Please contact:

 

            OLM Enterprises

            Tel: 408-259-1900  Fax: 408-259-1990

                Email: info@semiconweb.net

                URL:  http://semiconweb.net/

 

Varian 3190

Reference: ER5Var3190

Serial Number 84388-279

 

·        Configuration:

      · 125mm wafer size
      · Fluke Controller
      · (1) Sputter Etch Station
      · (2) Deposition Stations
     o Mini Quantum guns
      · (1) RF Services RF generator
      · (2) 12KW DC Power Supplies (air cooled)
      · MKS 250A controller
      · 3 each Eurotherm temperature controllers
      · Fluke 1720A controller
      · Varian thin film monitor
      · HP 3438A multi-meter
      · Varian wafer process control
      · Varian wafer loader control
      · Varian alarm control
      · Varian vacuum system control
      · Varian thermocouple gauge control
      · Varian 845 ionization gauge
      · Varian RF matching controller
      · Varian cassette motor control
      · CTI Cryogenics On-Board controller
      · CTI-8R cryo pump with compressor