Novellus, C1-150

 

Please contact:

            OLM Enterprises

            746 Macklin Court, San Jose, CA 95133

                U.S.A.

                Tel: 408-259-1900  Fax: 408-259-1990

                Email: info@semiconweb.net

                http://semiconweb.net/

 

Reference: ERC19413770

Please include Reference above in your inquiry.

 

 

System Serial Number:  94-13-770

 

 

 

 

 

Checked by:  ERC

 

 

 

Date:  July 23, 2003

 

Configuration

Current

Comment

 

 

Y

N

O

 

0

Wafer Size:  100mm (4")

 

X

 

 

 

Wafer Size:  125mm (5")

 

X

 

 

 

Wafer Size:  150mm (6")

X

 

 

 

 

Wafer Size:  200mm (8")

 

X

 

 

1

TEOS:  Sigma 6, Doped/Controller/Battleship

 

X

 

 

 

TEOS:  Sigma 6, UnDoped/Controller/Battleship

 

X

 

 

 

Microcontamination Package

 

X

 

 

 

Process Gas Panel:  8-Channel

 

X

 

 

 

Process Gas Panel:  9-Channel

X

 

 

 

 

Process Gas Panel:  11-Channel

 

X

 

 

 

MFC Type:  AERA, Brooks, UNIT

 

 

 

UNIT 1100

 

A1

 

 

 

 

 

A2

 

 

 

 

 

A3

 

 

 

 

 

A4

 

 

 

 

 

A5

 

 

 

 

 

B1

 

 

 

 

 

B2

 

 

 

 

 

B3

 

 

 

 

 

B4

 

 

 

 

 

B5

 

 

 

 

 

B6

 

 

 

 

2

Pneumatic Panel:  Classic

 

X

 

 

 

Pneumatic Panel:  New Generation

X

 

 

 

 

Loadlock Foreline:  With Throttle Valve (Micro)

 

X

 

 

 

Loadlock Foreline:  Without Throttle Valve

X

 

 

 

 

Reactor Foreline:  Internal Cold

X

 

 

 

 

Reactor Foreline:  External Heated

 

X

 

 

 

Pump Main Chamber Blower

 

X

 

 

 

Load Lock Pump

 

X

 

 

3

Gas Distribution:  Complete

X

 

 

 

 

RF Distribution:  Complete

X

 

 

STATION 3 IS NO GOOD

 

Chamber Ring:  Etch Resistant Quartz, Sapphire

X

 

 

QUARTZ

 

Chamber Ring:  Maintenance Window

X

 

 

MAINTEN.  WINDOW IS BLANK OFF

 

RF Match Network:  RF Services, Trazar, AE

X

 

 

TRAZAR AMU2-1, SN 1160

4

RF Isolated TC

X

 

 

 

 

RF Shunt/Heater ISO, Manometer

X

 

 

 

 

TC/Heater AC Assembly

X

 

 

 

 

Heater Block:  Notched, Pinned-Station 1, Pinned All

X

 

 

 

5

Spindle Assy:  Alum, Ceramic, Minimum Contact Ceramic

X

 

 

CERAMIC

 

Spindle Indexer Assy

X

 

 

 

6

Loadlock Cassette Door:  New Style, Old Style

X

 

 

 

 

Wafer On Paddle Sensor

X

 

 

 

 

Wafer Cooling Station

 

X

 

 

 

Platform:  Non-Contact

X

 

 

 

 

Platform:  Contact

 

X

 

 

 

Cassettes:  Plastic, Metal

X

 

 

3 CASSETTES

7

Robot:  Single Arm, Dual

X

 

 

SINGLE ARM

8

Main AC Panel

X

 

 

MODIFIED WITH EXTRA HOLES

 

Remote AC Panel:  Classic, New Generation

X

 

 

NG WITH EXTRA HOLES

 

Power Supply:  Quad/24V, MEGA Pak

X

 

 

NON-STANDARD QUAD/24V

 

CE Mark

 

 

 

 

9

Instrument Panel:  Pressure Controller (Tylan)

