Please contact:

 

            OLM Enterprises

            Tel: 408-259-1900  Fax: 408-259-1990

                Email: info@semiconweb.net

                URL:  http://semiconweb.net/

 

Varian 3190

Reference: ER5Var3190

Serial Number 84388-279

 

        Configuration:

      125mm wafer size
      Fluke Controller
      (1) Sputter Etch Station
      (2) Deposition Stations
     o Mini Quantum guns
      (1) RF Services RF generator
      (2) 12KW DC Power Supplies (air cooled)
      MKS 250A controller
      3 each Eurotherm temperature controllers
      Fluke 1720A controller
      Varian thin film monitor
      HP 3438A multi-meter
      Varian wafer process control
      Varian wafer loader control
      Varian alarm control
      Varian vacuum system control
      Varian thermocouple gauge control
      Varian 845 ionization gauge
      Varian RF matching controller
      Varian cassette motor control
      CTI Cryogenics On-Board controller
      CTI-8R cryo pump with compressor