Novellus, C1-150 without TEOS

 

Please contact:

            OLM Enterprises

            746 Macklin Court, San Jose, CA 95133

                U.S.A.

                Tel: 408-259-1900  Fax: 408-259-1990

                Email: info@semiconweb.net

                http://semiconweb.net

 

Configuration Novellus C1-150 without TEOS

Serial Number:  94-41-852

 

            Wafer Size:  100mm (4")

 

            Microcontamination Package:

                        Load Lock Pressure control option only installed

            Process Gas Panel:  9-Channel

            MFC Type:  UNIT INSTRUMENTS

                        A1 10 SLPM N2

                        A2 1 SLPM N2

                        A3 1 SLPM N2

                        A4 2 SLPM N2

                        A5 None

                        B1 10 SLPM N2

                        B2 5 SLPM NH3

                        B3 10 SLPM N2

                        B4 10 SLPM N2

                        B5 None

                        B6 None

 

            Pneumatic Panel:  New Generation

            Loadlock Foreline:  With Throttle Valve (Micro)

            Reactor Foreline:  Internal Cold

 

            Gas Distribution:  Complete

            RF Distribution:  Complete

            Chamber Ring:  Etch Resistant Quartz

            Chamber Ring:  Maintenance Window (Blank-Off)

            RF Match Network:  Trazar – AMU2-1

 

            RF Isolated TC

            RF Shunt/Heater ISO, Manometer

            TC/Heater AC Assembly

            Heater Block

 

            Spindle Indexer Assy

 

            Loadlock Cassette Door:  New Style

            Wafer On Paddle Sensor

            Platform:  Non-Contact

            Cassettes:  Metal

 

            Robot:  Single Arm, Dual

 

            Main AC Panel:

                        Remote AC Panel:  New Generation

                        Power Supply:  Quad/24V

 

            Instrument Panel:  Pressure Controller (Tylan)

            Instrument Panel:  Valve Display Controller (Tylan)

            Instrument Panel:  Temperature Controller (Eurotherm)

            Instrument Panel:  Excess Temperature Interlock (MeterMaster)

            Instrument Panel:  Vaccum Pressure Controller (Hastings)

            Instrument Panel:  Load-lock Throttle Valve Pressure Controller (MKS)

            Front Monitor:  Carrol Touch

            Maintenance Monitor:  Monochrome

            Computer:  486

            Disk Drive:  5.25”

            Multibus:  CPU (Standard), Slot 2

            Multibus:  RAM Memory-Slot 3

            Multibus:  Digital I/O #1-Slot 4

            Multibus:  Digital I/O #2-Slot 5

            Multibus:  Analog Input-Slot 6

            Multibus:  Analog Out #1-Slot 7

            Multibus:  Analog Out #2-Slot 8

            Multibus:  Lift Indexer-Slot 10

            Multibus:  Rotate Indexer-Slot 11

            Multibus:  Extend Indexer-Slot 12

            Terminal Panel:  New Generation (150/200)

            Water Flow Switch

            Post Process Audible Alarm

            End Point Detection:  Single

            End Point Head

 

            High Frequency RF Generator:  ENI 28B-04

            Low Frequency RF Generator:  ENI 2HF

            Dual Frequency Option

            Remote Signal Cable (CA99)

            LF Coax (CA102)

            HF Signal Cable (CA96)

            LF Signal Cable (CA100)

 

Notes:

1.       Subject to availability at time and date of inquiry.

2.   Buyer may specify MFC’s.