System Serial Number:  94-13-770

Checked by:  ERC

Date:  July 23, 2003

Configuration

Current

Comment

Y

N

O

0

Wafer Size:  100mm (4")

X

Wafer Size:  125mm (5")

X

Wafer Size:  150mm (6")

X

Wafer Size:  200mm (8")

X

1

TEOS:  Sigma 6, Doped/Controller/Battleship

X

TEOS:  Sigma 6, UnDoped/Controller/Battleship

X

Microcontamination Package

X

Process Gas Panel:  8-Channel

X

Process Gas Panel:  9-Channel

X

Process Gas Panel:  11-Channel

X

MFC Type:  AERA, Brooks, UNIT

UNIT 1100

A1

A2

A3

A4

A5

B1

B2

B3

B4

B5

B6

2

Pneumatic Panel:  Classic

X

Pneumatic Panel:  New Generation

X

Loadlock Foreline:  With Throttle Valve (Micro)

X

Loadlock Foreline:  Without Throttle Valve

X

Reactor Foreline:  Internal Cold

X

Reactor Foreline:  External Heated

X

Pump Main Chamber Blower

X

Load Lock Pump

X

3

Gas Distribution:  Complete

X

RF Distribution:  Complete

X

STATION 3 IS NO GOOD

Chamber Ring:  Etch Resistant Quartz, Sapphire

X

QUARTZ

Chamber Ring:  Maintenance Window

X

MAINTEN.  WINDOW IS BLANK OFF

RF Match Network:  RF Services, Trazar, AE

X

TRAZAR AMU2-1, SN 1160

4

RF Isolated TC

X

RF Shunt/Heater ISO, Manometer

X

TC/Heater AC Assembly

X

Heater Block:  Notched, Pinned-Station 1, Pinned All

X

5

Spindle Assy:  Alum, Ceramic, Minimum Contact Ceramic

X

CERAMIC

Spindle Indexer Assy

X

6

Loadlock Cassette Door:  New Style, Old Style

X

Wafer On Paddle Sensor

X

Wafer Cooling Station

X

Platform:  Non-Contact

X

Platform:  Contact

X

Cassettes:  Plastic, Metal

X

3 CASSETTES

7

Robot:  Single Arm, Dual

X

SINGLE ARM

8

Main AC Panel

X

MODIFIED WITH EXTRA HOLES

Remote AC Panel:  Classic, New Generation

X

NG WITH EXTRA HOLES

Power Supply:  Quad/24V, MEGA Pak

X

NON-STANDARD QUAD/24V

CE Mark

9

Instrument Panel:  Pressure Controller (Tylan)

X

Instrument Panel:  Valve Display Controller (Tylan)

X

Instrument Panel:  Temperature Controller (Eurotherm)

X

Instrument Panel:  Excess Temperature Interlock (MeterMaster)

X

Instrument Panel:  Vaccum Pressure Controller (Hastings)

X

Instrument Panel:  Throttle Valve Pressure Controller (MKS)

X

Instrument Panel:  Throttle Valve Pressure Controller, Heated (Tylan)

X

Front Monitor:  Carrol Touch, ELO, Other

X

CAROL TOUCH

Maintenance Monitor:  Monochrome, Other

X

MONOCHROME

Computer:  286, 386, 486, Pentium, Y2K

X

NON-STANDARD 486

Software:  Specify

Disk Drive:  5.25, 3.5 (External)

X

5.25

SECS/GEM Interace Software

?

Multibus:  CPU (Standard, TEOS Option), Slot 2

X

NON STANDARD

Multibus:  RAM Memory-Slot 3

X

Multibus:  Digital I/O #1-Slot 4

X

Multibus:  Digital I/O #2-Slot 5

X

Multibus:  Analog Input-Slot 6

X

Multibus:  Analog Out #1-Slot 7

X

Multibus:  Analog Out #2-Slot 8

X

Multibus:  Lift Indexer-Slot 10

X

Multibus:  Rotate Indexer-Slot 11

X

Multibus:  Extend Indexer-Slot 12

X

Terminal Panel:  Classic, New Generation (150/200)

X

NG

Water Flow Switch

X

PROTEUS

Post Process Audible Alarm

End Point Detection:  Single, Dual

X

SINGLE, MISSING COVER

End Point Head

X

10

High Frequency RF Generator:  ENI, AE (Model#)

X

OEM-28B  SN: 966F

Low Frequency RF Generator:  ENI, AE (Model#)

X

PL2HF  SN:  942

Dual Frequency Option

X

Remote Signal Cable (CA99)

X

HF RF Coax (CA57 or CA140)

X

LF Coax (CA102)

X

HF Signal Cable (CA96)

X

LF Signal Cable (CA100)

X

11

Skins:  Front Panel

X

Skins:  Side Panel Front Long, Left & Right

X

Skins:  Side Panel Front Top Short, Left & Right

X

Skins:  Side Panel Front Bottom Short, Left & Right

X

Skins:  Side Panel Back (Main AC)

X

Skins:  Rear Panel Option

X

Skins:  Top Panel

X

Skins:  End Point Computer Cover

X

Skins:  Facility Panel

X

Skins:  Foreline Cover

X

12

MISC:

LINE FILTER

X

MISSING COVER

FRONT PANEL

X

EXTRA CUTOUTS

KEYBOARDS

X

BROKEN

SLOT 2

X

MISSING DAUGHTER PCB

PINLATCH

X

BROKEN

RF FILTER BOX

X

FOR LOW FREQUENCY GENERATOR

CA97/98

X

I EACH

FOOT-PEDAL

X