Please contact:

 

OLM Enterprises

Tel: 408-259-1900 Fax: 408-259-1990

Email: info@semiconweb.net

URL: http://semiconweb.net/

 

Reference: ERLAM4520i6

Please include Reference above in your inquiry.

 

Lam 4520i, 6 Inch System Configuration:

 

      ID 1450

      Serial Number: 2653

      Configured for 150mm Wafers

      Through-the-Wall Configuration

      Isotropic Etch Module

      Hine 38A Indexers

      Top Actuated Bottom Clamp

      High Conductance Manifold

      Erotherm Temperature Controller

      Lo Frequency Auto Tuning (LoFat)

      Remote RF Cart

ENI OEM LPG 12A RF Generator

      ENI OEM 12XLA RF Generator

      3 Verity EP 200MMD Monochromator

      Backside Helium Cooling

      Lam Dual Channel Chiller

      Orbitally Welded Gas Box

      Unit 1660 MFC CF4 200 Sccm

      Unit 1200A MFC O2 30 Sccm

      Unit 1200A MFC SF6 100 Sccm

      Unit 1200A MFC Ar 1000 Sccm

      Unit 1200A MFC CHF3 50 Sccm

      Unit 1200A MFC N2 100 Sccm

      Unit 1200A MFC NF3 1000 Sccm

      Unit 1200A MFC He 500 Sccm

      Remote AC Box

 

Asking Price: $365,000