OLM Enterprises

Tel: 408-259-1900  Fax: 408-259-1990

Email: info@semiconweb.net

URL: http://semiconweb.net/

 

 

KLA-Tencor Surfscan SP1

Non-Patterned Wafer Particle Measurement System

 

ID 1483

Serial Number:  0697-130

Configurable for 150mm-200mm Wafer Sizes

Original Manufacture Date:  June 1997

Model Number:  378534

System is in excellent condition and has seen little use

Normal Illumination Defect Sensitivity:  0.079um

Haze Sensitivity:  0.005PPM

Argon Ion Laser (488-nm)

Equipe Robot:  ESC 200

RTDC (Real Time Defect Classification)

V 208; A 30; Ph 1: Hz 60

 

Asking Price: Please call or send an inquiry.

               Reference: ER1483