Novellus, C1-150 without
TEOS
Please contact:
OLM Enterprises
746 Macklin Court, San Jose, CA 95133
U.S.A.
Tel: 408-259-1900 Fax: 408-259-1990
Email: info@semiconweb.net
Configuration
Novellus C1-150 without TEOS
Serial
Number: 94-41-852
Wafer Size: 100mm (4")
Microcontamination Package:
Load Lock Pressure control option only installed
Process Gas Panel: 9-Channel
MFC Type: UNIT INSTRUMENTS
A1 10 SLPM N2
A2 1 SLPM N2
A3 1 SLPM N2
A4 2 SLPM N2
A5 None
B1 10 SLPM N2
B2 5 SLPM NH3
B3 10 SLPM N2
B4 10 SLPM N2
B5 None
B6 None
Pneumatic Panel: New Generation
Loadlock Foreline: With Throttle Valve (Micro)
Reactor Foreline: Internal Cold
Gas Distribution: Complete
RF Distribution: Complete
Chamber Ring: Etch Resistant Quartz
Chamber Ring: Maintenance Window (Blank-Off)
RF Match Network: Trazar – AMU2-1
RF Isolated TC
RF Shunt/Heater ISO, Manometer
TC/Heater AC Assembly
Heater Block
Spindle Indexer Assy
Loadlock Cassette Door: New Style
Wafer On Paddle Sensor
Platform: Non-Contact
Cassettes: Metal
Robot: Single Arm, Dual
Main AC Panel:
Remote AC Panel: New Generation
Power Supply: Quad/24V
Instrument Panel: Pressure Controller (Tylan)
Instrument Panel: Valve Display Controller (Tylan)
Instrument Panel: Temperature Controller (Eurotherm)
Instrument Panel: Excess Temperature Interlock (MeterMaster)
Instrument Panel: Vaccum Pressure Controller (Hastings)
Instrument Panel: Load-lock Throttle Valve Pressure Controller
(MKS)
Front Monitor: Carrol Touch
Maintenance Monitor: Monochrome
Computer: 486
Disk Drive: 5.25”
Multibus: CPU (Standard), Slot 2
Multibus: RAM Memory-Slot 3
Multibus: Digital I/O #1-Slot 4
Multibus: Digital I/O #2-Slot 5
Multibus: Analog Input-Slot 6
Multibus: Analog Out #1-Slot 7
Multibus: Analog Out #2-Slot 8
Multibus: Lift Indexer-Slot 10
Multibus: Rotate Indexer-Slot 11
Multibus: Extend Indexer-Slot 12
Terminal Panel: New Generation (150/200)
Water Flow Switch
Post Process Audible Alarm
End Point Detection: Single
End Point Head
High Frequency RF Generator: ENI 28B-04
Low Frequency RF Generator: ENI 2HF
Dual Frequency Option
Remote Signal Cable (CA99)
LF Coax (CA102)
HF Signal Cable (CA96)
LF Signal Cable (CA100)
Notes:
1.
Subject
to availability at time and date of inquiry.
2. Buyer may specify MFC’s.