Please contact:

 

SCSES, Santa Clara Semiconductor Equipment Services

Tel: 408-259-1900 Fax: 408-259-1990

Email: info@semiconweb.net

URL: http://semiconweb.net

 

 

 

6 Inch Fab EQUIPMENT LIST MS

Details: 20K/Mo, .5 um, CMOS

Installation and Startup

 

 

 

 

 

 

 

 

 

Machineries & Equipments

Code

Year

Qty

 

 

 

 

 

 

Item

HIGH CURRENT IMPLANTER

 

 

 

1

 

EATON NV20A-200KV

 

1993

1

2

 

EATON 10-160KV

 

1989

1

 

 

APPLIED MATERIAL 9200 XL

 

1993

1

 

 

VARIAN 120 XP

 

1993

2

 

 

 

 

 

 

 

 

MEDIUM IMPLANTER

 

 

 

3

 

EATON 6200

 

1992

6

4

 

varian 350D

 

1989

2

 

 

 

 

 

 

 

 

IMPLANTER TESTER

 

 

 

5

 

PROMETRIX RS35 Resistivity Mapping

 

 

1

6

 

PROMETRIX RS55 Resistivity Mapping

 

 

1

 

 

 

 

 

 

 

 

STEPPER

 

 

 

7

 

Ultra Stepper, 1100

1989

2

 

 

 

 

 

8

 

Ultra Stepper, 1100

1989

2

 

 

 

 

 

9

 

Ultra Stepper, 1100

1989

1

 

 

 

 

 

10

 

ASM Lithography stepper, model PAS-2500/40

SN#7586

1996

2

 

 

15X15mm field size, laser alignment w/control

 

 

 

11

 

Software ASM licence

 

 

 

12

 

ASM Lithography stepper, model PAS-5000/50

SN#9992

1996

2

 

 

15X15mm field size, laser alignment w/control

 

 

 

13

 

Software ASM licence

 

 

1

14

 

INSPEX TPC8500 Particle Detector

 

 

1

 

 

 

 

 

 

 

 

TRACK

 

 

 

20

 

SVG track system,9038S ,90 Series, with video

 

1997

1

 

 

display , enclosure/loader,spin coater,dual sided

 

 

 

 

 

2 coat,2 vapor prime,2 chill plates,3 hot plate modules

 

 

 

 

 

robotic tranfer,FTC units, temp humidity control, chemical

 

 

 

 

 

cabinet

 

 

 

21

 

SVG track system,9038S ,90 Series, with video

 

1997

1

 

 

display , enclosure/loader,spin coater,dual sided

 

 

 

 

 

2 coat,2 vapor prime,2 chill plates,3 hot plate modules

 

 

 

 

 

robotic tranfer,FTC units, temp humidity control, chemical

 

 

 

 

 

cabinet

 

 

 

22

 

SVG track system,9038S ,90 Series, with video

 

1997

1

 

 

display , enclosure/loader,spin coater,dual sided

 

 

 

 

 

2 coat,2 vapor prime,2 chill plates,3 hot plate modules

 

 

 

 

 

robotic tranfer,FTC units, temp humidity control, chemical

 

 

 

 

 

cabinet

 

 

 

23

 

SVG track system,9038S ,90 Series, with video

 

1997

1

 

 

display , enclosure/loader,spin coater,dual sided

 

 

 

 

 

2 coat,2 vapor prime,2 chill plates,3 hot plate modules

 

 

 

 

 

robotic tranfer,FTC units, temp humidity control, chemical

 

 

 

 

 

cabinet

 

 

 

24

 

SVG track system,9038S ,90 Series, with video

 

1997

1

 

 

display , enclosure/loader,spin coater,dual sided

 

 

 

 

 

3 developer,2 chill plates,6 hot plate modules

 

 

 

 

 

robotic tranfer,FTC units, temp humidity control, chemical

 

 

 

 

 

cabinet

 

 

 

25

 

SVG track system,9038S ,90 Series, with video

 

1996

1

 

 

display , enclosure/loader,spin coater,dual sided

 

 

 

 

 

3 developer,2 chill plates,6 hot plate modules

 

 

 

 

 

robotic tranfer,FTC units, temp humidity control, chemical

 

 

 

 

 

cabinet

 

 

 

26

 

SVG track system,9038S ,90 Series, with video

 

1996

1

 

 

display , enclosure/loader,spin coater,dual sided

 

 

 