X

 

 

 

 

Instrument Panel:  Valve Display Controller (Tylan)

X

 

 

 

 

Instrument Panel:  Temperature Controller (Eurotherm)

X

 

 

 

 

Instrument Panel:  Excess Temperature Interlock (MeterMaster)

X

 

 

 

 

Instrument Panel:  Vaccum Pressure Controller (Hastings)

X

 

 

 

 

Instrument Panel:  Throttle Valve Pressure Controller (MKS)

 

X

 

 

 

Instrument Panel:  Throttle Valve Pressure Controller, Heated (Tylan)

 

X

 

 

 

Front Monitor:  Carrol Touch, ELO, Other

X

 

 

CAROL TOUCH

 

Maintenance Monitor:  Monochrome, Other

X

 

 

MONOCHROME

 

Computer:  286, 386, 486, Pentium, Y2K

X

 

 

NON-STANDARD 486

 

Software:  Specify

 

 

 

 

 

Disk Drive:  5.25, 3.5 (External)

X

 

 

5.25

 

SECS/GEM Interace Software

 

 

 

?

 

Multibus:  CPU (Standard, TEOS Option), Slot 2

 

 

X

NON STANDARD

 

Multibus:  RAM Memory-Slot 3

X

 

 

 

 

Multibus:  Digital I/O #1-Slot 4

X

 

 

 

 

Multibus:  Digital I/O #2-Slot 5

X

 

 

 

 

Multibus:  Analog Input-Slot 6

X

 

 

 

 

Multibus:  Analog Out #1-Slot 7

X

 

 

 

 

Multibus:  Analog Out #2-Slot 8

X

 

 

 

 

Multibus:  Lift Indexer-Slot 10

X

 

 

 

 

Multibus:  Rotate Indexer-Slot 11

X

 

 

 

 

Multibus:  Extend Indexer-Slot 12

X

 

 

 

 

Terminal Panel:  Classic, New Generation (150/200)

X

 

 

NG

 

Water Flow Switch

X

 

 

PROTEUS

 

Post Process Audible Alarm

 

 

 

 

 

End Point Detection:  Single, Dual

X

 

 

SINGLE, MISSING COVER

 

End Point Head

X

 

 

 

10

High Frequency RF Generator:  ENI, AE (Model#)

X

 

 

OEM-28B  SN: 966F

 

Low Frequency RF Generator:  ENI, AE (Model#)

X

 

 

PL2HF  SN:  942

 

Dual Frequency Option

X

 

 

 

 

Remote Signal Cable (CA99)

X

 

 

 

 

HF RF Coax (CA57 or CA140)

X

 

 

 

 

LF Coax (CA102)

X

 

 

 

 

HF Signal Cable (CA96)

X

 

 

 

 

LF Signal Cable (CA100)

X

 

 

 

11

Skins:  Front Panel

X

 

 

 

 

Skins:  Side Panel Front Long, Left & Right

X

 

 

 

 

Skins:  Side Panel Front Top Short, Left & Right

X

 

 

 

 

Skins:  Side Panel Front Bottom Short, Left & Right

X

 

 

 

 

Skins:  Side Panel Back (Main AC)

X

 

 

 

 

Skins:  Rear Panel Option

 

X

 

 

 

Skins:  Top Panel

X

 

 

 

 

Skins:  End Point Computer Cover

 

X

 

 

 

Skins:  Facility Panel

X

 

 

 

 

Skins:  Foreline Cover

X

 

 

 

12

MISC:

 

 

 

 

 

LINE FILTER

X

 

 

MISSING COVER

 

FRONT PANEL

X

 

 

EXTRA CUTOUTS

 

KEYBOARDS

X

 

 

BROKEN

 

SLOT 2

X

 

 

MISSING DAUGHTER PCB

 

PINLATCH

X

 

 

BROKEN

 

RF FILTER BOX

X

 

 

FOR LOW FREQUENCY GENERATOR

 

CA97/98

X

 

 

I EACH

 

FOOT-PEDAL

X