bolt down loadlock with particle reduction kit
- 21 slot VME with 3 1/2" FDD
- Hardware Y2K compliant
- VGA monitor/light pens through the wall
- Stand Alone Remote Monitor
- Three (3) PECVD standard chamber
- One (1) AMAT heat exchanger
- Three (3) ENI-12B RF generators
- Phase IV RF Match
- Unit 1660 MFC's
- Dual spring type throttle valve
- Edwards pump interface
- Pump(s) quoted separately
- Installation quoted separately
Chambers
- Chamber A: PECVD standard chamber, process Kit, 150mm
- Chamber B: PECVD standard chamber, process Kit, 150mm
- Chamber C: Blank
- Chamber D: PECVD standard chamber, process Kit, 150mm
Note: chambers can be configured differently per buyer's request.
PETEOS Chambers (A,B,D)
- Standard universal chambers
- 150mm process kit (100% New)
- ENI OEM 12B RF Generator with Phase IV match
- Standard throttle valve
- 100 Torr manometer
- Up to 4 Unit 1660 MFC's per chamber
- Gas panel rebuilt with New lines and re-calibrated MFC's, it looks NEW
If interested, please click here.
Note: Subject to availability at time and date of inquiry.
Contents
Guaranteed to meet or exceed AMAT P5000 Specifications
System Configuration
- P5000 Mark II mainframe
- Configured for 150mm (6") wafers, SMF
- Standard remote frame
- 380VAC/50Hz/3 phase
- Expanded gas panel with mini-controller
- Phase III robot I/O wafer sensor
- 8 slot storage elevator
- Bolt down loadlock with particle reduction kit
- 21 slot VME with 3 1/2" FDD
- Hardware Y2K compliant
- VGA monitor/light pens through the wall
- Stand Alone Remote Monitor
- Three (3) universal PETEOS chambers
- One (1) AMAT heat exchanger
- Three (3) ENI-12B RF generators
- Phase IV RF Match
- Unit 1660 MFC's
- Dual spring type throttle valve
- Edwards pump interface
- Hot Box IV
- Schumacher TEOS Delivery Cabinet (canisters not included)
- Pump(s) quoted separately
- Installation quoted separately
Chambers
- Chamber A: PETEOS/USG chamber, process Kit, 150mm
- Chamber B: PETEOS/USG chamber, process Kit, 150mm
- Chamber C: Blank
- Chamber D: PETEOS/USG chamber, process Kit, 150mm
Note: chambers can be configured differently per buyer's request.
PETEOS Chambers (A,B,D)
- Standard Universal PETEOS chambers
- 150mm process kit (100% New)
- ENI OEM 12B RF Generator with Phase IV match
- Standard throttle valve
- 100 Torr manometer
- Up to 4 Unit 1660 MFC's per chamber
- Gas panel rebuilt with New lines and re-calibrated MFC's, it looks NEW
If interested, please click here.
Note: Subject to availability at time and date of inquiry.
Contents
Guaranteed To Meet OEM Specifications
Basic Configuration:
- Anodized Al chamber with quarts chamber window
- Pic & place robot wafer handling
- Load/unload cassette elevator
- End point detection
- Microprocessor interface pressure control
- Magnetron power supply
- Lamp alarm board
- Lamps and Quartz installed
- Throttle valve included
- Export packaging included
- Edwards QDP80/250 pump/blower set included
If interested, please click here.
Note: Subject to availability at time and date of inquiry.
Contents
Reference: ColeKeef324
Note 1: All of the above parts are believed to be in perfect condition.
Note 2: Miscellaneous cables and gauges thrown in at no additional cost with purchase of all items listed above.
Note 2: All products are subject to availability at time and date of inquiry.
If interested, please click here. Please include Reference.