 

 

3 developer,2 chill plates,6 hot plate modules

 

 

 

 

 

robotic tranfer,FTC units, temp humidity control, chemical

 

 

 

 

 

cabinet

 

 

 

 

 

 

 

 

 

 

 

DIFUSSION

 

 

 

27

 

Bruce diffusion furnace, model Bruce/BTU

 

1988-1996

1

 

 

4 stacks,3 atmos,1CLCVD, Model 7351C controls,

 

 

 

 

 

Argo controller, Bush vacuum pump set, Evan exhaust

 

 

 

 

 

burn box

 

 

 

28

 

Bruce diffusion furnace, model Bruce/BTU

 

1988-1996

1

 

 

4 stacks,1 alloy,1atmos, Model 7351C controls,

 

 

 

 

 

, pump set Schumacher source

 

 

 

 

 

control,Bruce gas control

 

 

 

29

 

Bruce diffusion furnace, model Bruce/BTU

 

1988-1996

1

 

 

4 stacks,2 atmos,2pocl3, Model 7351C controls,

 

 

 

 

 

cantellvered controls, pump set Schumacher source

 

 

 

 

 

control

 

 

 

30

 

Bruce diffusion furnace, model Bruce/BTU

 

1988-1996

1

 

 

4 stacks,1 atmos,2pocl3, Model 7351C controls,

 

 

 

 

 

cantellvered controls, pump set Schumacher source

 

 

 

 

 

control

 

 

 

31

 

Bruce diffusion furnace, model Bruce/BTU

 

1988-1996

1

 

 

4 stacks cantillevered load 735s x controls,vacuum pump

 

 

 

 

 

booster gas cabinet . LPCVD

 

 

 

 

 

control

 

 

 

32

 

Bruce diffusion furnace, model Bruce/BTU

 

1988-1996

1

 

 

4 stacks cantillevered load 735s x controls,vacuum pump

 

 

 

 

 

booster gas cabinet . LPCVD

 

 

 

 

 

control

 

 

 

 

 

 

 

 

 

 

 

WET PROCESS

 

 

 

33

 

Bold 6' /4'/10' wet bench with digital controller,utrasonic generator

 

10

34

 

Yield Up wafer washer,model Omega 1000

 

 

2

35

 

Semitool spin dryer,model 270D,single stack

 

 

5

36

 

Semitool spin dryer,model 270D,double stack

 

 

10

 

 

 

 

 

 

 

 

ETCH

 

 

 

37

 

Applied Materials etcher,model 8310

325801

 

1

 

 

single chamber,load lock,oxide etch, endpoit detector

 

 

 

 

 

vacuum pump set, heater exchange, controller & chiller

 

 

 

38

 

Applied Materials etcher,model 8310

 

 

1

 

 

single chamber,load lock,oxide etch, endpoit detector

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

vacuum pump set, heater exchange, controller & chiller

 

 

 

39

 

Applied Materials etcher,model 8310

 

 

1

 

 

single chamber,load lock,oxide etch, endpoit detector

 

 

 

 

 

vacuum pump set, heater exchange, controller & chiller

 

 

 

40

 

Applied Materials etcher,model 8330

 

 

1

 

 

single chamber,load lock,Metal etch, endpoit detector

 

 

 

 

 

vacuum pump set, heater exchange, controller & chiller

 

 

 

 

 

CTI 8200 compressor,heat exchange,system controller

 

 

 

 

 

gas panels

 

 

 

41

 

Applied Materials etcher,model 8330

 

 

1

 

 

single chamber,load lock,Metal etch, endpoit detector

 

 

 

 

 

vacuum pump set, heater exchange, controller & chiller

 

 

 

 

 

CTI 8200 compressor,heat exchange,system controller

 

 

 

 

 

gas panels

 

 

 

42

 

Applied Materials etcher,model p5000

 

 

1

 

 

1 Metal Etch & 1 Stripper

 

 

 

 

 

vacuum pump set, heater exchange, controller & chiller

 

 

 

 

 

heat exchange,system controller

 

 

 

 

 

gas panels

 

 

 

 

 

 

 

 

 

43

 

Applied Material CVD system, model P5000

 

 

1

 

 

2 champer, 1oxide etch, 1 oxide dep.,robot loader,eni

 

 

 

 

 

power supply,vacuum pump set,mini controller,on board

 

 

 

 

 

gas panels

 

 

 

44

 

Lam etcher,model 4400

 

