Please contact:
OLM Enterprises
Tel: 408-259-1900 Fax: 408-259-1990
Email: info@semiconweb.net
Reference: ERLAM4520i6
Please include Reference above in
your inquiry.
Lam 4520i, 6 Inch System Configuration:
Ø ID 1450
Ø Serial Number: 2653
Ø Configured for 150mm Wafers
Ø Through-the-Wall Configuration
Ø Isotropic Etch Module
Ø Hine 38A Indexers
Ø Top Actuated Bottom Clamp
Ø High Conductance Manifold
Ø Erotherm Temperature Controller
Ø Lo Frequency Auto Tuning (LoFat)
Ø Remote RF Cart
ENI OEM LPG 12A RF Generator
Ø ENI OEM 12XLA RF Generator
Ø 3 Verity EP 200MMD Monochromator
Ø Backside Helium Cooling
Ø Lam Dual Channel Chiller
Ø Orbitally Welded Gas Box
Ø Unit 1660 MFC CF4 200 Sccm
Ø Unit 1200A MFC O2 30 Sccm
Ø Unit 1200A MFC SF6 100 Sccm
Ø Unit 1200A MFC Ar 1000 Sccm
Ø Unit 1200A MFC CHF3 50 Sccm
Ø Unit 1200A MFC N2 100 Sccm
Ø Unit 1200A MFC NF3 1000 Sccm
Ø Unit 1200A MFC He 500 Sccm
Ø Remote AC Box
Asking Price: $365,000