Contents
| Item
| Part No.
| Description
| Qty
| Unit Price
|
| 1
| 16-033931-00
| 200mm Showerhead
| 6
| $985.00
|
| 2
| 16-033932-00
| 150mm Showerhead
| 8
| $925.00
|
| 3
| 02-0093-00
| One Arm Robot
| 1
| $17,500.00
|
| 3A
| 02-0093-00
| One Arm Robot
| 1
| $15,00.00 (With Exchange)
|
| 4
| 15-00701-00
| Bottom Fork Plate, 150mm
| 1
| $1,100.00
|
| 5
| 15-00703-00
| Top Fork Plate, 150mm
| 1
| $985.00
|
| 6
| 02-029514-01
| Left Indexer Assy. (OEM)
| 1
| $18,500.00
|
| 7
| 02-029514-02
| Right Indexer Assy. (OEM)
| 1
| $18,500.00
|
If interested, please click here.
Note: All items are subject to availability at time and date of inquiry.
Contents
List and Descriptions
Eaton NV 3206
- Medium Current
- Quantity: 2 Ea
- Serial Nos: 300 and 344
Varian 350D
- Quantity: 1 Ea
- Serial No. 00508570
- Comes with 2 end stations: 5 inch and 4 inch
- Software version 4.4.2.1
Eaton NV 10-80
- High Current
- Quantity: 1 Ea
- Serial No. 0350245
- All latest Eaton revisions included
- 5 Inch Clampless
- Flood Gun 4 Power Supply
- Turbo Pumped Source
Eaton NV 10-160, Rebuilt
- Quantity: 2 Ea
- Serial Nos: 11 and 52
- One with 6 inch manual load and the other with 6 inch clampless AT4
Submit offer per system or entire package!!!
If interested, please click here.
Note: Subject to availability at time and date of inquiry.
Contents
| Item
| Part Number
| Description
| Application
| Qty
|
| 1
| 03-83601-00
| |
8100
| 1
|
| 2
| 0010-00265
| Blade Assy, 125 mm
| 8300
| 1
|
| 3
| 0010-00266
| Blade Assy, 150 mm
| 8300
| 1
|
| 4
| 0010-00309
| wGate Valve Assy
| 8320/8330
| 1
|
| 5
| 0010-00338w
| Ped Assy, 150mm, Oxide, Lower
| 8310
| 1
|
| 6
| 0010-00339
| Ped Assy, Gas Cooled, 150mm, Oxide, Upper
| 8300
| 13
|
| 7
| 0010-00339w
| wPed Assy, Gas Cooled, 150mm, Oxide, Upper
| 8300
| 14
|
| 8
| 0010-00346
| wPed Assy, 100mm, Ox
| 8310
| 46
|
| 9
| 0010-00346w
| Ped Assy, 100mm, Ox
| 8310
| 12
|
| 10
| 0010-00387
| wPed Sub Assy w/ Elastomer, 125mm
| 8300
| 10
|
| 11
| 0010-00562
| Blade Assy, 100mm
| 8300
| 1
|
| 12
| 0010-00663
| Ped Assy, Gas Cooled, 150mm, Oxide, Bottom
| 8300
| 6
|
| 13
| 0010-00669
| Ped Assy, Gas Cooled, 125mm
| 8300
| 2
|
| 14
| 0010-00673
| Ped Assy, Gas Cooled, 150mm, Oxide, Top
| 8300
| 6
|
| 15
| 0010-00674
| Ped Assy, Gas Cooled, 150mm, Oxide, Center
| 8300
| 5
|
| 16
| 0010-09035
| Throttle Valve
| 5000
| 1
|
| 17
| 0010-09119
| Reducer Box
| 5000
| 1
|
| 18
| 0010-17004
| |
|
1
|
| 19
| 0020-03237
| Ped Assy, 200mm, Oxide
| 8300
| 2
|
| 20
| 0020-12051
| Insert Key
| 7800
| 8
|
| 21
| 0020-17042
| Race, Brg, Outer, Rot Dr
| 7810/7700
| 2
|
| 22