 

1

 

 

poly silicon etch,end point detector,casette to casette

 

 

 

 

 

RF gen,chiller,remote terminal, PC tracking system,

 

 

 

 

 

Burch CS500 pump stack & Edwards pump stack

 

 

 

45

 

MATRIX 303

 

 

3

 

 

 

 

 

 

 

 

METROLOGY

 

 

 

46

 

Nikon wafer inspection station w/10x eyepiece

 

 

16

 

 

5,20,40,100x objectives,loading station,control pads

 

 

 

 

 

& build in lightsource

 

 

 

 

 

 

 

 

47

 

Opal CD sem system, Model 7830i

 

1996

1

 

 

PR146,4 station load in line w/Mitsubishi CP 2000 color

 

 

 

 

 

video processor & (2) Edwards pumps (2) UPS units

 

 

 

 

 

accurate gas control system

 

 

 

48

 

Opal CD sem system, Model 7830i

 

1994

1

 

 

PR146,4 station load in line w/Mitsubishi CP 2000 color

 

 

 

 

 

video processor & (2) Edwards pumps (2) UPS units

 

 

 

 

 

accurate gas control system

 

 

 

49

 

Tencor SurfScan 7600

 

1996

1

 

 

Particle Inspect System for pattern or unpattern Wafer

 

 

 

 

 

Can detect as 0.15 uM for process levels such as nitride

 

 

 

 

 

polysilicon and TEOS films

 

 

 

50

 

KLA wafer defect system. Model 2608

w2608309

1997

1

 

 

10x20L eyepiece, Sony CCD camera, LCD display

 

 

 

51

 

VWR stanless steel oven

 

1992-1996

10

52

 

Yield Up wafer washer,model Omega 1000

 

1996

2

53

 

Box clearner/cassette

 

 

1

54

 

ASM1000 testcontroller with Electroglas 2001

 

1998

1

55

 

M1000 test controllerer with Electroglas 2001

 

2003

10

 

 

developed by Vietnam Semicodutor team.

 

 

 

56

 

CV Test station/MDC

 

1993

1

57

 

Fusion 150 UV Phostablizer

 

1996

2

58

 

Lumonics Laser wafer Marker

 

1994

2

59

 

Branson IPC resist stripper

 

1994

3

80

 

MGI wafer tranfer at diffusion station

 

1996

10

61

 

QUARTZ tuble cleanner

 

1994

1

62

 

Prometrix film thickness probe/resistity mapping

 

1996

1

62-a

 

Nanometric 210

 

1993

4

 

 

SPUTTER

 

 

 

63

X

VARIAN 3280

 

1992

2

64

X

NOVELLUS CONCEPT ONE PECVD

 

1996

1

64-a

x

MRC ECLISPE MARK II

 

1994

1

 

 

TOTAL EQUIPMENT

 

 

 

 

 

 

 

 

 

 

 

CLEANROOM & COOL AIR & PIPING

 

 

 

65

 

VLSI FILTER .01

 

2002

1300

66

 

CLEANROOM CLASS 10 REBUILT

 

1996

40

67

 

RAISE FLOOR

 

2003

1300

68

 

GAS CABINET REBUILT

 

1996-2003

70

69

 

AIR SHOWER

 

1996

3

70

 

GAS SENSOR

 

2003

100

71

 

GAS DETECTOR SYSTEM VIETNAM SEMICON

 

2003

3

72

 

GAS SCRUBBER AND CONTROLLER

 

1994

3

73

 

CHEMICAL NEUTRALIZATION SYSTEM

 

1994

3

74

 

DI WATER SYSTEM

 

1994-2003

2

75

 

CDA GENERATOR

 

1994

2

76

 

CHILLER 170 TONS

 

1995

2

77

 

AIR HANDLING SYSTEM

 

1995

2

78

 

AIR CONDITIONER SMALL UNITS

 

2003

5

79

 

GAS PIPING /VALVES LOTS

 

2003

10000

80

 

VACUUM SYSTEM

 

1994

1

81

 

RENTAL CARS/ TRUCK LOAD

 

 

1

82

 

CLEANROOM CLASS 10 MODULES FRAME/WALLS

 

2003

10000

83

 

CLEANROOM LIGHT

 

2003

300

84

 

DUCK WORK

 

 

10000

85

 

MISC : CLEAN ROOM CHAIR,CLEANROOM TABLES,MISC

 

 

8200