Please contact:
Email: info@semiconweb.net
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6 Inch
Fab EQUIPMENT LIST – MS Details:
20K/Mo, .5 um, CMOS Installation
and Startup |
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Machineries & Equipments |
Code |
Year |
Qty |
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Item
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HIGH
CURRENT IMPLANTER |
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1 |
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EATON
NV20A-200KV |
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1993 |
1 |
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2 |
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EATON
10-160KV |
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1989 |
1 |
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APPLIED
MATERIAL 9200 XL |
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1993 |
1 |
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VARIAN
120 XP |
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1993 |
2 |
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MEDIUM
IMPLANTER |
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3 |
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EATON
6200 |
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1992 |
6 |
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4 |
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varian
350D |
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1989 |
2 |
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IMPLANTER
TESTER |
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5 |
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PROMETRIX
RS35 Resistivity Mapping |
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1 |
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6 |
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PROMETRIX
RS55 Resistivity Mapping |
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1 |
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STEPPER |
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7 |
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Ultra
Stepper, 1100 |
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1989 |
2 |
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8 |
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Ultra
Stepper, 1100 |
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1989 |
2 |
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9 |
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Ultra
Stepper, 1100 |
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1989 |
1 |
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10 |
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ASM
Lithography stepper, model PAS-2500/40 |
SN#7586 |
1996 |
2 |
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15X15mm
field size, laser alignment w/control |
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11 |
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Software ASM licence |
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12 |
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ASM
Lithography stepper, model PAS-5000/50 |
SN#9992 |
1996 |
2 |
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15X15mm
field size, laser alignment w/control |
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13 |
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Software ASM licence |
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1 |
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14 |
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INSPEX
TPC8500 Particle Detector |
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1 |
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TRACK |
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20 |
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SVG track
system,9038S ,90 Series, with video |
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1997 |
1 |
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display ,
enclosure/loader,spin coater,dual sided |
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2 coat,2
vapor prime,2 chill plates,3 hot plate modules |
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robotic
tranfer,FTC units, temp humidity control, chemical |
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cabinet |
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21 |
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SVG track
system,9038S ,90 Series, with video |
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1997 |
1 |
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display ,
enclosure/loader,spin coater,dual sided |
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2 coat,2
vapor prime,2 chill plates,3 hot plate modules |
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robotic tranfer,FTC
units, temp humidity control, chemical |
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cabinet |
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22 |
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SVG track
system,9038S ,90 Series, with video |
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1997 |
1 |
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display ,
enclosure/loader,spin coater,dual sided |
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2 coat,2 vapor
prime,2 chill plates,3 hot plate modules |
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robotic
tranfer,FTC units, temp humidity control, chemical |
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cabinet |
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23 |
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SVG track
system,9038S ,90 Series, with video |
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1997 |
1 |
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display ,
enclosure/loader,spin coater,dual sided |
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2 coat,2
vapor prime,2 chill plates,3 hot plate modules |
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robotic
tranfer,FTC units, temp humidity control, chemical |
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cabinet |
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24 |
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SVG track
system,9038S ,90 Series, with video |
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1997 |
1 |
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display ,
enclosure/loader,spin coater,dual sided |
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3
developer,2 chill plates,6 hot plate modules |
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robotic
tranfer,FTC units, temp humidity control, chemical |
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cabinet |
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25 |
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SVG track
system,9038S ,90 Series, with video |
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1996 |
1 |
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display ,
enclosure/loader,spin coater,dual sided |
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3
developer,2 chill plates,6 hot plate modules |
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robotic tranfer,FTC
units, temp humidity control, chemical |
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