| 0020-32044
| Susceptor
| |
2
|
| 23
| 0040-09255
| |
|
|
| 24
| 0040-09256
| |
|
10
|
| 25
| 0040-11217
| |
|
1
|
| 26
| 0090-00022
| wStepping Motor Assy 2.2 Atmosphere
| 8300
| 2
|
| 27
| 0090-90333w (0090-90474)
| Chassis Module Flood Gun
| 9200
| 1
|
| 28
| 0100-09162
| Manometer Select BD Assy
| &nbjsp; |
3
|
| 29
| 0100-11004
| MFC Interface PWB
| 7010
| 3
|
| 30
| 0100-20003
| Digital I/O Bd
| |
3
|
| 31
| 0100-20100
| Input/Output Bd
| |
1
|
| 32
| 0100-40004
| Personality Bd
| |
2
|
| 33
| 0100-40012
| Backplane Fuse Status BS Assy
| |
1
|
| 34
| 0100-40015
| Directional Coupler
| |
1
|
| 35
| 0100-40021
| Main Frame Backplane Bd
| |
1
|
| 36
| 0100-40033
| Electrostatic Chuck PS Bd
| |
1
|
| 37
| 0100-40044
| Remote Chamber Int Board
| |
1
|
| 38
| 0100-76018
| Pneumatic Interconnect Bd
| |
1
|
| 39
| 0110-20166
| Rem Gas Box Intercon
| |
1
|
| 40
| 0150-09424
| Cable
| |
2
|
| 41
| 0190-11053
| Manifold, Mark VII
| 7010
| 1
|
| 42
| 0190-14016
| Output (9) SCR CNTR
| 7700/7800
| 2
|
| 43
| 0190-20024
| |
|
1
|
| 44
| 0190-40001
| Mainframe Pneumatic
| |
1
|
| 45
| 0225-03493
| wPed Assy, 150mm, Oxide, Bottom
| 5000E/8300
| 25
|
| 46
| 0225-03494
| wPed Assy, 150mm, Oxide, Top
| 5000E/8300
| 33
|
| 47
| 0225-16111
| Electronic Timer
| 5000E/8300
| 33
|
| 48
| 0680-01027
| CB 2P 15Amp
| 8300
| 5
|
| 49
| 0680-01196
| Circuit Breaker
| 5000E
| 1
|
| 50
| 0920-01011
| |
|
1
|
| 51
| 0980-01001
| Keyboard Keytronic
| 5000
| 1
|
| 52
| 1140-01054
| PS 24V 9A Reg
| 8300
| 1
|
| 53
| 1140-01091w
| |
|
2
|
| 54
| 1350-01080
| Span
| |
1
|
| 55
| 1410-01012
| wHeater 120VAC 220W
| 8300
| 2
|
| 56
| 33-10006-00
| Press Sw SPST
| 8100
| 1
|
| 57
| 3620-01082
| wConverter, NT 1000/1500 w/2 piece cable
| 8300
| 3
|
| 58
| 3870-01046w
| Gate Valve
| 8300
| 1
|
| 59
| 3870-01244
| KF40 Norcal Valve
| 5000
| 1
|
| 60
| 4020-01033
| |
|
3
|
| 61
| 642987
| Motor
| |
5
|
| 62
| 650443w
| Electrode assy, Scrwless
| 3300
| 1
|
| 63
| 670284
| Tylan Cable
| 7810
| 1
|
| 64
| 831235
| Flow Gauge 10-30 GPM
| 7600
| 1
|
| 65
| 999187
| Seal, Dual Seal Pump
| 7800
| 2
|
If interested in one or more items, please click here.
Contents
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool
| 208V/15A
| 67W X 59D X 103H
|
If interested in one or more items, please click here.
Contents
Please click on the image below for enlarged photo
Mounted Felt Polishing Wheel
- 3M Satin Finishing Material
- Stainless steel material for 3/32" shank and related parts
- Specifications:
- 7/8 X 3/8 X 3/32
- 7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
If interested please click here.
Contents
If interested in one or more items, please click here.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
Please contact us at:
OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
E-mail: info@semiconweb.net
Engineering, Design, and Manufacturing Services | Measurement and Turbo Balancing System, Semiconductor Equipment and Related Major Components | Fluid Dispensing & Metering Pumps | Ion Implanter Parts, R & D Semiconductor Equipment | LAM Systems Parts & More Semiconductor Equipment | Mass Flow Controller List #1 | Mass Flow Controller List #2 | Mass Flow Controller List #3 | MFC’s, Turbo Balancing System, Semi Equipment, Etc. | Mass Flow Controller Related Products | Microscopes, R&D Semiconductor Equipment | New Parts List, R & D Semiconductor Equipment | Photos of Some Equipment and Parts | Semiconductor Equipment with Related Major Components | Test Systems & Semiconductor Equipment | R & D Semiconductor Equipment, Tegal Parts | Vacuum Pumps | Varian Parts List, Semiconductor Equipment | Equipment For Sale Hot List | Equipment Wanted, List #1 | Equipment Wanted, List #2 | Equipment Wanted, List #3 | Used Semiconductor Equipment, Vacuum Systems, Pumps, Etc: fl01 | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02 | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02a | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02b | Used Semiconductor Equipment: Vacuum Systems, Lithography, Etc: fl02c | Vacuum Pumps: Turbo, Dry, Cryo, Etc.: fl03 | Semiconductor Back End Equipment, Etc.: fl04 | Helium Leak Detectors, Rebuilt: fl05 | Wafer Fab or Semiconductor Equipment: fl06 | Plasma Systems, Vacuum Pumps, Etc: fl07A | Vacuum Systems, Vacuum Pumps, Etc: fl07B | Vacuum Packaging Systems, Pumps, Power Supplies, Etc: fl08 | Used or Pre-Owned Semiconductor Equipment: fl09 | Semiconductor Equipment: fl10 | Semiconductor Equipment: fl11 | Semiconductor Equipment: fl12 | Semiconductor Equipment: fl13 | Semiconductor Equipment: fl14 | Semiconductor Equipment: fl15 | Semiconductor Equipment: fl16 | Eight Inch (8 Inch) Semiconductor Equipment: fl17 | Helium Leak Detector & Vacuum Pumps: fl18 | Vacuum Pumps: Oil, Turbo, Dry, Cryo, & More - fl18a | Helium Leak Detectors, RF Generators, Vacuum Pumps, Etc: fl19 | Novellus Parts, Concept One & Two, Wafer Fab Equipment, fl20 | Leybold Helium Leak Detectors, Converters, Turbo Pumps, Etc: fl21 | Various Helium Leak Detectors, Vacuum Pumps, Etc: fl22 | 6 Inch Wafer Fab Equipment, Back End Semiconductor Equipment, Etc: fl23 | Back End Semiconductor Equipment, 6 Inch Wafer Fab Equipment, Back End Equipment, Etc: fl24 | Used or Surplus Semiconductor & Back End Equipment, Etc: fl25 | Four Inch (4 Inch) Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26 | 4 Inch Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26a | 4 Inch Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. fl26b | Six Inch (6 Inch) Semiconductor or Wafer Fab Equipment Package, Etc. fl27 | Semiconductor Equipment: Ion Implanters, Furnaces, Resistivity Meter, Etc. fl28 | Semiconductor Equipment: Kokusai & TEL Furnaces, Ion Implanters, 4 Point Probe, Etc. fl29 | Semiconductor Equipment: Sputterers, Etchers, Steppers, Kokusai & TEL Furnaces, Ion Implanters, Etc. fl30 | Surplus Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. fl31 | Surplus Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. fl32 | KLA Equipment, Back End & 6 Inch Semiconductor Equipment, Dicing Saws, fl33 | Scanning Electron Microscopes, SEMS, Measurement Systems, & Semiconductor Equipment, fl34 | Semiconductor Equipment Parts, fl35 | Rebuilt or Refurbished Semiconductor Equipment, fl36 | Vacuum Systems, Wafer Fab Line, Etc, fl37 | Semiconductor Equipment, Vacuum Plasma Systems, Power Supplies, Vacuum Pumps, Parts, Etc, fl38 | Business Opportunities Online & Internet Resources | Advertise Worldwide Online
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Semiconductor Equipment Resource Center
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